A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

Sensor packages and manners of formation are described. In an embodiment, a sensor package includes a supporting die characterized by a recess area and a support anchor protruding above the recess area. A sensor die is bonded to the support anchor such that an air gap exists between the sensor die and the recess area. The sensor die includes a sensor positioned directly above the air gap.

A pressure sensor includes a sensor assembly and an evaluation unit. The; sensor assembly includes a sensor and an electrode arrangement. The sensor is configured to generate signals under the action of a pressure profile. The electrode arrangement is configured to transmit the signals to the evaluation unit. The evaluation unit includes an electric circuit board. The electric circuit board includes a base material that is electrically insulating with a specific volume resistance that is at least equal to 10.sup.15 cm at room temperature. The electric circuit board includes a high temperature region facing the sensor assembly and a normal temperature region that faces away from the sensor assembly.

A pressure sensor assembly for measuring the pressure of a first fluid. The assembly having a first housing including a pressure sensing device arranged therein. A diaphragm is arranged on a surface of the first housing and is configured to transmit a force exerted on a first side thereof to the pressure sensing device. A second housing is provided and attached to the first housing. The second housing may be arranged generally circumferentially around the diaphragm. A compressible element is provided and arranged within a compressible element space defined within the second housing. The compressible element is configured to transmit a force exerted thereon by the fluid to the first side of the diaphragm.

The objective of the present invention is to provide a pressure sensor having an improved effect of suppressing peeling of a pressure accepting portion such as a diaphragm. A pressure sensor 15 according to the present invention comprises a sensor enclosure 32 in which a first flow passage 33 and a second flow passage 35 that branches from the first flow passage 33 are formed, a sensor chip 31 which includes a diaphragm portion 31a provided so as to block the second flow passage 35, and which is joined to the sensor enclosure 32, a cap member 34 installed on the sensor chip 31 so as to cover the diaphragm portion 31a from the opposite side to the sensor enclosure 32, and a pressing member 60 for pressing the cap member 34 toward the sensor chip 31, wherein an inner circumference of a part of the cap member 34 that is placed on the sensor chip 31 is disposed so as to be positioned further toward the center of the diaphragm portion 31a than an inner circumference of a joint portion 36 of the sensor enclosure 32 and the sensor chip 31.

According to one embodiment, a pressure detection device includes a buffer layer formed of an elastic material and including a press surface including a biaxially curved surface and an installation surface including a uniaxially curved surface opposing the press surface with an interval therebetween, and a sheet-shape pressure sensor provided in tight contact with the installation surface and uniaxially curved along the installation surface.