The present disclosure provides a method for inspecting a shower plate of a plasma processing apparatus. In the plasma processing apparatus, a gas ejection unit includes a shower plate. A plurality of gas ejection holes are formed on the shower plate. This method includes (i) setting a flow rate of gas output from a first flow rate controller, and (ii) acquiring a measurement value indicating a pressure in a flow path inside a second pressure control type flow rate controller by using a pressure gauge of the second flow rate controller in a state where the gas output from the first flow rate controller at the set flow rate is supplied to the gas ejection unit and branched between the first flow rate controller and the gas ejection unit so as to be supplied to the flow path inside the second flow rate controller.

An apparatus for monitoring the effective dissolving of a polymer when the use region is not accessible. The apparatus includes a pipe on which are inserted, consecutively: a pump, a flowmeter, a water or brine inlet mechanism for diluting the mother solution flowing in the pipe, a mixer capable of in-line homogenization of the diluted mother solution, a first tube calibrated to simulate the distance and the conditions for moving the diluted solution in the main pipe between the point where the mother solution is diluted and the use region, a mechanism capable of reducing the pressure of the diluted solution flowing in the pipe upstream of the first tube that is calibrated from 10 to 10000 kPa (from 0.1 to 100 bar), a second calibrated tube for creating a head loss, and a device for measuring differential pressure between the inlet and the outlet of the second calibrated tube.

An apparatus for monitoring the effective dissolving of a polymer when the use region is not accessible. The apparatus includes a pipe on which are inserted, consecutively: a pump, a flowmeter, a water or brine inlet mechanism for diluting the mother solution flowing in the pipe, a mixer capable of in-line homogenization of the diluted mother solution, a first tube calibrated to simulate the distance and the conditions for moving the diluted solution in the main pipe between the point where the mother solution is diluted and the use region, a mechanism capable of reducing the pressure of the diluted solution flowing in the pipe upstream of the first tube that is calibrated from 10 to 10000 kPa (from 0.1 to 100 bar), a second calibrated tube for creating a head loss, and a device for measuring differential pressure between the inlet and the outlet of the second calibrated tube.

A system and method for measuring flow resistance of a fluid in a conduit is provided. The system generally includes a reservoir for containing the fluid, a pump connected to the reservoir for distributing the fluid through a conduit having a straight measurement section, one or more pressure sensors connected to the conduit for measuring the pressure of the fluid in the conduit at one end of the straight measurement section and an opposite end of the straight measurement section.

A system and method for measuring flow resistance of a fluid in a conduit is provided. The system generally includes a reservoir for containing the fluid, a pump connected to the reservoir for distributing the fluid through a conduit having a straight measurement section, one or more pressure sensors connected to the conduit for measuring the pressure of the fluid in the conduit at one end of the straight measurement section and an opposite end of the straight measurement section.

Rheological measurement systems for use with systems including pressurized polymer melts and/or other viscous materials are described. In one embodiment, a rheometer is connected to an associated system with a bent, curved, or bendable tube to permit the rheometer to measure rheological properties in locations where the rheometer could not otherwise be located due to the presence of obstructions. Embodiments including rigid straight tubes for connecting a rheometer to an associated system are also described. In another embodiment, a flow-through rheometer is connected to an industry standard ?-20 thermowell aperture that is typically used for attaching temperature and pressure probes to a vessel containing a viscous material such as an extruder or injection molding system. The rheological measurement systems described can have improved tube resistance and thermal strength.

Rheological measurement systems for use with systems including pressurized polymer melts and/or other viscous materials are described. In one embodiment, a rheometer is connected to an associated system with a bent, curved, or bendable tube to permit the rheometer to measure rheological properties in locations where the rheometer could not otherwise be located due to the presence of obstructions. Embodiments including rigid straight tubes for connecting a rheometer to an associated system are also described. In another embodiment, a flow-through rheometer is connected to an industry standard ?-20 thermowell aperture that is typically used for attaching temperature and pressure probes to a vessel containing a viscous material such as an extruder or injection molding system. The rheological measurement systems described can have improved tube resistance and thermal strength.

In order to determine a rheological property of a fluid, the fluid is conveyed with a constant volume flow rate through a nozzle and the fluid strand thereby generated is deposited on a substrate. A relative movement takes place between the nozzle and the substrate at a forward feed velocity value. A contour of the liquid strand between the nozzle and the substrate is optically measured, and an extensional viscosity as a rheological property is deduced from knowledge of the volume flow rate, the forward feed velocity value and the contour of the fluid strand.

In order to determine a rheological property of a fluid, the fluid is conveyed with a constant volume flow rate through a nozzle and the fluid strand thereby generated is deposited on a substrate. A relative movement takes place between the nozzle and the substrate at a forward feed velocity value. A contour of the liquid strand between the nozzle and the substrate is optically measured, and an extensional viscosity as a rheological property is deduced from knowledge of the volume flow rate, the forward feed velocity value and the contour of the fluid strand.

A high-temperature, high-pressure, and low-velocity gas microtube viscosity measuring apparatus that comprises a thermotank, a fluid filtering and measuring device, a micro-pressure difference metering device, and a data acquisition and processing system. The fluid filtering and measuring device includes a filter, a microtube connector, a flow rate measuring liquid storage tank, an automatic micro-flow rate metering device, and an intermediate container connected in series via pipelines. The micro-pressure difference metering device is connected at two ends to pipelines at the two ends of the microtube connector via detection pipelines. The data acquisition and processing system is electrically connected to the micro-pressure difference metering device and the automatic micro-flow rate metering device to receive pressure difference data and flow rate data.