G01L9/001

FREQUENCY-MODULATING SENSOR ARRAY
20180087984 · 2018-03-29 ·

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

Frequency-modulating sensor array

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

Frequency-modulating sensor array
20250237563 · 2025-07-24 ·

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

GAS PRESSURE SENSOR

A gas pressure sensor includes a squeeze-film damping structure and a computing device. The squeeze-film damping structure includes a first object and a second object capable of moving relative to the first object. A squeeze-film damping phenomenon occurs between the first object and the second object. The computing device calculates an ambient pressure of the squeeze-film damping structure from a thermal noise generated in the second object.