Refractory anchoring devices include a main body and a mounting feature for mounting to a thermal vessel. The main body has the shape of two end-to-end Y's forming a central segment, two branch segments extending from each end of the central segment, and an extension segment extending from each of the four branch segments, to collectively form four unenclosed cell openings that are each semi-hexagonal in shape. Some embodiments include four reinforcement segments with each one extending into a respective cell opening, four voids with each one extending through respective adjacent branch and extension segments, an underbody gap formed under the central segment for refractory interlinking between cell openings, and/or a single stud-welding stud for the mounting feature. Refractory anchoring systems and methods include an array of the refractory anchoring devices arranged and mounted so that the unenclosed semi-hexagonal cell openings of adjacent anchoring devices cooperatively form substantially hexagonal cells.

A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.

A system may include a main line for delivering a first gas, and a sensor for measuring a concentration of a precursor in the first gas delivered through the main line. The system may further include first and second sublines for providing fluid access to first and second processing chambers, respectively. The first subline may include a first flow controller for controlling the first gas flowed through the first subline. The second subline may include a second flow controller for controlling the first gas flowed through the second subline. A delivery controller may be configured to control the first and second flow controllers based on the measured concentration of the precursor to deliver a first mixture of the first gas and a second gas and a second mixture of the first and second gases into the first and second semiconductor processing chambers, respectively.

A passive microscopic Fabry-Prot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.

Provided are a method and a device that do not require any pretreatment and measure and analyze impurities or hydrogen fluoride in corrosive gas with high sensitivity. The method and the device measure a fluorine-based gas in a sample containing a corrosive gas with a Fourier transform infrared spectrophotometer, wherein the Fourier transform infrared spectrophotometer includes a detector having an InGaAs detection element and a single-path gas cell having an optical path length of 0.01 m to 2 m, a cell window is made of a corrosion-resistant material, a measurement region ranges from 3800 to 14300 cm.sup.1 in wavenumber, and the concentration of the fluorine-based gas is quantified based on an amount of absorption of light having a predetermined wavenumber by the sample and a calibration curve.

Disclosed herein are seals for liquid-tight bonding of an optical window comprising a BiIn alloy. Also disclosed are optical cells comprising the BiIn alloy seals to provide a liquid-tight seal between a cell housing and a drilled optical window.

Disclosed herein are seals for liquid-tight bonding of an optical window comprising a BiIn alloy. Also disclosed are optical cells comprising the BiIn alloy seals to provide a liquid-tight seal between a cell housing and a drilled optical window.

A downhole fluid analysis system includes an optical sensor that includes a light source configured to emit light, a light detector, and an optical tip optically coupled to the light source and the light detector. At least a portion of the light emitted from the light source travels through the optical tip and returns to the detector, wherein the optical tip has a bi-conical shape. The system further includes a piezoelectric helm resonator, in which the piezoelectric helm resonator generates a resonance response in response to an applied current, and an electromagnetic spectroscopy sensor positioned symmetrically with respect to the piezoelectric helm resonator in at least one direction. In some embodiments, the optical tip includes a first conical portion and a second conical portion.

A gas sensor includes: a gas detection unit including a light source and a detector; and a gas passage including a first end, a second end and a hollow part. The hollow part has a shape in which a cross-sectional area of a flow passage grows smaller. The gas passage includes: a member that divides the hollow part into at least a first area and a second area; a gas inflow port; and a gas outflow port. The gas flows from the gas inflow port into the hollow part, flows in the first area to arrive at the gas detection unit, and the gas located in the gas detection unit flows in the second area and flows out from the gas outflow port.

A gas sensor includes: a gas detection unit including a light source and a detector; and a gas passage including a first end, a second end and a hollow part. The hollow part has a shape in which a cross-sectional area of a flow passage grows smaller. The gas passage includes: a member that divides the hollow part into at least a first area and a second area; a gas inflow port; and a gas outflow port. The gas flows from the gas inflow port into the hollow part, flows in the first area to arrive at the gas detection unit, and the gas located in the gas detection unit flows in the second area and flows out from the gas outflow port.