A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.

A measuring element for measuring dynamic pressure, temperature and/or static pressure includes a body made of a piezoelectric material and having opposing side surfaces carrying electrodes. The piezoelectric material of the body is selected in such a manner that a thrust coefficient of the piezoelectric e-tensor is not equal to zero, with the result that the inverse piezoelectric effect can be used, and a transverse coefficient of the piezoelectric d-tensor is not equal to zero and/or a longitudinal coefficient of the piezoelectric d-tensor is not equal to zero, with the result that the transverse piezoelectric effect can be used in the transverse direction and/or the longitudinal piezoelectric effect can be used in the longitudinal direction in a simultaneous manner with the inverse piezoelectric effect.

Transducer assemblies may include a sensor and a housing including a pass-through portion comprising at least one aperture in a portion of the housing extending along a longitudinal axis of the housing and the sensor. Methods of forming transducer assemblies may include welding a first housing section of the transducer assembly to a second housing portion of the transducer assembly and forming at least one aperture in the first housing section extending along a longitudinal axis of the transducer assembly, along a chamber for holding a sensor, and through the weld.

A process device for coupling to an industrial process for use in monitoring or controlling the process includes a device housing configured to physically couple to the industrial process. A process variable sensor is configured to measure a process variable and measurement circuitry coupled to the process variable sensor provides an output related to the sensed process variable. A piezoelectric transducer provides an electrical output related to pressure pulsations in the industrial process. Electrical circuitry in the housing includes an input configured to receive the electrical output from the piezoelectric sensor.

Exemplary semiconductor processing systems may include a chamber body including sidewalls and a base. The chamber body may define an interior volume. The systems may include a substrate support extending through the base of the chamber body. The substrate support may be configured to support a substrate within the interior volume. The systems may include a faceplate positioned within the interior volume of the chamber body. The faceplate may define a plurality of apertures through the faceplate. The systems may include a leveling apparatus seated on the substrate support. The leveling apparatus may include a plurality of piezoelectric pressure sensors.

A pressure sensor for sensing pressure of a fluid includes a diaphragm separator having a protrusion. The pressure sensor further includes a resonator, where the protrusion is in contact with the resonator on a first side of the resonator. The protrusion is positioned to exert an imparted force onto the resonator. The pressure sensor also includes a backing diaphragm positioned on a second side of the resonator. The backing diaphragm exerts a counter force onto the resonator in response to the imparted force.

A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having opposing curved end portions connected to each other by a bridge section. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.

A piezoelectric transducer assembly having improved impact resistance, stability, and higher quality pulse reproductions. The transducer assembly is not hard wired, but contains a spring contacting a piezoelectric disk with a cup operating as the electrical ground mechanism.

A pressure sensor for sensing pressure of a fluid includes a diaphragm flexure and a crystal retaining flexure. The diaphragm flexure is designed to exert imparted force on the crystal retaining flexure. The imparted force is proportional to fluid pressure exerted on the diaphragm flexure. The pressure sensor further includes a resonator having a round outer perimeter. A portion of the crystal retaining flexure is positioned between the diaphragm flexure and the resonator. The crystal retaining flexure is designed to exert a load on the resonator. The load results from the imparted force exerted on the crystal retaining flexure by the diaphragm flexure.

A liquid level meter includes: an exterior portion having an internal space which a liquid to be measured flows in; and a pressure sensitive portion provided inside the exterior portion and having a pressure sensitive surface; wherein the exterior has holes that it is arranged on each of a vertically lower side and a vertically upper side relative to the pressure sensitive surface, and the holes connect an inside and outside of the internal space.