Patent classifications
G01N21/43
WAFER PRE-ALIGNER AND METHOD OF PRE-ALIGNING WAFER
A pre-aligner for pre-aligning a wafer having a notch. The pre-aligner includes a wafer platform having a wafer receiving surface, and a drive device. A detector is provided to detect the notch, and a memory is provided to store a notch window defining a range of angles in which the notch is predicted to be located in relation to a start position. A controller performs a pre-alignment operation where the wafer is rotated from the start position to an alignment location. The controller performs the operation such that the wafer is rotated at maximum acceleration/deceleration values from the start position to a notch location detected by the detector: where the operation is limited to a maximum velocity for rotation of the wafer from the start position to a notch window; and where the operation is limited to a scanning velocity within the notch window until the notch location is detected.
Methods of improving the measurement of knee stress in ion-exchanged chemically strengthened glasses containing lithium
Methods of improving the measurement of knee stress in an ion-exchanged chemically strengthened Li-containing glass sample that includes a knee are disclosed. One of the methods includes compensating for a shift in the location of the TIR-PR transition location associated with the critical angle location, wherein the shift is due to the presence of a leaky mode. Another method includes applying select criteria to the captured mode spectra image to ensure a high-quality image is used for the knee stress calculation. Another method combines direct and indirect measurements of the knee stress using the mode spectra from multiple samples to obtain greater accuracy and precision as compared to using either the direct measurement method or the indirect measurement method alone. Quality control methods of forming the glass samples using measured mode spectra and related techniques for ensuring an accurate measurement of the knee stress are also disclosed.
Methods of improving the measurement of knee stress in ion-exchanged chemically strengthened glasses containing lithium
Methods of improving the measurement of knee stress in an ion-exchanged chemically strengthened Li-containing glass sample that includes a knee are disclosed. One of the methods includes compensating for a shift in the location of the TIR-PR transition location associated with the critical angle location, wherein the shift is due to the presence of a leaky mode. Another method includes applying select criteria to the captured mode spectra image to ensure a high-quality image is used for the knee stress calculation. Another method combines direct and indirect measurements of the knee stress using the mode spectra from multiple samples to obtain greater accuracy and precision as compared to using either the direct measurement method or the indirect measurement method alone. Quality control methods of forming the glass samples using measured mode spectra and related techniques for ensuring an accurate measurement of the knee stress are also disclosed.
OPTICAL IMMERSION REFRACTOMETER PROBE
The present invention provides a reusable probe for use with a device for measuring the absolute value of the refractive index of a liquid by immersion uses the optical properties of a cylindrical waveguide with a solid core and normal angle of incidence of the light source.
OPTICAL SENSORS, SYSTEMS AND METHODS OF USING SAME
Optical sensors, systems and methods of use thereof are provided. Aspects of the subject systems include a sensor having a sensing surface and a configuration that directs a first optical signal to interact with the sensing surface at a first incident angle, and directs a second optical signal to interact with the sensing surface at a second incident angle. The subject sensors, systems and methods find use, e.g., in the diagnosis of dry eye disease.
OPTICAL SENSORS, SYSTEMS AND METHODS OF USING SAME
Optical sensors, systems and methods of use thereof are provided. Aspects of the subject systems include a sensor having a sensing surface and a configuration that directs a first optical signal to interact with the sensing surface at a first incident angle, and directs a second optical signal to interact with the sensing surface at a second incident angle. The subject sensors, systems and methods find use, e.g., in the diagnosis of dry eye disease.
Surface refractive index measurement method and surface stress measurement method using the same
Disclosed is a method of measuring a surface refractive index of a strengthened glass including causing light to enter a surface layer of the strengthened glass through a liquid provided with a refractive index equivalent to that of a surface of the surface layer; a process of causing the light to be emitted from the strengthened glass through the liquid; converting two types of light components into two types of emission line sequences; capturing an image of the two types of emission line sequences; measuring positions of respective emission lines of the two types of emission line sequences from the image; and calculating refractive indexes of a surface of the strengthened glass corresponding to the two types of light components, or refractive index distributions of the strengthened glass in a depth direction from the surface corresponding to the two types of light components.
Surface refractive index measurement method and surface stress measurement method using the same
Disclosed is a method of measuring a surface refractive index of a strengthened glass including causing light to enter a surface layer of the strengthened glass through a liquid provided with a refractive index equivalent to that of a surface of the surface layer; a process of causing the light to be emitted from the strengthened glass through the liquid; converting two types of light components into two types of emission line sequences; capturing an image of the two types of emission line sequences; measuring positions of respective emission lines of the two types of emission line sequences from the image; and calculating refractive indexes of a surface of the strengthened glass corresponding to the two types of light components, or refractive index distributions of the strengthened glass in a depth direction from the surface corresponding to the two types of light components.
PRISM-COUPLING STRESS METER WITH WIDE METROLOGY PROCESS WINDOW
The prism-coupling systems and methods include using a prism-coupling system to collect initial TM and TE mode spectra of a chemically strengthened article having a refractive index profile with a near-surface spike region and a deep region. The initial TM and TE mode spectra are examined to see if they fall within a preferred measurement window that can produce an accurate estimate of the knee stress to within a select tolerance. If not, then measurement configuration of the prism-coupling system is changed and new TM and TE mode spectra are collected. This process is repeated until the new TM and TE mode spectra fall within the preferred measurement window. The new TM and TE mode spectra are then used to determine the knee stress. Changing the measurement configuration can include changing at least one of the measurement wavelength, interfacing fluid thickness and interfacing fluid refractive index.
PRISM-COUPLING STRESS METER WITH WIDE METROLOGY PROCESS WINDOW
The prism-coupling systems and methods include using a prism-coupling system to collect initial TM and TE mode spectra of a chemically strengthened article having a refractive index profile with a near-surface spike region and a deep region. The initial TM and TE mode spectra are examined to see if they fall within a preferred measurement window that can produce an accurate estimate of the knee stress to within a select tolerance. If not, then measurement configuration of the prism-coupling system is changed and new TM and TE mode spectra are collected. This process is repeated until the new TM and TE mode spectra fall within the preferred measurement window. The new TM and TE mode spectra are then used to determine the knee stress. Changing the measurement configuration can include changing at least one of the measurement wavelength, interfacing fluid thickness and interfacing fluid refractive index.