Provided is a water examination device including: a main body; a fluid accommodation unit formed in the main body; a wave source for irradiating waves toward the fluid accommodation unit; a detector for detecting a laser speckle at every set time period that is set in advance, the laser speckle being generated due to multiple scattering of the waves in the fluid; a controller for estimating existence of impurities in the fluid in real-time by using the detected laser speckle; and a calibration unit for controlling the wave source or the detector such that an intensity of light irradiated from the wave source and measured by the detector is within a certain range set in advance.

A spatial gradient-based fluorometer featuring a signal processor or processing module configured to: receive signaling containing information about light reflected off fluorophores in a liquid and sensed by a linear sensor array having a length and rows and columns of optical elements; and determine corresponding signaling containing information about a fluorophore concentration of the liquid a fluorophore concentration of the liquid that depends on a spatial gradient of the light reflected and sensed along the length of the linear sensor array, based upon the signaling received.

A phantom design method includes a correction step and a calculation step. In the correction step, an absorption spectrum of a target of spectroscopic measurement by a near infrared spectrometer is corrected based on a refractive index of the target and a refractive index of a resin used as a base material of a phantom to generate a corrected absorption spectrum. In the calculation step, based on an absorption spectrum of the resin and an absorption spectrum of each of N types of dyes, a concentration of each of the N types of dyes to be contained in the base material is calculated such that an absorption spectrum of the phantom constituted by the base material containing the N types of dyes approximates the corrected absorption spectrum in a predetermined wavelength range of a near infrared region.

This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

A microplate reader simultaneously obtains Raman measurements from samples contained in non-adjacent wells. At least two Raman probes are positioned perpendicularly above or below the microplate to simultaneously acquire Raman spectra data of the non-adjacent liquid samples. Each probe is coupled to a laser and a spectrometer and includes a lens focusing laser light within the sample and collecting light from the sample for the spectrometer. The spectrometer may include a 2D imaging sensor (sCMOS or CCD) to image light from multiple probes simultaneously, spaced from one another to reduce crosstalk. A positioner moves the microplate plate or probes to acquire data from a different subset of non-adjacent samples, and may also vary laser focus within wells during data acquisition. Multiple fluorescence probes may simultaneously acquire fluorescence data from the same samples, or non-adjacent samples. Probes may be fiber-coupled and positioned within a reaction chamber of a liquid handling system.

A nephelometric turbidimeter for measuring a turbidity of a liquid sample in a sample cuvette. The nephelometric turbidimeter includes a measurement light source configured to emit an axial parallel light beam directed to the sample cuvette, a scattering light detector arranged to receive a scattered light from the sample cuvette, and a diffuser comprising a diffuser body and a diffuser actuator. The diffuser actuator is configured to move the diffuser body between a parking position in which the diffuser body does not interfere with the axial parallel light beam and a test position where the diffuser body is arranged between the measurement light source and the sample cuvette so that the diffuser body interferes with the axial parallel light beam and generates a diffuse test light entering the sample cuvette.

A method, computer program product, and apparatus are provided for controlling components of a detection device. The device may detect turbidity of liquid with sensors such as a density sensor and/or nephelometric sensor. A light modulation pattern may reduce or eliminate interference in sensor readings. Readings may be performed during off cycles of an illumination light to reduce interference but to provide improved visibility of a tube. Dark and light sensor readings may be performed with an emitter respectively off or on to account for ambient light in subsequent readings. Readings from the density sensor and/or nephelometric sensor may be used to calculate McFarland values. The device may be zeroed based on an emitter level that results in a sensor reading satisfying a predetermined criterion.

Disclosed is a method for determining an overlay error between at least two layers in a multiple layer sample. An imaging optical system is used to measure multiple measured optical signals from multiple periodic targets on the sample, and the targets each have a first structure in a first layer and a second structure in a second layer. There are predefined offsets between the first and second structures A scatterometry overlay technique is used to analyze the measured optical signals of the periodic targets and the predefined offsets of the first and second structures of the periodic targets to thereby determine an overlay error between the first and second structures of the periodic targets. The scatterometry overlay technique is a phase based technique, and the imaging optical system is configured to have an illumination and/or collection numerical aperture (NA) and/or spectral band selected so that a specific diffraction order is collected and measured for the plurality of measured optical signals. In one aspect, the number of periodic targets equals half the number of unknown parameters.

The invention relates to a method for determining the thickness of a contaminating layer and/or the type of a contaminating material on a surface (7) in an optical system, in particular on a surface (7) in an EUV lithography system, comprising: irradiating the surface (7) on which plasmonic nanoparticles (8a,b) are formed with measurement radiation (10), detecting the measurement radiation (10a) scattered at the plasmonic nanoparticles (8a,b), and determining the thickness of the contaminating layer and/or the type of the contaminating material on the basis of the detected measurement radiation (10a). The invention also relates to an optical element (1) for reflecting EUV radiation (4), and to an EUV lithography system.

A solid body for adjusting, calibrating and/or function checking of a turbidity sensor, which works with electromagnetic waves, especially light, of at least a first wavelength, and wherein the solid body is transparent at least for the light of the first wavelength, characterized in that at least a first region is provided in the solid body, where at least incident light of the first wavelength is scattered. The scattered light is a measure for turbidity.