An inspection system for inspecting a semiconductor substrate, the inspection system may include an inspection unit that comprises a partially blocking bright field unit and a non-blocking bright field unit; wherein the partially blocking bright field unit is configured to block any specular reflection that fulfills the following: (a) the specular reflection is caused by illuminating, along a first axis, of an area of the wafer, (b) the specular reflection propagates along a second axis, (c) the first axis and the second axis are symmetrical about a normal to the area of the wafer, and (d) the normal is parallel to an optical axis of the partially blocking bright field unit; and wherein the non-blocking bright field unit is configured to pass to the image plane any specular reflection that fulfills the following: (a) the specular reflection is caused by illuminating, along the first axis, of an area of the wafer, (b) the specular reflection propagates along the second axis, (c) the first axis and the second axis are symmetrical about the normal, and (d) the normal is parallel to the optical axis of the partially blocking bright field unit.

The present invention provides a measurement apparatus comprising: an irradiation unit configured to obliquely irradiate a surface with light; a detection unit configured to detect an intensity distribution of reflected light from the surface; a processing unit configured to determine a BRDF of the surface based on the intensity distribution, and generate a first image representing the BRDF as a two-dimensional distribution and a second image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the BRDF; and a display unit configured to display the first image and the second image, wherein the processing unit is configured to generate the first image representing the BRDF as the two-dimensional distribution in which an ordinate axis and an abscissa axis are two directions respectively orthogonal to an optical axis of specular light.

A specular variable angle absolute reflectometer. The device includes a light source and a mirror system in a light path of the light source. The mirror system is configured to reflect a light beam from the light source towards a sample that is optically reflective. The device also includes a roof mirror disposed in the light path after the sample. The roof mirror is configured to reflect the light beam back towards the sample. The device also includes a mechanism connected to the roof mirror. The mechanism is configured to rotate the roof mirror about an axis of the sample. The device also includes a detector in the light path after the roof mirror such that the detector receives light that has been reflected from the roof mirror, thence back to the sample, thence back to the mirror system, and thence to the detector.

An inspection system for inspecting a semiconductor substrate, the inspection system may include an inspection unit that comprises a partially blocking bright field unit and a non-blocking bright field unit; wherein the partially blocking bright field unit is configured to block any specular reflection that fulfills the following: (a) the specular reflection is caused by illuminating, along a first axis, of an area of the wafer, (b) the specular reflection propagates along a second axis, (c) the first axis and the second axis are symmetrical about a normal to the area of the wafer, and (d) the normal is parallel to an optical axis of the partially blocking bright field unit; and wherein the non-blocking bright field unit is configured to pass to the image plane any specular reflection that fulfills the following: (a) the specular reflection is caused by illuminating, along the first axis, of an area of the wafer, (b) the specular reflection propagates along the second axis, (c) the first axis and the second axis are symmetrical about the normal, and (d) the normal is parallel to the optical axis of the partially blocking bright field unit.

A measurement probe is configured to be detachably connected to a biological optical measurement apparatus that performs an optical measurement on body tissue. The measurement probe includes an illumination fiber configured to irradiate the body tissue with illumination light, and a plurality of detection fibers configured to detect return light of at least one of the illumination light reflected from the body tissue and the illumination light scattered from the body tissue. On a plane which is away from distal ends of the illumination fiber and the plurality of detection fibers and through which the illumination light and the return light can pass, a detection area of the return light in each of the plurality of detection fibers is included in all of an illumination area of the illumination fiber or inside of the illumination area.

A method for extracting spectral information of a substance under test includes: identifying a pixel region A(x, y) occupied by an object under test from a hyperspectral image acquired; extracting a specular reflection region A.sub.q and a diffuse reflection region A.sub.r from the pixel region A(x, y), and calculating a representative spectrum I.sub.q(?) of the specular reflection region A.sub.q and a representative spectrum I.sub.r(?) of the diffuse reflection region A.sub.r, respectively; by comparing each element in the representative spectrum I.sub.q(?) of the specular reflection region A.sub.q with each element in the representative spectrum I.sub.r(?) of the diffuse reflection region A.sub.r, separating information of a light source from spectral information of the object to obtain a first spectral invariant C(?). This method does not require additional spectral information of the light source, which improves the analysis efficiency.

Methods for profiling a bore of an engine block are provided. Methods can comprise profiling the bore surface with a qualitative optical device (QlOD) to determine a qualitative surface characteristic map of the bore surface, wherein the QlOD comprises a light source configured to emit light toward the bore surface at an emitting angle, and a sensor array configured to sense scattered light reflected from the bore surface, and comparing the qualitative surface characteristic map to a calibration value to determine the suitability of the bore surface for thermal spray deposition. Methods can further include profiling the bore surface with a quantitative optical device (QnOD) to determine a quantitative surface characteristic, and determining a quantitative-qualitative correlation. Methods can further include profiling additional sample areas of the bore surface with the QlOD to determine a qualitative surface characteristic map of the bore surface and applying the correlation to the map.

A surface characteristics evaluation method for evaluating a surface characteristic of a painted surface including a glittering material, including: a multi-angle condition image acquisition step S101 for acquiring a multi-angle condition image including multi-angle conditions in a continuous manner by performing an image-capturing process to capture how a reflection condition of the painted surface changes when rotating an illumination device 2 emitting light onto the painted surface, the image-capturing process being performed by the line scan camera 4 while a sample P having the painted surface is moved in a certain direction; an in-plane chromaticity distribution acquisition step S102 for acquiring an in-plane chromaticity distribution of the painted surface from the multi-angle condition image acquired; and a surface characteristics evaluation step S107 for calculating particle characteristics S as surface characteristics evaluation values of the multi-angle conditions, on the basis of the in-plane chromaticity distribution acquired.

A method for inversing a depth of a subsurface chlorophyll-a maxima (SCM) of an oceanic water body based on remote sensing reflectance is provided. The method includes: band selection, R value calculation, data collection, model construction, and Z.sub.SCM calculation. This method can not only reduce the dependence of machine learning on sea surface chlorophyll-a concentrations, sea surface temperature data and sea surface height data, and reduce the calculation resource consumption of running machine learning, but also effectively improve the inversion accuracy, and effectively reduce the calculation resource consumption and inversion difficulty of inversing the SCM.

A measurement target is captured using two types of illumination patterns set such that only color features of specular objects change, the two images that are obtained are compared, and objects are identified as being specular objects or diffuse objects depending on whether the color features change markedly. At this time, the emission intensity distribution of each illumination pattern is devised such that specular lobe components that are included in reflected light are canceled out.