The invention relates to relates to a pressure cell configured for working according to the piezo-resistive principle and for use under high-energy radiation, particularly for use in space, i.e. to work under cosmic radiation. In order to reduce radiation drift effects during operation of the pressure cell, the pressure cell is treated with a radiation hardening procedure comprising an exposing of the cell with a radiation dose up to a saturation range of a radiation drift curve or above.

Apparatus and associated methods relate to sensing pressure and mitigating the error introduced by the thermoelectric effect. A pressure sensing device includes a pressure sensor, a temperature sensor, and an error correction device. The pressure sensor produces a voltage output proportional to a sensed pressure. The temperature sensor measures a first temperature at a first location and a second temperature at a second location to produce a temperature difference signal. The error correction device modifies the pressure output proportionally to the temperature difference signal to produce a temperature adjusted pressure output which compensates for error introduced from the temperature difference.

A physical disturbance sensor includes a plurality of piezoresistive elements configured in a resistive bridge configuration. A signal transmitter is electrically connected to the physical disturbance sensor and configured to send an encoded signal to the piezoresistive elements of the resistive bridge configuration. A signal receiver is electrically connected to the piezoresistive elements and configured to receive a signal from the physical disturbance sensor. The received signal from the physical disturbance sensor is correlated with the sent encoded signal in determining a measure of physical disturbance.

It is desired to further reduce output errors which are caused by temperature characteristics. A sensor device is provided which includes a sense circuit which outputs a sense signal according to a magnitude of a detected physical quantity, an amplifier circuit which amplifies the sense signal, and a switching unit which switches at least one of a sensitivity of the sense circuit and an offset of the amplifier circuit discontinuously according to whether a temperature measurement value exceeds a threshold value.

A sensor apparatus includes: a sensor that includes a resistor bridge circuit; a temperature detection circuit that provides a first path and a second path; a voltage measurement portion that measures a voltage of each of the differential output terminals; a controller that causes the voltage measurement portion to measure the voltage of each of the two differential output terminals; and a calculator that calculates a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor.

A device for measuring a strain of an object independently of temperature variations includes: at least one strain gauge that is attachable directly or indirectly to the object whose strain is to be measured; a first temperature sensor for measuring a temperature of the at least one strain gauge; read-out electronics for measuring a change of electrical resistance of the at least one strain gauge as a measured electrical resistance change, the read-out electronics including at least one fixed resistor whose value is relied upon when obtaining a value of the change of electrical resistance of the strain gauge as a result of the measurement, the read-out electronics being such that a temperature of the at least one fixed resistor is known and/or obtainable by measurement; and an evaluation unit for: correcting the measured electrical resistance change, and/or a strain of the strain gauge and/or the strain of the object.

A physical disturbance sensor includes a plurality of piezoresistive elements configured in a resistive bridge configuration. A signal transmitter is electrically connected to the physical disturbance sensor and configured to send an encoded signal to the piezoresistive elements of the resistive bridge configuration. A signal receiver is electrically connected to the piezoresistive elements and configured to receive a signal from the physical disturbance sensor. The received signal from the physical disturbance sensor is correlated with the sent encoded signal in determining a measure of physical disturbance.

A micromechanical pressure sensor for measuring a pressure differential includes a diaphragm having an inner region and two edge regions, one opposite the other with respect to the inner region. Two or more piezoresistive resistance devices are on the diaphragm, at least one in each of the inner and edge region, and are configured to be electrically connected in a bridge circuit. The micromechanical pressure sensor is configured so that an operating temperature of the one or more piezoresistive resistance devices in the inner region is substantially the same as an operating temperature of the one or more piezoresistive resistance devices in at least one of the edge regions throughout a full operating range such that an error of the micromechanical pressure sensor output resulting from self-heating is less than if the micromechanical pressure sensor were not configured to maintain the operating temperatures substantially the same.

A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.

A physical disturbance sensor includes a plurality of piezoresistive elements configured in a resistive bridge configuration. A signal transmitter is electrically connected to the physical disturbance sensor and configured to send an encoded signal to the piezoresistive elements of the resistive bridge configuration. A signal receiver is electrically connected to the piezoresistive elements and configured to receive a signal from the physical disturbance sensor. The received signal from the physical disturbance sensor is correlated with the sent encoded signal in determining a measure of physical disturbance.