G01N2021/1725

Fluorescence-coded mid-infrared photothermal microscope

Microscopic analysis of a sample includes a fluorescent dye disposed within the sample. A mid-IR optical source generates a mid-infrared beam, which is directed onto the sample to induce a temperature change by absorption of the mid-infrared beam. An optical source generates a probe beam directed to impinge on the sample. A detector detects fluorescent emissions from the sample when the probe beam impinges on the sample. A data acquisition and processing system acquires and processes the detected fluorescent emissions from the sample to: (i) generate a signal indicative of infrared absorption by the sample, (ii) generate a signal indicative of temperature in the sample based on the signal indicative of infrared absorption by the sample, (iii) generate an image of the sample using the signal indicative of temperature in the sample.

Optically detecting mutations in a sequence of DNA

A method for optically detecting mutations in a sequence of DNA is disclosed. The method includes generating an optically coded input sequence by optically coding an input sequence, generating an optically coded reference sequence by optically coding a reference sequence, generating an aligned sequence by overlapping the optically coded input sequence with the optically coded reference sequence, and determining a mutation in the input sequence with respect to the reference sequence. The input sequence includes an input arrangement of a plurality of elements. Each of the plurality of elements includes an element value of a plurality of element values. The reference sequence includes a reference arrangement of the plurality of elements. Each element of the aligned sequence includes one of a low-value element or a high-value element. The mutation is determined responsive to detecting the low-value element in the aligned sequence.

Spectroscopic Measurement Device
20220276158 · 2022-09-01 ·

A spectroscopic measurement apparatus includes a pulsed laser light source that emits pulsed laser light, a beam splitter that splits the pulsed laser light into pump light and probe light, a delay circuit that changes a delay time of the pump light with respect to the probe light, a chopper that intensity-modulates the pump light, a wavelength converter that wavelength-converts the probe light into vacuum ultraviolet light, an optical system that guides the pump light and the wavelength-converted probe light to a sample, and a detector that detects the probe light reflected by the sample.

Carrier lifespan measurement method and carrier lifespan measurement device
11415525 · 2022-08-16 · ·

A carrier lifetime measurement method for measuring a lifetime of carriers in a measurement target object includes an irradiation step of irradiating a DUT 10 serving as a measurement target object with measurement light and stimulus light subjected to intensity modulation using a plurality of frequencies, an outputting step of outputting a detection signal by detecting an intensity of reflected light from the DUT 10 or transmitted light through the DUT 10, and a generation step of detecting a phase delay of the detection signal with respect to a modulation signal including a frequency in association with a concentration of impurities in a measurement target region of the plurality of frequencies and generating image data indicating a distribution of lifetimes of carriers in the DUT 10 on the basis of the phase delay.

SYSTEMS AND METHODS FOR HIGH PRECISION OPTICAL CHARACTERIZATION OF CARRIER TRANSPORT PROPERTIES IN SEMICONDUCTOR MANUFACTURING
20220291281 · 2022-09-15 · ·

A precise optical technique for measuring electronic transport properties in semiconductors is disclosed. The sensitivity of the technique to electronic transport properties follows from a simple analytic expression for the Z dependence of a photo-modulated reflectance signal in terms of the (complex) carrier diffusion length. The sensitivity of the technique to electronic transport properties also enables a trained neural network to predict electronic transport properties directly from Z-scan photo-modulated reflectance data. Synthetic data and/or physical constraints may be derived from the analytical expression and incorporated into a machine learning algorithm. Moreover, electronic transport properties as determined or predicted may be used to enable machine learning based control of semiconductor process tools and/or manufacturing processes, including via advanced reinforcement learning algorithms.

Photoacoustic remote sensing (PARS)
11298027 · 2022-04-12 · ·

A photoacoustic remote sensing system (PARS) for imaging a subsurface structure in a sample has an excitation beam configured to generate ultrasonic signals in the sample at an excitation location; an interrogation beam incident on the sample at the excitation location, a portion of the interrogation beam returning from the sample that is indicative of the generated ultrasonic signals; an optical system that focuses at least one of the excitation beam and the interrogation beam with a focal point that is below the surface of the sample; and a detector that detects the returning portion of the interrogation beam.

Device and method for analyzing a material

The invention relates, inter alia, to a device (10) for analysing a material (101), comprising an excitation emission device (100) for generating at least one electromagnetic excitation beam (SA), particularly an excitation light beam, with at least one excitation wavelength, and further comprising a detection device (106) for detecting a reaction signal (SR), and a device (107) for analysing the material on the basis of the detected reaction signal (SR).

Concentration measurement method and concentration measurement device
11280776 · 2022-03-22 · ·

A concentration measurement method for measuring a concentration of impurities includes a step of irradiating a DUT 10 serving as a measurement target object with measurement light and stimulus light subjected to intensity modulation using a modulation signal including a default frequency, a step of outputting a detection signal by detecting an intensity of reflected light from the DUT 10 or transmitted light through the DUT 10, and a step of detecting a phase delay of the detection signal with respect to the modulation signal, obtaining a frequency at which the phase delay has a predetermined value, and estimating a concentration of impurities in the measurement target object on the basis of the frequency.

Manipulation of microfluidic droplets

The invention provides methods for assessing one or more predetermined characteristics or properties of a microfluidic droplet within a microfluidic channel, and regulating one or more fluid flow rates within that channel to selectively alter the predetermined microdroplet characteristic or property using a feedback control.

FLUORESCENCE-CODED MID-INFRARED PHOTOTHERMAL MICROSCOPE

Microscopic analysis of a sample includes a fluorescent dye disposed within the sample. A mid-IR optical source generates a mid-infrared beam, which is directed onto the sample to induce a temperature change by absorption of the mid-infrared beam. An optical source generates a probe beam directed to impinge on the sample. A detector detects fluorescent emissions from the sample when the probe beam impinges on the sample. A data acquisition and processing system acquires and processes the detected fluorescent emissions from the sample to: (i) generate a signal indicative of infrared absorption by the sample, (ii) generate a signal indicative of temperature in the sample based on the signal indicative of infrared absorption by the sample, (iii) generate an image of the sample using the signal indicative of temperature in the sample.