There is provided an installation structure for an oil pressure sensor, including: a crankcase in which a main gallery that extends in one direction is formed; and the oil pressure sensor detachably installed on an outer surface of the crankcase. The oil pressure sensor is configured to detect an oil pressure of a branch passage branching from one end of the main gallery. In a bottom view of a vehicle, a connector of the oil pressure sensor is oriented to an outside of the vehicle, and the connector of the oil pressure sensor overlaps with the crankcase.

A vacuum gauge protector for deposition systems includes a body comprising an input port that is configured to couple to a vacuum chamber, and an output port configured to couple to a vacuum gauge. A deposition material filter is positioned in the body to present a tortuous path to gases comprising deposition materials entering the body where the surface area of the deposition material filter is greater than 2000 mm.sup.2. In addition, the deposition material filter restricts deposition material from passing through the body to the output port so as to reduce vacuum gauge contamination while maintaining enough gas flow through the body to the output port so that the vacuum gauge response time can be less than 10 seconds.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. Multiple small inlet apertures of the transducer housing or input tube filter assembly may be utilized to filter particulate matter from the measurement media/fluid. The resonant frequency and dampening characteristics of the pressure transducer assembly may be configured by the input tube filter assembly such that temporary clogging of a portion of the small inlet apertures does not appreciably affect the resonant frequency and dampening characteristics. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more apertures of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define at least a filter aperture, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

Provided is a differential pressure sensor capable of improving joining stability of a filter. The differential pressure sensor includes: a sensor module configured to detect a pressure difference between an atmospheric pressure and a pressure of a measured medium; a case body, which is configured to contain the sensor module, and in which an atmosphere introducing hole for introducing atmospheric air into the case body is formed; and a filter provided from inside the case body to cover the atmosphere introducing hole, the case body having a protrusion, which protrudes to an inside of the case body, the atmosphere introducing hole being formed in the protrusion, the filter being joined to the protrusion.

An omni-directional anemometer may include a housing, a cavity, and a plurality of ports in fluid communication with the atmosphere. The ports may include at least one sensor configured to measure air pressure. The robust housing may be formed by additive manufacturing, casting, machining, or molding. The anemometer may include a controller configured to determine wind speed and direction using the air pressure measurement signals from the at least one sensor. The anemometer may include a communication module configured to send and/or receive signals from the at least one sensor and the controller using wired and/or wireless communication. The communication module may send or receive signals to or from a network, a server, a vehicle, a structure, and/or a user interface. The anemometer may include a power supply connected to the at least one sensor, controller and/or communication module.

The present invention relates to a MEMS deposition trap (10) comprising: a manifold layer having manifold inlet channels and manifold outlet channels, a microchannel layer (20) having microchannels (33), wherein the manifold layer and the microchannel layer are bonded together so as to form a fluid path, wherein a fluid is forced to pass through the microchannels (33) when flowing from the manifold inlet channels to the manifold outlet channels. Furthermore, it relates to a vacuum sensor having such a deposition trap as and to a process chamber of a manufacturing equipment, preferably used for thin-film deposition or etching processes, comprising such a vacuum sensor.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. Multiple small inlet apertures of the transducer housing or input tube filter assembly may be utilized to filter particulate matter from the measurement media/fluid. The resonant frequency and dampening characteristics of the pressure transducer assembly may be configured by the input tube filter assembly such that temporary clogging of a portion of the small inlet apertures does not appreciably affect the resonant frequency and dampening characteristics. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more apertures of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define at least a filter aperture, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

The disclosed technology includes a transducer assembly having a first transducer element. The transducer assembly includes a first filter element adjacent to least of portion of the first transducer element such that a first cavity is defined between the first filter element and the first transducer element. The first filter element includes a plurality of machined passageways in communication with the first cavity. The transducer assembly also includes an inlet passage having a first end in communication with a first external portion of the transducer assembly and a second end in communication with the plurality of machined passageways.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.