A structure of interest (T) is irradiated with radiation for example in the x-ray or EUV waveband, and scattered radiation is detected by a detector (19, 274, 908, 1012). A processor (PU) calculates a property such as linewidth (CD) or overlay (OV), for example by simulating (S16) interaction of radiation with a structure and comparing (S17) the simulated interaction with the detected radiation. The method is modified (S14a, S15a, S19a) to take account of changes in the structure which are caused by the inspection radiation. These changes may be for example shrinkage of the material, or changes in its optical characteristics. The changes may be caused by inspection radiation in the current observation or in a previous observation.

The invention relates to methods and devices to identify an infection via light scatter from a tissue surface.

A method of processing a glass material includes guiding and/or focusing light from a light source to glass material in a hot stage of a processing system, where the light source provides light at a wavelength λ that interacts with crystals that may be formed in the glass material. The method includes collecting and/or guiding light directed from the glass material in the hot stage to a wavelength separator, and separating the light directed from the glass material to provide a spectrum δ having wavelengths that are within about twenty nanometers of the wavelength λ. The method includes observing with a detector light of the spectrum δ to identify nano-scale shifts in the wavelength λ caused by interaction with crystals, if present, within the glass material in the hot stage of the processing system.

A method for sorting products and sorting apparatus with a flow of granular products moving in an inspection zone, in which a light beam is moved over the product flow to generate a reflected stream of light. At least one detector unit is provided to detect light reflected by the products to generate detection signals. This detector unit cooperates with a control unit to sort the products by these detection signals. The detector unit contains at least two sensors that are provided one after the other in the reflected stream of light so that a sensor is placed upstream of a downstream sensor. Each sensor detects a different part of the reflected stream of light.

Provided are a foreign material detecting device and method for detecting only a foreign material on a surface of a substrate except for a foreign material on a lower surface of the substrate in a manufacturing process of a transparent substrate passing light therethrough, such as a glass substrate used in a flat panel display (FPD) such as a liquid crystal display (LCD), an organic light emitting diode (OLED), a plasma display panel (PDP), etc., a sapphire wafer used in some of semiconductors, or the like, and in a pattern forming process in a manufacturing process of the FPD and the semiconductor using the transparent substrate. More particularly, provided are a foreign material detecting device and method for detecting only a foreign material on a surface of an ultra-thin transparent substrate having a thickness of 0.3 T or less.

The invention relates to an apparatus for the investigation of surface properties with a housing, a light source which directs light through an opening in the housing onto a surface to be investigated, with a first detector device which is arranged inside at a first pre-set angle with respect to the light beam radiated onto the surface by the light source, with a second detector device which is arranged at a second pre-set angle with respect to the light beam radiated onto the surface by the light source and with a third detector device which is arranged inside the housing at a third pre-set angle with respect to the light beam radiated onto the surface by the light source. According to the invention the apparatus has at least two filter elements with optical properties which are different from each other which are arranged on a common carrier movable with respect to the light source, in such a way that each of these filter elements is optionally capable of being brought into a beam path between the light source and the surface.

A grating pattern element includes peaks which are periodically arranged and valleys provided between the peaks, and at least one of the peaks and at least one of the valleys includes an adsorbing material on a surface thereof which adsorbs a target material.

Provided are a sintered ceramic and a ceramic sphere which are inhibited from suffering surface peeling due to fatigue resulting from repetitions of loading and can attain an improvement in dimensional accuracy when subjected to surface processing and which have excellent wear resistance and durability.

A hand-held measurement device for appearance analyses includes a measurement array which comprises a number of illumination means for applying illumination light to a measurement field in at least three illumination directions and a number of pick-up means for capturing the measurement light in at least one observation direction. The illumination directions and the observation directions lie in a common system plane. At least one pick-up means is embodied to spectrally gauge the measurement light in a locally integral way, and at least one imaging pick-up means is embodied to gauge the measurement light in terms of color in a locally resolved way. The spectral pick-up means and the locally resolving pick-up means are arranged such that they receive the measurement light reflected by the measurement field under the same observation conditions and in particular from the same observation direction.

A diffuse optical spectroscopic imaging (DOSI) apparatus for tissue spectroscopy measures absorption and scattering properties of tissue using multi-frequency frequency domain photon migration in a modular or networkable platform to provide full broadband information content. The apparatus includes: a broadband signal generator; a driver having an input coupled to the signal generator; a light source coupled to the driver, the light source for exposing the tissue to broadband modulated light at a plurality of wavelengths; an optical detector for receiving returned light from the tissue; an amplitude detection circuit communicated to the optical detector; a phase detection circuit communicated to the optical detector; and a plurality of filters and amplifiers, wherein the optical detector, amplitude detection circuit and phase detection circuit are interconnected with each other by corresponding ones of the plurality of filters and amplifiers to isolate signals and increase signal-to-noise ratio.