There is provided a film thickness measurement method which measures a film thickness of a specific film to be measured in a multilayer film in situ in a film formation system that forms the multilayer film on a substrate, the method comprising: regarding a plurality of films located under the film to be measured as one underlayer film, measuring a film thickness of the underlayer film, and deriving an optical constant of the underlayer film by spectroscopic interferometry; and after the film to be measured is formed, deriving a film thickness of the film to be measured by spectroscopic interferometry using the film thickness and the optical constant of the underlayer film.

Systems, methods, and modules for detecting a biomarker in a sample are described. A system for detecting presence or absence of a biomarker in a sample includes: a light source for producing electromagnetic radiation for interrogating the sample; a biosensor module including: a waveguide for guiding the electromagnetic radiation, the waveguide exposed to the sample; and a recognition element affixed to the waveguide and configured to bind to the biomarker; a detector for receiving the electromagnetic radiation from the waveguide and detecting a signal corresponding to an interaction of the electromagnetic radiation with the biomarker bound to the recognition element, in accordance with at least one detection modality; and a computing device for analyzing data related to the signal in order to detect presence or absence of the biomarker in the sample.

Systems, methods, and modules for detecting a biomarker in a sample are described. A system for detecting presence or absence of a biomarker in a sample includes: a light source for producing electromagnetic radiation for interrogating the sample; a biosensor module including: a waveguide for guiding the electromagnetic radiation, the waveguide exposed to the sample; and a recognition element affixed to the waveguide and configured to bind to the biomarker; a detector for receiving the electromagnetic radiation from the waveguide and detecting a signal corresponding to an interaction of the electromagnetic radiation with the biomarker bound to the recognition element, in accordance with at least one detection modality; and a computing device for analyzing data related to the signal in order to detect presence or absence of the biomarker in the sample.

Apparatus and methods for forming an image of an object which involves focusing partially to fully spatially-coherent radiation onto a sample and collecting the resulting scattered radiation (the “standard data set”) on an array detector. In addition to the standard dataset, an additional measurement or plurality of measurements is made of a relatively-unscattered beam, using the array detector, which comprises the “modulus enforced probe (MEP) dataset”. This MEP dataset serves as an extra constraint, called the MEP constraint, in the phase retrieval algorithm used to reconstruct the image of the object.

Apparatus and methods for forming an image of an object which involves focusing partially to fully spatially-coherent radiation onto a sample and collecting the resulting scattered radiation (the “standard data set”) on an array detector. In addition to the standard dataset, an additional measurement or plurality of measurements is made of a relatively-unscattered beam, using the array detector, which comprises the “modulus enforced probe (MEP) dataset”. This MEP dataset serves as an extra constraint, called the MEP constraint, in the phase retrieval algorithm used to reconstruct the image of the object.

Embodiments of the present application are directed toward a focusing Schlieren technique that is capable of adding color-coded directional information to the visualization of density gradients. Other advantages of the technique can include that it does not require manual calibration, has a simple design and is sensitive enough to be used in compact experimental setups. Certain embodiments include the use of a color-coded source image that replaces the conventional source grid. The technique may benefit from a computer-controlled digital background, which is used for both illumination and display of color-coded source images.

A method comprises non-destructive contact-free physical characterization of a sample by repeated excitations of the surface of a sample with a sequence of pulses comprising at least one pump pulse by a first “pump” laser followed by a succession of L temporarily offset pulses by a second “probe” laser, and the analysis of the beam emitted by the surface of the sample by an activated photodetector, for the acquisition of signals delivered by the photodetectors during constant time windows.

A method comprises non-destructive contact-free physical characterization of a sample by repeated excitations of the surface of a sample with a sequence of pulses comprising at least one pump pulse by a first “pump” laser followed by a succession of L temporarily offset pulses by a second “probe” laser, and the analysis of the beam emitted by the surface of the sample by an activated photodetector, for the acquisition of signals delivered by the photodetectors during constant time windows.

Fourier Transformation Spectrometer, FT Spectrometer, comprising: Michelson-Type Interferometer (601, 602, 603, 604, 605, 606, 607, 608, 609) comprising: at least one beam splitter unit designed to split an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); and for at least partially overlaying the first partial beam (TB1) and the second partial beam (TB2) with a lateral shear (s); a first beam deflection unit designed to deflect the first partial beam (TB1) at least once; a second beam deflection unit designed to deflect the second partial beam (TB2) at least once; wherein at least one among the first beam deflection unit and the second beam deflection unit represents a (2n+1) periscope group with (2n+1) mirror surfaces, and all (2n+1) mirror surfaces are arranged vertically in relation to a common reference plane, in order to respectively deflect the first partial beam (TB1) and/or the second partial beam (TB2) (2n+1) times, and wherein the (2n+1)-fold deflection generates the lateral shear (s) between the first partial beam (TB1) and the second partial beam (TB2), and wherein n is a natural number ≥1.

Fourier Transformation Spectrometer, FT Spectrometer, comprising: Michelson-Type Interferometer (601, 602, 603, 604, 605, 606, 607, 608, 609) comprising: at least one beam splitter unit designed to split an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); and for at least partially overlaying the first partial beam (TB1) and the second partial beam (TB2) with a lateral shear (s); a first beam deflection unit designed to deflect the first partial beam (TB1) at least once; a second beam deflection unit designed to deflect the second partial beam (TB2) at least once; wherein at least one among the first beam deflection unit and the second beam deflection unit represents a (2n+1) periscope group with (2n+1) mirror surfaces, and all (2n+1) mirror surfaces are arranged vertically in relation to a common reference plane, in order to respectively deflect the first partial beam (TB1) and/or the second partial beam (TB2) (2n+1) times, and wherein the (2n+1)-fold deflection generates the lateral shear (s) between the first partial beam (TB1) and the second partial beam (TB2), and wherein n is a natural number ≥1.