Patent classifications
G01N2021/4792
Detection device, detection method, and non-transitory computer-readable recording medium storing detection program
A detection device includes: a light source that emits, toward an object, light of a first wavelength band, and light of a second wavelength band that is less readily absorbed by water than the light of the first wavelength band; a polarization splitter that splits at least one of S-polarized light and P-polarized light from light that has been reflected or scattered at the object; a photoreceptor that receives light reflected or scattered at the object via the polarization splitter; and a control unit that determines a state of the object from information based on light received by the photoreceptor. The light emitted by the light source is random polarized light where the ratio of P-polarized light and S-polarized light is generally uniform.
Laser speckle micro-rheology in characterization of biomechanical properties of tissues
Laser speckle microrheology is used to determine a mechanical property of a biological tissue, namely, an elastic modulus. Speckle frames may be acquired by illuminating a coherent light and capturing back-scattered rays in parallel and cross-polarized states with respect to illumination. The speckle frames may be analyzed temporally to obtain diffuse reflectance profiles (DRPs) for the parallel-polarized and cross-polarized states. A scattering characteristic of particles in the biological tissue may be determined based on the DRPs, and a displacement characteristic may be determined based at least in part on a speckle intensity autocorrelation function and the scattering characteristic. A size characteristic of scattering particles may be determined based on the DRP for the parallel polarization state. The mechanical property may be calculated using the displacement and size characteristics.
HYBRID SYSTEMS AND METHODS FOR CHARACTERIZING STRESS IN CHEMICALLY STRENGTHENED TRANSPARENT SUBSTRATES
A scattered light polarimetry (LSP) sub-system of a hybrid system for characterizing stress in a chemically-strengthened (CS) substrate having a top-surface and a near-surface waveguide, includes a LSP light source system, an LSP light source actuator coupled to the LSP light source system, and an optical compensator within an optical path of a LSP laser beam emitted by the LSP light source system. The optical compensator includes a half-wave plate, a half-wave plate actuator, a diffuser, and a diffuser actuator. The LSP sub-system further includes a LSP detector system in optical communication with the optical compensator through an LSP coupling prism having a LSP coupling surface, a focusing lens and a focusing lens actuator, and a support plenum having a surface and a measurement aperture, the support plenum configured to support the CS substrate at a measurement plane at the measurement aperture, and to operably support the LSP coupling prism.
Control of amplitude and phase of diffraction orders using polarizing targets and polarized illumination
Metrology scatterometry targets, optical systems and corresponding metrology tools and measurement methods are provided. Targets and/or optical systems are designed to enhance first order diffraction signals with respect to a zeroth order diffraction signal from the scatterometry target by creating a phase shift of 180 between zeroth order diffraction signals upon illumination of the scatterometry targets. For example, the targets may be designed to respond to polarized illumination by producing a first phase shift between zeroth order diffraction signals upon illumination thereof and optical systems may be designed to illuminate the target by polarized illumination and to analyze a resulting diffraction signal to yield a second phase shift between zeroth order diffraction signals upon illumination thereof. The phase shifts add up to 180 to cancel out the zeroth order diffraction signals, with either phase shift being between 0 and 180.
MICRO OBJECT DETECTION APPARATUS
A micro object detection apparatus (11) includes an optical system (50). The first optical system (50) includes a first reflection region (101), a second reflection region (102), and a light reception element (6). The first reflection region (101) has an ellipsoidal shape, and reflects scattered light scattered when irradiation light hits a particle to direct the scattered light to the light reception element (6), by utilizing two focal point positions of the ellipsoidal shape. The second reflection region (102) reflects scattered light coming from the particle (R) to direct the scattered light to the first reflection region (101), so that the scattered light is directed to the light reception element (6) by utilizing the ellipsoidal shape of the first reflection region (101). The light flux diameter of the scattered light reflected by the second reflection region (102) is larger than the particle (R), at the position of the particle (R) ate, which the scattered light is generated.
Multi-parameter inspection apparatus for monitoring of manufacturing parts using a polarization image detector
Additive manufacturing, such as laser sintering or melting of additive layers, can produce parts rapidly at small volume and in a factory setting. To ensure the additive manufactured parts are of high quality, a real-time non-destructive evaluation (NDE) technique is required to detect defects while they are being manufactured. The present invention describes an in-situ (real-time) inspection unit that can be added to an existing additive manufacturing (AM) tool, such as an FDM (fused deposition modeling) machine, or a direct metal laser sintering (DMLS) machine, providing real-time information about the part quality, and detecting flaws as they occur. The information provided by this unit is used to a) qualify the part as it is being made, and b) to provide feedback to the AM tool for correction, or to stop the process if the part will not meet the quality, thus saving time, energy and reduce material loss.
Multispectral LiDAR transceiver
A scanning device for laser detection and ranging (LiDAR), the scanning device includes, arranged in optical free space: an optical input for receiving a pulsed broadband laser beam having a linear polarization; a separating unit configured for transmitting the laser beam along a scanning optical path while changing the polarization into a circular one; a wavelength selection unit; and a scanning unit. The separating unit is configured for deviating the reflections (4) on a broadband detector while changing the orthogonal circular polarization into an orthogonal linear polarization compared to the linear polarization of the laser beam. The broadband detector is configured to receive the deviated reflections, and to detect a time-of-flight and an optical power of the light reflection.
Method and device for chirality assignment of carbon nanotube
A method for assigning chirality of carbon nanotube is provided. Firstly, carbon nanotube sample, an optical microscope with a liquid immersion objective and a liquid are provided. Secondly, the carbon nanotube sample is immersed in the liquid. Thirdly, the carbon nanotube sample is illuminated by an incident beam to generate resonance Rayleigh scattering. Fourthly, the liquid immersion objective is immersed into the liquid to get a resonance Rayleigh scattering (RRS) image of the carbon nanotube sample. Fifthly, spectra of the carbon nanotube sample are measured to obtain chirality of the carbon nanotube sample.
SUB-SURFACE IMAGING OF DIELECTRIC STRUCTURES AND VOIDS VIA NARROWBAND ELECTROMAGNETIC RESONANCE SCATTERING
Subsurface imaging with information of shape, volume, and dielectric properties is achieved with low frequencies and a ramp waveform. The low frequencies have a lower attenuation compared to the penetration losses of radar frequencies. The technique operates at wavelengths which are comparable to the object or void being imaged, and can be applied to detect and image underground aquifers, magma chambers, man-made tunnels and other underground structures.
Inspection device
Proposed is an inspection device that is provided with: an illuminating optical unit that irradiates a discretionary region of a sample with light; a control unit that gives instructions to the illuminating optical unit; and at least one detection unit that detects light transmitted from the sample. The illuminating optical unit includes a light source unit that generates light, and an electrooptic element unit to which the light generated by the light source unit is inputted, and on the basis of the instructions given from the control unit, the electrooptic element unit adjusts the light to be in a desired polarization state, said light having been generated by the light source unit, and irradiates the sample with the light.