An example system and an associated method are provided herein. In some embodiments, the system may include a flow channel having an inlet port and an outlet port. In some embodiments, the system may include a pressure sensor having a first port and a second port. In some embodiments, the system may include a first diaphragm disposed on the first port and a second diaphragm disposed on the second port. In some embodiments, the first diaphragm is in fluid communication with the inlet port and the second diaphragm is in fluid communication with the outlet port. In some embodiments, the pressure sensor is configured to determine a pressure difference between the inlet port and the outlet port. In some embodiments, the system may include a computing device, the computing device configured to determine a flow rate of a fluid in the flow channel based at least on the pressure difference.

A sensor device comprising at least one sensor element and a sealed fluid cell having a compensation portion and a measurement portion coupled to the at least one sensor element. The sensor device is configured such that the compensation and measurement portions deform in response to externally applied fluid pressure to thereby change internal pressure conditions inside the sealed fluid cell and cause the measurement portion to experience differential pressure conditions of corresponding to the external and internal pressures.

A differential pressure sensor module includes a base having a pair of process fluid pressure inlets and defining a sensor chamber having a sensor chamber inlet. A differential pressure sensor is disposed within the sensor chamber and has an inlet configured to receive a first pressure and provide a signal indicative of a difference between the first pressure and a sensor chamber pressure external to the differential pressure sensor within the sensor chamber. A pair of isolation diaphragms are provided in substantially the same plane, with each isolation diaphragm sealing a respective process fluid pressure inlet. A first fluid passageway is operably coupled to one of the isolation diaphragms and the inlet of the differential pressure sensor. A second fluid passageway is operably coupled to the other of the isolation diaphragms and to the sensor chamber inlet. An overpressure protection feature is operably coupled to the sensor chamber, the first fluid passageway and the second fluid passageway.

A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.

A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as well as an elastic clamping apparatus, which has two clamping areas, each of which acts on a respective rear side of the platform facing away from the measuring membrane. The clamping apparatus has at least one elastic element, via which the clamping areas are mechanically coupled, in order to clamp the pressure difference measuring cell with an axial clamping force. The clamping areas are rigid, wherein the clamping apparatus comprises a clamp with two clamping bodies, each of which has one of the clamping areas. At least one of the clamping bodies has an elastic element, the clamping bodies are connected with one another under stress, in order to exert a clamping force on the pressure difference measuring cell, wherein the two clamping bodies have a central, form retaining section, which includes the clamping areas. On the form retaining section of at least one clamping body, especially both clamping bodies, elastic sections adjoin, which form the elastic elements.

A manometer with a cadence indicator includes a housing and a gas pressure indicator interfaced to the housing. An input port of the housing is for connecting the manometer to a source of gas pressure, such that the gas pressure at the input port is reflected in the gas pressure indicator, providing a pressure reading. A cadence module is interfaced to the housing such that cadence is provided concurrently with the local of the gas pressure indicator in two cadence pulse frequencies, one for timing of chest compressions and one for timing of administration of breaths. Cadence is provided visually or audibly.

A sensor device includes a pressure sensor including a first diaphragm, and a pressure reference chamber which is positioned on a side opposite to the pressure receiving surface with respect to the first diaphragm and measuring pressure received by the pressure receiving surface, a differential pressure sensor including a second diaphragm which is bent and deformed by pressure reception and of which one surface is a first pressure receiving surface and the other surface is a second pressure receiving surface and measuring differential pressure which is a difference between pressure received by the first pressure receiving surface and pressure received by the second pressure receiving surface, and a correction unit correcting an output of one of the pressure sensor and the differential pressure sensor based on an output of the other of the pressure sensor and the differential pressure sensor.

A sensor includes a housing having a body, a plurality of ports, and a plurality of cavities. The ports include a first port and a second port, and the cavities include a first cavity disposed in the first port and a second cavity disposed in the second port. The sensor includes a first diaphragm disposed in the first port and enclosing the first cavity and a second diaphragm disposed in the second port and enclosing the second cavity. The first diaphragm and the second diaphragm are coplanar with one another in a first plane. The sensor includes a die disposed in the first cavity and having a membrane that is deflectable according to a differential pressure between a first pressure in the first cavity and a second pressure in the second cavity. The die is attached to the housing along a second plane parallel to the first plane.

An apparatus includes a sensor body and a sensor configured to measure differential pressure. The apparatus also includes first and second coplanar pressure inputs in or on the sensor body, where the pressure inputs are configured to provide multiple input pressures to the sensor. Each pressure input includes a barrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm. First and second fill fluid may be configured to convey the pressures from the barrier diaphragms of the pressure inputs to the sensor as first and second input pressures. Passages may be configured to transport the fill fluid between (i) gaps between the barrier diaphragms and the overload diaphragms of the pressure inputs and (ii) the sensor and gaps between the overload diaphragms and the sensor body.

An apparatus includes a sensor body, a sensor configured to measure differential pressure, and first and second pressure inputs in or on the sensor body. The pressure inputs are configured to provide multiple input pressures to the sensor. Each pressure input includes a barrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm. The overload diaphragm is also configured to exert a preload force against the sensor body. The overload diaphragm of each pressure input may include multiple convolutions. Bases of the convolutions may be configured to provide the preload force, and tops of the convolutions may be separated from the sensor body by gaps. Tops of the convolutions that are non-adjacent may be configured to provide the preload force, and tops of the convolutions between the non-adjacent convolutions may be separated from the sensor body by gaps.