A polymeric fluid sensor includes an inlet configured to receive fluid and an outlet. A polymeric tube is fluidically interposed between the inlet and the outlet and has a first sensing location with a first sidewall thickness and a second sensing location, spaced from the first sensing location, with a second sidewall thickness. A sleeve is disposed about the polymeric tube. The first sidewall thickness is less than the second sidewall thickness and a first sensing element is disposed at the first location and a second sensing element is disposed at the second location. In another example, the first and second sidewall thicknesses are the same and a fluid restriction is disposed within the polymeric tube between the first and second sensing locations.

A semiconductor structure includes a substrate, a sensing device disposed over the substrate and including a plurality of protruding members protruded from the sensing device; a sensing structure disposed adjacent to the sensing device and including a plurality of sensing electrodes protruded from the sensing structure towards the sensing device; and an actuating structure disposed adjacent to the sensing device and configured to provide an electrostatic force on the sensing device based on a feedback from the sensing structure. Further, a method of manufacturing the semiconductor structure is also disclosed.

Provided is a pressure detection device comprising a pressure detection unit configured to detect pressure transmitted to a pressure detecting surface; a flow passage unit including a flow passage configured to allow fluid to flow along a flow direction from an inflow port to an outflow port, and a pressure transmitting surface configured to transmit pressure of fluid flowing through the flow passage to the pressure detecting surface; and a mounting mechanism by which the flow passage unit is removably mounted on the pressure detection unit. The pressure detecting surface includes a sliding layer having a sliding property for when the pressure detecting surface comes in contact with the pressure transmitting surface.

A membrane device/membrane having a flexible membrane section. A first side of the membrane section is exposed to a process medium and a second side has a layer structure, which includes at least a first layer and a second layer. The first layer has a coefficient of thermal expansion, the value of which lies between the values of the coefficients of thermal expansion of the membrane section and the second layer. The second layer, with respect to the process medium or a component of the process medium has a permeability that is lower than the corresponding permeability of the membrane section. A pressure transmitter and a pressure sensor comprising such a membrane device is provided, as well as a use for a membrane device.

A micro-electro-mechanical system (MEMS) sensor can comprise a substantially rigid layer having a center. The MEMS sensor can further comprise a movable membrane that can be separated by a gap from, and be disposed substantially parallel to, the substantially rigid layer. The MEMS sensor can further include a plurality of pedestals extending into the gap, where a first pedestal of the plurality of pedestals can be of a first size, and be disposed a first distance from the center, and a second pedestal of the plurality of pedestals can be a second size different from the first size, and be disposed at a second distance from the center. In another aspect, the substantially rigid layer and the movable membrane can be suspended by a plurality of suspension points. In another aspect, at least one of the plurality of pedestals can be disposed so as to limit a deformation of the movable membrane.

A membrane, a pressure sensor system and a method for producing the pressure sensor system are disclosed. In an embodiment a pressure sensor system includes a housing, at least one media supply line and a pressure-sensitive element including at least one membrane with a hydrophobic region.

The aim of the invention is to economically produce a pressure measuring sensor element, and relates, according to one aspect, to a method for producing a pressure sensor measuring element for a pressure sensor which comprises at least one membrane and a covering protecting the membrane, the pressure sensor element being produced in a layer-by-layer generative production method. This makes it possible to, for example, easily construct a combination sensor for detecting pressure and an additional parameter. It is also possible to structures for reinforcement or for influencing resonant frequency or for influencing heat conduction.

A pressure sensor device of a pressure sensor, in particular a low- or medium-pressure sensor, for example a tire-pressure sensor, includes a sensing device that has a sensing side that can be turned toward a sensing environment having a fluid to be sensed; and, directly and/or indirectly on the sensing side, a fluid-pressure transmitting device, through which a fluid pressure of the fluid to be sensed is transmittable to the sensing device.

A pressure element for monitoring a fluid being applied to the pressure element, wherein the pressure element is configured to close an electrical circuit, as a result of a change in pressure which the fluid exerts on the pressure element, independently of an absolute value of the pressure, where the fluid preferably flows through a pipeline.

To provide a pressure sensor that has high pressure resistance performance, small measurement error by suppressing hysteresis with respect to pressure, and high sensitivity and high productivity, a pressure sensor includes a diaphragm unit with a first main surface that receives a measurement target fluid's pressure and a second main surface located on the opposite side of this first main surface, a housing, and a sensing unit that outputs the diaphragm unit's deformation as an electric signal, in which at least part of the diaphragm unit has a multi-layer structure in which a plurality of thin plate members are stacked, and the plurality of thin plate members are deformed independently of each other while at least part of the plurality of thin plate members is in press-contact to each other in a pressure receiving state in which the measurement target fluid's pressure is applied to the first main surface.