An inspection device includes a small shutter in an opening of an inspection chamber, and a large shutter behind the small shutter. The small shutter has a closed state, an inward-open state, and an outward-open state. The small shutter in the inward-open or outward-open state is pushed by a workpiece and pivots inward in or outward from the inspection chamber. The large shutter has a light-shielding state, a driven state, and a stationary state. The large shutter in the light-shielding state overlaps the small shutter in the closed state and closes a clearance between the opening and the small shutter. The large shutter in the driven state is pushed by the small shutter in the inward-open state and pivots with the small shutter. The large shutter in the stationary state is separate from the small shutter in the outward-open state and at a same position as in the light-shielding state.

The invention relates to a method for the manufacture of a prophylactic article, especially of a glove, from a (carboxylated) diene rubber, according to which a layer of a (carboxylated) diene latex is applied on a former and the (carboxylated) diene latex is cross-linked with a cross-linking agent, which is immobilized on inorganic and/or organic particles with formation of modified particles, and the modified particles are added to the (carboxylated) diene latex.

Multilayered product structures are formed on substrates by a combination of patterning steps, physical processing steps and chemical processing steps. An inspection apparatus illuminates a plurality of target structures and captures pupil images representing the angular distribution of radiation scattered by each target structure. The target structures have the same design but are formed at different locations on a substrate and/or on different substrates. Based on a comparison of the images the inspection apparatus infers the presence of process-induced stack variations between the different locations. In one application, the inspection apparatus separately measures overlay performance of the manufacturing process based on dark-field images, combined with previously determined calibration information. The calibration is adjusted for each target, depending on the stack variations inferred from the pupil images.

An image acquisition method includes storing a coefficient of a relational expression between a parameter corresponding to a light quantity incident on an imaging sensor including a photo sensor element and an output value of the imaging sensor in the case of the light incident on the imaging sensor which employs a reference image accumulation time, inputting a desired image accumulation time, and calculating a parameter for obtaining a desired output value of the imaging sensor by using a corrected relational expression obtained by correcting using an output value of the imaging sensor employing the desired image accumulation time in the case of the incident light quantity being zero, adjusting the light quantity incident on the imaging sensor to be a calculated parameter, and acquiring a target image by the imaging sensor on which an adjusted light quantity is incident, and outputting data of the acquired image.

An automatic optical inspection (AOI) device and method are disclosed. The device is adapted to inspect an object under inspection (OUI) (102) carried on a workpiece stage (101) and includes: a plurality of detectors (111, 112) for capturing images of the OUI (102); a plurality of light sources (121, 122) for illuminating the OUI (102) in different illumination modes; and a synchronization controller (140) signal-coupled to both the plurality of detectors (111, 112) and the plurality of light sources (121, 122). The synchronization controller (140) is configured to directly or indirectly control the plurality of detectors (111, 112) and the plurality of light sources (121, 122) based on the position of the OUI (102) so that each of them is individually activated and deactivated according to a timing profile, that each of the detectors (111, 112) is able to capture images of the OUI (102) in an illumination mode provided by a corresponding one of the light sources (121, 122), and that when any one of the light sources (121, 122) is illuminating the OUI (102), only the one of the detectors (111, 112) corresponding to this light source (121, 122) is activated. Through the timing control over the multiple light sources (121, 122) and detectors (111, 112) by the synchronization controller (140), inspection with multiple measurement configurations can be accomplished within a single scan, resulting in a significant improvement in inspection efficiency.

A system for inspecting a reflective surface includes a first imaging assembly configured to take a first image of the reflective surface, the first image including depth information, a second imaging assembly configured to take a second image of the reflective surface, the second image including contrast information, and a processor configured to acquire the first image and the second image. The processor is configured to perform: estimating a depth profile of the surface based on the depth information, correlating the depth profile with the second image, and identifying a feature of the reflective surface based on the correlation.

An automated optical double-sided inspection apparatus includes a first image-capturing portion, a second image-capturing portion, a platform, a first light-blocking portion, a second light-blocking portion, and a processing portion. The platform carries an external object. When the processing portion operates in a first capturing mode, the second light-blocking portion blocks visible light from passing therethrough, while the first light-blocking portion allows visible light to pass therethrough, so that the first image-capturing portion shoots a first side of the external object through the first light-blocking portion to obtain a first image. When the processing portion operates in a second capturing mode, the first light-blocking portion blocks visible light from passing therethrough, while the second light-blocking portion allows visible light to pass therethrough, so that the second image-capturing portion shoots a second side of the external object through the second light-blocking portion to obtain a second image.

Method for manufacturing a microarray and verifying the quality of said microarray, wherein the method comprises: —providing at least one reagent, —loading said at least one reagent in a dispensing print head, in a predetermined arrangement, —moving the print head with respect to a substrate and dispensing said at least one reagent on the substrate, during a print pass, to obtain a microarray, —illuminating the substrate using illumination means and obtaining an image of the printed microarray on the substrate, using a camera, —processing the obtained image to verify the quality of the microarray, wherein the step of obtaining an image of the printed microarray comprises: —illuminating the substrate and obtaining an image of the microarray by means of illumination means and a camera which are connected to and move together with the print head with respect to the substrate, the illumination means and the camera being adapted to move behind the print head.

An apparatus for inspecting plate-like bodies to inspect a side surface of a plate-like body with sheeted coating materials on a top side and bottom side of the plate-like body, is provided. The apparatus includes at least one light emitting unit configured to irradiate the side surface of the plate-like body with light. The apparatus includes at least one light receiving unit configured to receive light reflected with respect to the side surface of the plate-like body. The apparatus includes a conveying unit configured to move at least one among the light emitting unit and the plate-like body and to vary a position of the light on the side surface of the plate-like body, emitted by the light emitting unit. The apparatus includes a determining unit configured to determine whether the side surface of the plate-like body has a defect, by using the light emitted by the light emitting unit, upon occurrence of a condition under which the conveying unit varies the position of the light, on the side surface of the plate-like body, emitted by the light emitting unit.

A vibrometer may measure acoustic responses in portions of a structure along a scan path to acoustic excitation of the structure. A ranging device may measure distances to the portions of the structure along the scan path. A three-dimensional point cloud may be generated based on the acoustic responses in the portions of the structure and the distances to the portions of the structure. The three-dimensional point cloud may include points representing geometry of the portions of the structure. The points may be associated with the acoustic responses in corresponding portions of the structure. One or more properties of the structure may be determined based on an analysis of the three-dimensional point cloud.