A sensor connector compatible with various sensor unit repertoires and capable of improving production efficiency is provided. The sensor connector includes terminal modules to be inserted into a module inserted portion, and commonized pogo pin type terminal module is brought into contact with a connection terminal via slide contact segments capable of sliding relative to the connection terminal exposed to a region closer to the module inserted portion. Thus, the sensor connector can be compatible with the sensor unit 1 having various repertoires by changing, for example, the arrangement and the number of poles of the module inserted portions of the connector housing.

A pressure sensor module detects a fluid pressure on the basis of a differential pressure between a reference pressure and the fluid pressure, and includes: a housing; a sensor element that can contact each of the reference pressure and the fluid pressure; a support member that supports the sensor element and is held in the housing; a first pressure passage that guides the fluid pressure to a first contact surface of the sensor element; and a second pressure passage that is sealed from the first pressure passage and guides the reference pressure to a second contact surface of the sensor element.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

A pressure sensor that includes a housing with an upper housing part and a lower housing part, the upper housing part and the lower housing part being configured such that a chamber is formed between them. A diaphragm is provided between the upper housing part and the lower housing part, and dividing the chamber into an upper chamber and a lower chamber. A magnetic core is linked to the diaphragm. An operating spring includes a top end and a bottom end, the top end being supported against the upper housing part and the bottom end being supported against the magnetic core. At least one of the top end and the bottom end of the operating spring is provided with an adhesive layer. The pressure sensor enables the operating spring and the magnetic core to move integrally with each other, thereby improving the precision of the pressure sensor.

Fixed conductive plates are buried in a case. In its internal space, a first contact surface, which is part of each fixed conductive plate, and a second contact surface, which is an inner surface of the case, are opposite to each other, and an elastic conductive plate is interposed in this opposing portion. The elastic conductive plate is structured so that, in a restricting portion, a support piece portion is fitted to the thin plate portion of the fixed conductive plate and that an elastic arm portion extends from the support piece portion.

A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.

Embodiments herein relate to filter restriction indicator (100) for a filtration system. In an embodiment, a filter restriction indicator (100) can have an electronics control cartridge (800) including an internal spacer frame (304), a first circuit board (346), a second circuit board (302) disposed over the first circuit board (346), and a pressure sensor (336) in electrical communication with the first circuit board (346). A filter fluid tube (318) defines a filter fluid channel (348) in fluid communication with the pressure sensor (336). The internal spacer frame (304) can secure the first circuit board (346) at a fixed distance from the second circuit board (302). A lower housing (108) defines an ambient pressure port (310). A cap (102) defines an interior volume (332) into which the electronics control cartridge fits (800). The cap (102) can define a shielding panel (112) configured to fit over an exterior portion of the ambient pressure port (336) when the cap (102) is engaged with the lower housing (108). Other embodiments are also included herein.

In an embodiment a pressure sensor device includes a substrate body, a pressure sensor having a membrane and a cap body having at least one opening, wherein the pressure sensor is arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, and wherein the mass of the substrate body amounts to at least 80% of the mass of the cap body and at most 120% of the mass of the cap body.

A pressure sensor is described and shown for determining the pressure of a fluid medium in a volume limited by a wall. The pressure sensor includes at least one sensor element, a sensor housing, at least one first pressure compensation channel and a protective cap. The sensor element is arranged in the sensor housing. The protective cap is connected to the sensor housing on the medium side. The sensor element is connected to the medium via the at least one first pressure compensation channel during operation. The at least one first pressure compensation channel is at least partially introduced as a recess in the protective cap. The at least one first pressure compensation channel is geometrically designed in such a way that, in order to relieve the sensor element, pressure peaks are damped by deflection and/or by increased wall friction of the medium.

A differential pressure sensor includes a containment body including internally a wall creating first and second cavities, a piston slidingly housed in the first cavity and including a magnet mounted on a first axial end thereof, proximal to the wall and a magnetic sensor housed in the second cavity, near the wall for measuring the axial distance of the magnet from the wall and generating a signal representing such distance. The pressure sensor further includes a lighting element for emitting light radiation, a control circuit operatively interposed between the magnetic sensor and the lighting element and configured for varying the light radiation emitted by the lighting element as a function of a variation in the representative signal generated by the magnetic sensor. An interface element includes a radiant surface facing outwards from the body and an optical guide, extending between the lighting element and the radiant surface.