A membrane-based sensor in one embodiment includes a membrane layer including an upper surface and a lower surface, a backside trench defined on one side by the lower surface, a central cavity defined on a first side by the upper surface, a cap layer positioned above the central cavity, and a first spacer extending from the upper surface to the cap layer and integrally formed with the cap layer, the first spacer defining a second side of the central cavity and an inner membrane portion of the membrane layer.

A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.

Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the membrane being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and having at least in sections a thickness of less than 0.5 mm.

A pressure detector includes a first board provided with a first board electrode, a second board provided with a second board electrode, and a sensing unit provided with a first diaphragm electrode and a second diaphragm electrode. A first board body of the first board is provided with a first pressure inlet penetrating through the first board body and a first groove provided on a surface facing the first diaphragm electrode, the first groove being in communication with the first pressure inlet. A second board body of the second board is provided with a second pressure inlet penetrating through the second board body, and a second groove provided on a surface facing the second diaphragm electrode, the second groove being in communication with the second pressure inlet.

A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.

A pressure sensor apparatus for strain gauge pressure sensing includes a plurality of strain gauges including a first strain gauge and a second strain gauge. The pressure sensor apparatus also includes a diaphragm coupled between the plurality of strain gauges and an object configured to apply pressure to the diaphragm. The diaphragm has a first portion and a second portion. The first portion has a first thickness between the object and the first strain gauge. The second portion has a second thickness between the object and the second strain gauge. In an uncompressed state, the second thickness is greater than the first thickness.

The present invention provides a pressure transducer (1) and a method for fabricating a pressure transducer. The pressure transducer is for use in a gas pressure gauge and uses a squeeze-film. The pressure transducer comprises a first wafer (2) and a second wafer (3), wherein—at least the first wafer comprises a device layer (2.1) and a handle layer (2.3); —the second wafer (3) has a top and bottom surface; and wherein—at least the device layer (2.1) of the first wafer (2) is structured. The pressure transducer further comprises a membrane (4.1), a cavity (5) between the membrane (4.1) and the second wafer (3), wherein the cavity (5) has a cavity bottom, an inlet (12) connecting the cavity (5) to a surrounding, a suspension (6) of the membrane (4.1), wherein the suspension (6) allows oscillation of the membrane (4.1), and an oscillation generator to set the membrane (4.1) in oscillation. The pressure transducer is characterized in that the structured device layer (2.1) of the first wafer (2) comprises the membrane (4.1) and suspension (6) of the membrane (4.1), in that the first wafer (2) is bonded to the top surface of the second wafer (3), and in that the handle layer (2.3) of the first wafer (2) is structured to release the suspension (6).

In accordance with one aspect, a device is provided having a transducer comprising a conductor, a diaphragm configured to move relative to the conductor, and a reference volume in communication with the external environment. The diaphragm separates the reference volume and the external environment. The device further includes a controller operably coupled to the transducer and configured to determine an air pressure of an external environment based at least in part on movement of the diaphragm.

A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.

A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.