A stress sensor includes: a substrate, having a face and a recess, open to the face; and a sensor chip of semiconductor material, housed in the recess and bonded to the substrate, the sensor chip being provided with a plurality of sensing components of piezoresistive material. The substrate has a thickness which is less by at least one order of magnitude with respect to a main dimension of the face. Further, the sensor chip has a thickness which is less by at least one order of magnitude with respect to the thickness of the substrate, and a Young's module of the substrate and a Young's module of the sensor chip are of the same order of magnitude.

A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.

A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.

Aspects of the present disclosure relate to controlling a bioprinted tissue. A set of sensor data collected from one or more sensors associated with a bioprinted tissue is received. The set of sensor data is analyzed to determine whether a condition for controlled movement of the bioprinted tissue is met. A control signal is issued to a set of expansive elements to perform the controlled movement in response to determining that the condition for controlled movement of the bioprinted tissue is met.

The present application relates to a touch sensor with multifunctional layers and an intelligent robot. The touch sensor comprises a plurality of sensor units. Each of the sensor units comprises regions contained in four multifunctional layers. The first multifunctional layer and the third multifunctional layer are higher than the second multifunctional layer and the fourth multifunctional later, and the distance from the center of the first multifunctional layer to the center of the third multifunctional layer is greater than the distance from the center of the second multifunctional layer to the center of the fourth multifunctional layer. The first multifunctional layer and the third multifunctional layer form a capacitor C1, and the second multifunctional layer and the fourth multifunctional layer form a capacitor C2.

The present application relates to a touch sensor with multifunctional layers and an intelligent robot. The touch sensor comprises a plurality of sensor units. Each of the sensor units comprises regions contained in four multifunctional layers. The first multifunctional layer and the third multifunctional layer are higher than the second multifunctional layer and the fourth multifunctional later, and the distance from the center of the first multifunctional layer to the center of the third multifunctional layer is greater than the distance from the center of the second multifunctional layer to the center of the fourth multifunctional layer. The first multifunctional layer and the third multifunctional layer form a capacitor C1, and the second multifunctional layer and the fourth multifunctional layer form a capacitor C2.

Provided is a strain sensor. The strain sensor according to embodiments of the inventive concept includes a flexible substrate, rigid patterns on the flexible substrate, the rigid patterns including a first pattern and a second pattern spaced apart from the first pattern in a first direction, a first electrode on the first pattern, a second electrode on the second pattern, the second electrode being spaced apart from the first electrode, and a piezoresistive layer connecting the first electrode and the second electrode. Here, each of the rigid patterns may have a stiffness greater than that of the flexible substrate.

Provided is a strain sensor. The strain sensor according to embodiments of the inventive concept includes a flexible substrate, rigid patterns on the flexible substrate, the rigid patterns including a first pattern and a second pattern spaced apart from the first pattern in a first direction, a first electrode on the first pattern, a second electrode on the second pattern, the second electrode being spaced apart from the first electrode, and a piezoresistive layer connecting the first electrode and the second electrode. Here, each of the rigid patterns may have a stiffness greater than that of the flexible substrate.

A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.

A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.