A pressure sensor includes: a pressure receiver having a diaphragm portion that is deformed by receiving pressure on a pressure receiving surface thereof, and a rim portion formed around and integrally with the diaphragm portion and formed to be thicker than the diaphragm portion; and a semiconductor substrate that is connected to a reverse surface of the pressure receiving surface and detects strain in the diaphragm portion by means of a resonating strain gauge. The pressure receiver is formed of ceramic. The semiconductor substrate has: a base portion provided to face the reverse surface; and a connected portion that protrudes from the base portion toward the reverse surface and has a connected surface connected to the reverse surface. The connected portion has an area smaller than an area of the base portion in a case where the pressure sensor is viewed from a direction perpendicular to the reverse surface.

The present disclosure relates to systems, methods, devices for cantilever based pressuring monitoring, and the like. The systems and devices of the present disclosure can be used in caustic or harsh environments. Continuous pressure monitoring using the described devices can enable real-time adjustments for precise process control, contributing to improved efficiency and product quality.

A pressure sensing apparatus comprises an elongate first sensor device in a beam configuration supported at at least one longitudinal end by a rigid support structure and having a deflectable portion. A chamber is disposed adjacent a first, internally-facing, face of the first sensor device. An envelope hermetically seals the first sensor device and the chamber from an ambient environment external to the pressure sensing apparatus. The envelope comprises a flexible membrane disposed over and coupled to a second, externally-facing, face of the first sensor device and extending along at least one or two sides of the first sensor device and the chamber. The sensor device may be a surface acoustic wave device coupled to an RF antenna.