Disclose is a method for fabricating a semiconductor device. The method includes: forming a groove such as by etching one side surface of a first substrate; attaching a second substrate including a silicon layer on the etched surface of the first substrate formed with the hollow groove; etching the second substrate so as to leave substantially only the silicon layer; forming a thin film structure on the surface of silicon layers of the second substrate; and separating the second substrate formed with the thin film structure from the first substrate. For example, the groove structure may be formed in the lower portion of the device in the process of fabricating the semiconductor device to facilitate the final device separation.

A sealing valve is provided for a sensor that includes a sensing element and a sensor opening that exposes the sensing element. The sealing valve includes a housing that is configured to be mounted to the sensor such that an internal channel of the housing fluidly communicates with the sensor opening. The sealing valve includes a float element configured to float along a surface of the liquid. The float element is configured to move within the internal channel between an open position and a closed position. The float element is configured to close the sensor opening to the internal channel in the closed position. The sensor opening is open to the internal channel when the float element is in the open position. The float element is configured to rise with the surface of the liquid within the internal channel toward the closed position.

A sensor apparatus having a crimped housing and a method of assembling a sensor apparatus having a crimped housing are disclosed. The sensor apparatus comprises a sensor port, a tubular thin-walled housing coupled to the sensor port and comprising a crimping portion, a base portion, and a step feature that is formed in the housing, the step feature partitioning the crimping portion from the base portion, sensor components disposed within the interior of the base portion of the housing, and an electrical connector coupled the housing and comprising leads electrically coupled to the sensor components and a connector flange, wherein a rim of the crimping portion of the housing is crimped onto the connector flange such that the electrical connector is retained in the housing. Dimples, created by protrusions on the crimp dye, on both housing rim and connector flange assure the housing rim hold the connector in rotation direction

A sensor element is provided for detecting at least one property of a fluid medium. The sensor element comprises at least one housing having at least one inflow opening accessible to the fluid medium. At least one pressure sensor for detecting a pressure of the fluid medium is situated in the inflow opening. In the inflow opening in front of the pressure sensor, a plurality of ribs project from at least one wall of the inflow opening into the inflow opening.

The present invention relates to a flow measurement system for controlling a gas fireplace (1) comprising a flow passage (11) in fluid communication with the gas fireplace by use of a differential pressure pressostat (13). A first gauge connector (14) is in the flow passage and connected to a first pressure sensor in the differential pressure pressostat for measuring a total pressure in a fluid flowing in the flow passage. A second gauge connector (15) is arranged near the first gauge connector and connected to a second pressure sensor in the differential pressure pressostat for measuring a static pressure in the fluid flowing in the flow passage. Based on these measures a dynamic pressure, and there from the flow velocity, in the fluid flowing in the flow passage is determined and used to switch off the gas fireplace, when the flow becomes below a set threshold value.

The invention discloses a pneumatic sensor and an electronic cigarette having same, wherein the pneumatic sensor comprises a main body, a trigger component and a waterproof and breathable membrane, wherein the main body is provided with an internal cavity and at least one suction hole communicated with the internal cavity, the waterproof and breathable membrane is mounted in the main body and covers each of the suction holes, and the triggering component is mounted in the internal cavity and is triggered when the airflow is sucked from the suction hole to the outside. The technical solution of the invention effectively prevents the phenomenon that tobacco liquid and condensed water penetrate into the sensor, thereby causing damage to the sensor.

A micromechanical device that includes a carrier substrate; a sensor device that is situated on the carrier substrate and spaced apart from a surface section of the carrier substrate with the aid of spring elements in such a way that the sensor device is oscillatable relative to the surface section; and at least one stopper element, situated on the sensor device and/or on the surface section of the carrier substrate, which limits a deflection of the sensor device in the direction of the surface section.

The present invention relates to a urea pressure and temperature sensor (100) with improved sealing. More particularly, the present invention relates to a urea pressure and temperature sensor (100) comprising of a connector seal (7) and a sealing gasket (4) that improves the sealing and prevents any water ingress or urea accumulation.

A breathable waterproof sheet, which interposes a support layer having a plurality of holes formed therein, thus preventing a waterproof air-permeable layer from colliding with a pressure sensor by a water pressure. The breathable waterproof sheet includes a waterproof air-permeable layer formed of a film having elasticity, an adhesive layer having one surface adhered to one surface of the waterproof air-permeable layer, and a support layer having a plurality of air-permeable holes formed therein and having one surface adhered to the other surface of the adhesive layer.

An apparatus includes a base assembly, a gasket and a housing assembly. The base assembly may have a locking feature and a bearing feature. The locking feature may have a first passage in communication with an exterior of the apparatus. The gasket may be disposed on the base assembly and may have (i) a base portion, (ii) a column portion and (iii) a second passage in communication with the first passage. The housing assembly may have a sealing feature and may be configured to hold a sensor. The sealing feature (a) may mate with the bearing feature and (b) may compress the base portion of the gasket. The sensor (a) may seal to the column portion of the gasket and (b) may be in communication with the exterior of the apparatus through the first passage and the second passage.