Interferometric speckle visibility spectroscopy methods, systems, and non-transitory computer readable media for recovering sample speckle field data or a speckle field pattern from an off-axis interferogram recorded by one or more sensors over an exposure time and determining sample dynamics of a sample being analyzed from speckle statistics of the speckle field data or the speckle field pattern.

An automatic analysis apparatus includes a reaction vessel configured to contain a reaction liquid in which a measuring object and a reagent are mixed with each other, an irradiation unit configured to irradiate the reaction vessel with irradiation light as predetermined incident light polarization, a measurement unit configured to measure light emitted from the reaction vessel, and a processor configured to process a signal having a specific polarization component obtained from the measurement unit and to analyze the measuring object. The specific polarization component is determined based on the condition of the reaction liquid.

A system for particulate detection and monitoring includes one or more light sources configured to emit light into a monitored space. The system includes at least two light sensing devices configured to receive scattered light. Respective sensing portions of the three two sensing devices share a common centerline axis. A processor is operatively connected to the two light sensing devices and is configured to evaluate the scattered light for presence of particulates in the monitored space.

A method of operating a multi-angle, multi-wave array may comprise, emitting a first light at a blue wavelength, emitting a second light at an infrared wavelength, emitting a third light at an ultraviolet wavelength, and detecting a scattered light from each of the first light, the second light, and the third light at a plurality of light sensing devices wherein the detection of scattered light is determinative between categories of foreign object debris including solid objects and particulates including silicate sand, water vapor, dust, volcanic ash, sea-salt aerosol, and smoke.

A defect inspection apparatus includes: an illumination unit configured to illuminate an inspection object region of a sample with light emitted from a light source; a detection unit configured to detect scattered light in a plurality of directions, which is generated from the inspection object region; a photoelectric conversion unit configured to convert the scattered light detected by the detection unit into an electrical signal; and a signal processing unit configured to process the electrical signal converted by the photoelectric conversion unit to detect a defect in the sample. The detection unit includes an imaging unit configured to divide an aperture and form a plurality of images on the photoelectric conversion unit. The signal processing unit is configured to synthesize electrical signals corresponding to the plurality of formed images to detect a defect in the sample.

A surgical loupe system includes one or more polarization filters for producing and/or blocking polarized light. A light source is directed through a polarization filter to a patient's tissues, producing returned light. The returned light may be magnified.

An inspection apparatus or lithographic apparatus includes an optical system and a detector. The optical system includes a non-linear prismatic optic. The optical system is configured to receive zeroth and first diffraction order beams reflected from a diffraction target and separate first and second polarizations of each diffraction order beam. The detector is configured to simultaneously detect first and second polarizations of each of the zeroth and first diffraction order beams. Based on the detected first and second polarizations of one or more diffraction orders, an operational parameter of a lithographic apparatus can be adjusted to improve accuracy or precision in the lithographic apparatus. The optical system can include a plurality of non-linear prismatic optics. For example, the optical system can include a plurality of Wollaston prisms.

An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.

A defect inspection apparatus includes: an illumination unit configured to illuminate an inspection object region of a sample with light emitted from a light source; a detection unit configured to detect scattered light in a plurality of directions, which is generated from the inspection object region; a photoelectric conversion unit configured to convert the scattered light detected by the detection unit into an electrical signal; and a signal processing unit configured to process the electrical signal converted by the photoelectric conversion unit to detect a defect in the sample. The detection unit includes an imaging unit configured to divide an aperture and form a plurality of images on the photoelectric conversion unit. The signal processing unit is configured to synthesize electrical signals corresponding to the plurality of formed images to detect a defect in the sample.

The integrated smoke detection device comprises a carrier (1), a light source (2) arranged on or above the carrier, a light receiver (3) arranged on or above the carrier at a distance from the light source, and a polarizing member (7) arranged on or above the carrier, the light source emitting radiation (a, b) into the polarizing member. The polarizing member is configured to have a boundary surface (11) that linearly polarizes a reflected portion (d) of the radiation emitted by the light source, and an exit surface (12) that allows the reflected portion (d) to exit the polarizing member.