A pressure sensor comprising: a solid metal sensor body, having a front region and a base adjoining thereto, which has an outer edge, which can be clamped by means of a fastening device; a recess, which is provided in the front region and is open towards a front side of the front region that faces away from the base; a metal measuring diaphragm, to which a pressure is applied from outside during measurement operation and which can be deformed elastically depending upon the pressure, is arranged on the front side of the sensor body, closes off the recess from the outside, and is spaced apart from the outer edge of the front region; and an electromechanical transducer for detection, by means of measuring the pressure-dependent deformation of the measuring diaphragm, having at least one measuring element, which is electrically insulated from the measuring diaphragm and the sensor body by means of an insulating element.

A pressure measurement cell, comprising: a ceramic measurement membrane and a ceramic counterpart. The measurement membrane is joined to the counterpart in a pressure-tight manner forming a pressure chamber between the measurement membrane and the counterpart by means of an active brazing solder. The pressure measurement cell furthermore has a solder stop layer on a surface of the measurement membrane and/or the counterpart, wherein the solder stop layer has a metal oxide or a reduced form of the metal oxide. The metal oxide has at least one oxidation stage, which, assuming an activity coefficient of R.sub.akt=1 at an inverse temperature of 8.Math.10.sup.4/K, has an oxygen coexistence decomposition pressure of not less than 1.sup.23 MPa (10.sup.23.Math. bar) and not more than 1.sup.12 MPa (10.sup.12.Math. bar) and which, assuming an activity coefficient of R.sub.akt=1, at an inverse temperature of 9.Math.10.sup.4/K has an oxygen coexistence decomposition pressure of not less than 1.sup.27 MPa (10.sup.27 bar) and not more than 1.sup.15 MPa (10.sup.15 bar). Suitable metal oxides are, for example, oxides of chromium, tungsten or titanium.

Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

A pressure measuring sensor having a ceramic pressure sensor includes a temperature transducer to provide a thermovoltage dependent on a temperature gradient. The temperature transducer includes two series-connected thermoelements, each of which has a galvanic contact between a wire of the thermoelement and a connecting conductor connecting the galvanic contacts of the two thermoelements to one another. The temperature transducer enables the compensation for a measuring error caused by a temperature gradient occurring along the pressure measuring sensor.

A pressure measuring device comprises a capacitive pressure measuring cell, a process connector including a retaining element, a housing mounted on the process connector, and a sealing element arranged between an inwardly projecting region of the retaining element and the pressure measuring cell. The retaining element is configured with a cap with a base area portion and an outer area portion bent over with respect thereto and fitted over an end face of the process connector. The retaining element is in a material-bonded and/or form-fit manner connected to the process connector exclusively in the bent-over outer area portion so that the base area portion assumes a resilient property.

The invention relates to a capacitive vacuum measuring cell having a first housing body (1) with a membrane (2) which is arranged at a distance therefrom so as to form a seal in the edge region (3) in such a way that a reference vacuum space (9) is formed therebetween, wherein opposite surfaces (7, 8) of the first housing body and of the membrane (2) comprise at least one electrode (G, G1, G2, . . . Gn, M1, M2, . . . Mn). A second housing body (4) is provided so as to form a seal with respect to the membrane (2) in the edge region and forms, with said membrane, a measuring vacuum space (10) in which connection means (5) are provided for connection to a process space.

Aiming to more easily perform calibration of a sensor output from a pressure sensor, the calibration being necessitated due to the occurrence of sedimentation, a resonance point measurement unit (122) measures a resonance point of a diaphragm (112) on the basis of the result obtained by performing measurement of a constant pressure using the pressure sensor while a power supply frequency is changed, a characteristic calculation unit (123) calculates, on the basis of the measured resonance point, an elastic modulus of the diaphragm (112) at the time of the measurement of the resonance point, and a correction unit (124) calculates a corrected sensor sensitivity resulting from correcting a sensor sensitivity of a sensor chip (101) on the basis of the elastic modulus calculated by the characteristic calculation unit (123).

A capacitive sensor for monitoring stresses acting in a construction structure and having a multi-layer structure provided with an upper conductive layer defining an upper outer surface of the sensor. A lower conductive layer defines a lower outer surface. At least a first structural layer of insulating material is in contact with the upper conductive layer and at least a second structural layer of insulating material is in contact with the lower conductive layer. At least a first plate layer of conductive material and at least a second plate layer, of conductive material, and at least one dielectric layer is interposed between the first plate layer and the second plate layer to define at least one detection capacitor inside the multi-layer structure of the sensor. The upper and lower conductive layers jointly defining an electromagnetic screen for screening the detection capacitor against electromagnetic interference originating from outside the capacitive sensor.

A pressure sensor assembly for use in sensing a pressure of a process fluid in a high temperature environment includes an elongate sensor housing configured to be exposed to the process fluid and having a cavity formed therein. A pressure sensor is positioned in the cavity of the elongate sensor housing. The pressure sensor has at least one diaphragm that deflects in response to applied pressure and includes an electrical component having an electrical property which changes as a function of deflection of the at least one diaphragm which is indicative of applied pressure. A flexible membrane in contact with the at least one diaphragm is disposed to seal at least a portion of the cavity of the sensor housing from the process fluid and flexes in response to pressure applied by the process fluid to thereby cause deflection of the at least one diaphragm.

A pressure change measuring unit causes a temperature control unit to operate and vary the temperature of a sensor chip in a predetermined temperature range, and measures changes in pressure value output from the sensor chip whose temperature is being varied. A temperature characteristic calculating unit calculates a temperature characteristic of the sensor chip from changes in the temperature of the sensor chip caused by the operation of the temperature control unit and changes in pressure value measured by the pressure change measuring unit.