Patent classifications
G01N21/45
Methods and systems for optical surface defect material characterization
Methods and systems for detecting and classifying defects based on the phase of dark field scattering from a sample are described herein. In some embodiments, throughput is increased by detecting and classifying defects with the same optical system. In one aspect, a defect is classified based on the measured relative phase of scattered light collected from at least two spatially distinct locations in the collection pupil. The phase difference, if any, between the light transmitted through any two spatially distinct locations at the pupil plane is determined from the positions of the interference fringes in the imaging plane. The measured phase difference is indicative of the material composition of the measured sample. In another aspect, an inspection system includes a programmable pupil aperture device configured to sample the pupil at different, programmable locations in the collection pupil.
QUANTUM ABSORPTION SPECTROSCOPY SYSTEM AND QUANTUM ABSORPTION SPECTROSCOPY METHOD
A quantum absorption spectroscopy system (100) includes a laser light source (1), a quantum optical system (201), a photodetector (31), and a controller (4). The laser light source (1) emits pump light. The quantum optical system (201) includes a nonlinear optical crystal (23) that generates a quantum entangled photon pair of a signal photon and an idler photon by irradiation with pump light, and a moving mirror (25) that changes a phase of the idler photon, and causes quantum interference between a plurality of physical processes in which the quantum entangled photon pair is generated. The photodetector (31) detects the signal photon when the phase of the idler photon is changed by the nonlinear optical crystal (23) in a state where a sample is disposed on an optical path of the idler photon, and outputs a quantum interference signal corresponding to the detected number of photons. The controller (4) calculates an absorption spectroscopy characteristic of the sample by performing Fourier transform on the quantum interference signal.
QUANTUM ABSORPTION SPECTROSCOPY SYSTEM AND QUANTUM ABSORPTION SPECTROSCOPY METHOD
A quantum absorption spectroscopy system (100) includes a laser light source (1), a quantum optical system (201), a photodetector (31), and a controller (4). The laser light source (1) emits pump light. The quantum optical system (201) includes a nonlinear optical crystal (23) that generates a quantum entangled photon pair of a signal photon and an idler photon by irradiation with pump light, and a moving mirror (25) that changes a phase of the idler photon, and causes quantum interference between a plurality of physical processes in which the quantum entangled photon pair is generated. The photodetector (31) detects the signal photon when the phase of the idler photon is changed by the nonlinear optical crystal (23) in a state where a sample is disposed on an optical path of the idler photon, and outputs a quantum interference signal corresponding to the detected number of photons. The controller (4) calculates an absorption spectroscopy characteristic of the sample by performing Fourier transform on the quantum interference signal.
Optical sensor for surface inspection and metrology
An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.
Optical sensor for surface inspection and metrology
An optical system configured to measure a raised or receded surface feature on a surface of a sample may comprise a broadband light source; a tunable filter configured to filter broadband light emitted from the broadband light source and to generate a first light beam at a selected wavelength; a linewidth control element configured to receive the first light beam and to generate a second light beam having a predefined linewidth and a predetermined coherence length; collimating optics optically coupled to the second light beam and configured to collimate the second light beam; collinearizing optics optically coupled to the collimating optics and configured to align the collimated second light beam onto the raised or receded surface feature of the sample, and a processor system and at least one digital imager configured to measure a height of the raised surface or depth of the receded surface from light reflected at least from those surfaces.
