According to one aspect of the technique, there is provided a method of manufacturing a semiconductor device, including checking a leak from a process furnace before a substrate is processed. The checking includes: (a) measuring, by a partial pressure sensor provided at an exhaust pipe, an oxygen partial pressure value of a residual oxygen after the process furnace is vacuum-exhausted; (b) comparing the oxygen partial pressure value measured by the partial pressure sensor with a threshold value; and (c) when the oxygen partial pressure value is higher than the threshold value in (b), performing at least one among: purging the process furnace and evacuating the process furnace.

According to one aspect of the technique, there is provided a method of manufacturing a semiconductor device, including checking a leak from a process furnace before a substrate is processed. The checking includes: (a) measuring, by a partial pressure sensor provided at an exhaust pipe, an oxygen partial pressure value of a residual oxygen after the process furnace is vacuum-exhausted; (b) comparing the oxygen partial pressure value measured by the partial pressure sensor with a threshold value; and (c) when the oxygen partial pressure value is higher than the threshold value in (b), performing at least one among: purging the process furnace and evacuating the process furnace.

A biocontainer having a first film, the film having an interior and exterior side; articulating elements disposed on or within the first film, the articulating elements comprising at least one a folded hinge, a sealed joint, a thinned pathway, a bowed path, an embedded polymeric or metallic cylindrical fiber or rod; and a second film, optionally comprising articulating elements, joined to the first film, to form a biocontainer having a closed volume, wherein the articulating elements permit the biocontainer to expand and collapse along the articulating elements.

A method for testing a test specimen for the presence of a leak using a film chamber for accommodating the test specimen, wherein the film chamber comprises walls enclosing a film chamber volume, which walls include at least one flexible wall area, comprising the steps of: placing the test specimen into the film chamber, and closing the film chamber, characterized in that complete closing of the film chamber is determined on the basis of the signal of a position measuring device which detects the relative position of the film chamber walls with respect to each other.

A leak detection device operable to measure fluid leaks in an element to be tested that is positioned in a first enclosure. In one example, a measuring module is positioned in a second enclosure and connected to the first enclosure and the element to be tested by an aeraulic connection. At least one of the first enclosure and the measuring module are thermally insulated using an insulating material.

A leak detection apparatus includes a test chamber and a vacuum source connected to the test chamber via a pneumatic line. A first pressure transducer is in communication with the test chamber. A controller is configured to collect and analyze data generated by the first pressure transducer at a predetermined frequency throughout an entire test cycle. The controller is also configured to convert specified collected data to logarithmic scale to accumulate a first set of data and apply a linear regression to the first set of data and determine regression parameters.

A delaminatable container is provided that includes a valve member allowing suppression of interference with the motion of a mobile part during use. The present invention provides a delaminatable container including an outer shell and an inner bag, the inner bag to be shrunk with a decrease in contents, wherein the outer shell includes a fresh air inlet communicating an external space with an intermediate space between the outer shell and the inner bag, the fresh air inlet has a valve member mounted thereto to regulate air communication between the intermediate space and the external space, the valve member includes a tube having a cavity provided to communicate the external space with the intermediate space and a mobile part movably stored in the cavity.

A case airtightness evaluation method evaluates airtightness of a case mounted at a vehicle. A pressure measuring step of the evaluation method includes pressurizing or depressurizing air in the case, allowing pressure in the case to stabilize, and then measuring a pressure change in the case. During the measurement of the pressure change, a deformation amount acquiring step acquires a deformation amount of a specific location of the case. Based on the acquired deformation amount, a correcting step corrects the measured pressure change. Based on the corrected pressure change, an evaluating step evaluates airtightness of the case.

This disclosure relates to equipment utilized to manufacture chemical agents, particularly biopharmaceuticals, using Disposable Containers (DCs).

A biocontainer film enhanced with an abrasion resistant or “cut-proof” substrate. Such substrates can be combined with current biocontainer materials, via various techniques of embedding, coextrusion or laminating, to maintain the cleanliness and low extractables already validated for biotech manufacturing. The substrate of choice may be constructed from materials known to be more resistant to abrasion and sharp razor type cuts or from materials oriented in such a way to prevent puncture to occur. The new substrate must also be flexible to allow for typical folding as demonstrated by current packaging practices. The new substrate may be constructed from materials other than polymers such as metal, glass or carbon or in combination with polymers. A non-constrained pressure test is also disclosed.