A manifold system and methods of collecting samples, where the manifold system comprises multiple input sample ports and a preferably rotatable flow focusing element. The manifold system is able to sample aerosols and gases from multiple sample points, such as from cleanrooms and manufacturing environments, for collection and analysis. The flow focusing element reduces cross talk and cross contamination of particles, including nanoparticles, between different samples.

A manifold system and methods of collecting samples, where the manifold system comprises multiple input sample ports and a preferably rotatable flow focusing element. The manifold system is able to sample aerosols and gases from multiple sample points, such as from cleanrooms and manufacturing environments, for collection and analysis. The flow focusing element reduces cross talk and cross contamination of particles, including nanoparticles, between different samples.

A built-in multi-zone fast evenly mixed sampling device of a Selective Catalytic Reduction (SCR) outlet flue is provided. The device includes: a sampling component, comprising a sampling branch pipe disposed on an outer wall of the SCR outlet flue, a sampling pool connected with the sampling branch pipe and a slanting branch pipe connected between the sampling pool and the sampling branch pipe, wherein a sampling probe is disposed on the sampling pool; a dust cleaning component, comprising a flange disposed on an upper end of the sampling branch pipe, a connecting line disposed on the flange and a suspension iron disposed on a lower end of the connecting line, wherein a lower end of the suspension iron extends out of the sampling branch pipe; and a replacement component, disposed at the sampling pool.

A built-in multi-zone fast evenly mixed sampling device of a Selective Catalytic Reduction (SCR) outlet flue is provided. The device includes: a sampling component, comprising a sampling branch pipe disposed on an outer wall of the SCR outlet flue, a sampling pool connected with the sampling branch pipe and a slanting branch pipe connected between the sampling pool and the sampling branch pipe, wherein a sampling probe is disposed on the sampling pool; a dust cleaning component, comprising a flange disposed on an upper end of the sampling branch pipe, a connecting line disposed on the flange and a suspension iron disposed on a lower end of the connecting line, wherein a lower end of the suspension iron extends out of the sampling branch pipe; and a replacement component, disposed at the sampling pool.

One variation of a method includes, during a calibration period: triggering collection of an initial bioaerosol sample by an air sampler located in an environment; and triggering dispensation of a tracer test load by a dispenser located in the environment; accessing a detected barcode level of a barcode detected in the initial bioaerosol sample; accessing a true barcode level of the barcode contained in the tracer test load; and deriving a calibration factor for the environment based on a difference between the detected barcode level and the true barcode level. The method further includes, during a live period succeeding the calibration period: triggering collection of a first bioaerosol sample by the air sampler; accessing a detected pathogen level of a pathogen detected in the first bioaerosol sample; and interpreting a predicted pathogen level of the pathogen in the environment based on the detected pathogen level and the calibration factor.

One variation of a method includes, during a calibration period: triggering collection of an initial bioaerosol sample by an air sampler located in an environment; and triggering dispensation of a tracer test load by a dispenser located in the environment; accessing a detected barcode level of a barcode detected in the initial bioaerosol sample; accessing a true barcode level of the barcode contained in the tracer test load; and deriving a calibration factor for the environment based on a difference between the detected barcode level and the true barcode level. The method further includes, during a live period succeeding the calibration period: triggering collection of a first bioaerosol sample by the air sampler; accessing a detected pathogen level of a pathogen detected in the first bioaerosol sample; and interpreting a predicted pathogen level of the pathogen in the environment based on the detected pathogen level and the calibration factor.

A automated multiple air sampler comprising a pump connected to a manifold, the manifold branching off to a plurality of conduits, each of the conduits connected to a corresponding cassette via a corresponding valve element, each cassette comprising an inlet exposed to the ambient air, an outlet fluidly connected to the conduit, and a filter element between the inlet and the outlet and a controller configured to open and close the valve elements independently from one another. The air sampler permitting sampling ambient air by receiving a indication that the ambient air is to be sampled, the controller operating one of the valve elements, including opening the valve element and closing the valve element, receiving another indication that the ambient air is to be sampled, the controller repeating the step of operating for another one of the valve elements, and tracking the operation of the valve elements.

A method of monitoring a semiconductor fabrication facility and a semiconductor fabrication facility are provided. The method includes collecting an ambient air in a clean room through a plurality of gas lines with their gas inlets arranged at a plurality of sampling positions in the clean room. The method also includes measuring a parameter of the ambient air by a plurality of metrology devices which are connected to the gas lines. At least two of the sampling positions are measured simultaneously. The method further includes issuing a warning when the parameter detected by the metrology devices is outside a range of acceptable values.

A process and a system for monitoring at least one concentration of a gas in a monitored area includes generating data by a mobile gas measuring device (3a), whose position in the monitored area is determined or is known and transmitting the data directly or indirectly to a central data processing unit (1). The data are compared with at least one limit value, and an information signal is outputted by the at least one mobile gas measuring device and/or by the central data processing unit in case of an undershooting or overshooting of the limit value. The monitored area is divided into at least two zones (8) and zone-specific parameters are assigned to the zones. A functionality of the mobile gas measuring device is set and/or changed based on the current position of the gas measuring device and based on at least one of the zone-specific parameters.

A process and a system for monitoring at least one concentration of a gas in a monitored area includes generating data by a mobile gas measuring device (3a), whose position in the monitored area is determined or is known and transmitting the data directly or indirectly to a central data processing unit (1). The data are compared with at least one limit value, and an information signal is outputted by the at least one mobile gas measuring device and/or by the central data processing unit in case of an undershooting or overshooting of the limit value. The monitored area is divided into at least two zones (8) and zone-specific parameters are assigned to the zones. A functionality of the mobile gas measuring device is set and/or changed based on the current position of the gas measuring device and based on at least one of the zone-specific parameters.