METHOD AND APPARATUS FOR DETERMINING OPTICAL DENSITY OF A SOLUTION
A method and instrument for determining optical density of a solution is disclosed. A flow cell 1 having at least three light paths (4a, 4b, 4c) is provided (100), wherein each light path has a respective predetermined path length, l. Absorbance readings are taken (400), A, of the solution at the at least three light paths (4a, 4b, 4c). For each pair of light paths, a slope, αc, is calculated (500) by dividing a difference in absorbance reading, ΔA, with a difference in path length, Δl. The calculated slopes, αc, are compared (600), and a) if the calculated slopes, αc, are the same, the slope is used for determining (700) optical density of the solution, or b) if he calculated slopes, αc, are not the same, the steepest slope of the calculated slopes is used for determining (701a) optical density of the solution, or the slope of the calculated slopes being in the range of an absorbance reading of 0.01 to 2 is used for determining (701b) optical density of the solution
METHOD AND APPARATUS FOR DETERMINING OPTICAL DENSITY OF A SOLUTION
A method and instrument for determining optical density of a solution is disclosed. A flow cell 1 having at least three light paths (4a, 4b, 4c) is provided (100), wherein each light path has a respective predetermined path length, l. Absorbance readings are taken (400), A, of the solution at the at least three light paths (4a, 4b, 4c). For each pair of light paths, a slope, αc, is calculated (500) by dividing a difference in absorbance reading, ΔA, with a difference in path length, Δl. The calculated slopes, αc, are compared (600), and a) if the calculated slopes, αc, are the same, the slope is used for determining (700) optical density of the solution, or b) if he calculated slopes, αc, are not the same, the steepest slope of the calculated slopes is used for determining (701a) optical density of the solution, or the slope of the calculated slopes being in the range of an absorbance reading of 0.01 to 2 is used for determining (701b) optical density of the solution
Apparatus for Determining the Temperature of At Least One Fluid
Provided is an apparatus for determining the temperature of at least one fluid. The apparatus includes an optical fiber. A first end of the optical fiber is connected to at least one fiber tip, and a first additional reflector is introduced into the at least one fiber tip at a first predetermined distance from an outer end of the at least one fiber tip. A second end of the optical fiber is connected to a processing apparatus. The processing apparatus includes an optical source. The optical source is configured to launch an optical signal into the optical fiber, and a coherent detector. The coherent detector is configured to determine the temperature of at least one fluid by receiving a first light signal that corresponds to parts of the optical signal that are reflected at the outer end of the at least one fiber tip when the at least one fiber tip is inserted into the at least one fluid and a second light signal that corresponds to parts of the optical signal that are reflected at the first additional reflector when the at least one fiber tip is inserted into the at least one fluid, determining a difference of the optical phases of the first light signal and the second light signal, and determining the temperature of the at least one fluid based on the difference of the optical phases of the first light signal and the second light signal.
Method and System for Determining a Level of a Sanding Surface Preparation of a Carbon Fiber Composite Surface Prior to a Post-Processing Operation
There is provided a quantitative method for determining a level of a sanding surface preparation of a carbon fiber composite surface, prior to the carbon fiber composite surface undergoing a post-processing operation. The quantitative method includes fabricating a ladder panel of levels of sanding correlating to an amount of sanding of sanding surface preparation standards for a reference carbon fiber composite surface of reference carbon fiber composite structure(s); using surface analysis tools to create target values for quantifying the levels of sanding; measuring, with the surface analysis tools, sanding surface preparation location(s) on the carbon fiber composite surface of a test carbon fiber composite structure, to obtain test result measurement(s); comparing the test result measurement(s) to the levels, to obtain test result level(s); determining if the test result level(s) meet the target values; and determining whether the carbon fiber composite surface is acceptable to proceed with the post-processing operation.
System and Method of Measuring Contaminants in a Substantially Translucent Material, Such as Water
A system for sensing analyte in at least partly translucent material, including one or more radiation sources configured for successively providing radiation at a first and a second wavelength, respectively, two or more waveguides for simultaneously transmitting the radiation at each wavelength provided by the radiation source, a first waveguide being a reference waveguide and a second being a sensing waveguide; and measuring means for measuring a phase difference between the radiation waves from the reference waveguide and the measuring waveguide, resp. The present method can be used for measuring contaminants such as Fe, Sn, and/or Pb in oil related products, such as carburant or lubricant.