The present invention relates to a system (10) for X-ray dark field, phase contrast and attenuation tomosynthesis image acquisition. The system comprises an X-ray source (20), an interferometer arrangement (30), an X-ray detector (40), a control unit (50), and an output unit. A first axis is defined extending from a centre of the X-ray source to a centre of the X-ray detector. An examination region is located between the X-ray source and the X-ray. The first axis extends through the examination region, and the examination region is configured to enable location of an objection to be examined. The interferometer arrangement is located between the X-ray source and the X-ray detector. The interferometer arrangement comprises a first grating (32) and a second grating (34). A second axis is defined that is perpendicular to a plane that is defined with respect to a centre of the first grating and/or a centre of the second grating. The control unit is configured to control movement of the X-ray source and/or movement of the X-ray detector to provide a plurality of image acquisition states, wherein the X-ray source and X-ray detector are configured to operate to acquire image data. For each of the plurality of image acquisition states the first axis extends through the examination region at a different angle. The control unit is configured to control movement of the first grating or movement of the second grating in a lateral position direction perpendicular to the second axis. For each of the acquisition states the first grating or second grating is at a different lateral position of a plurality of lateral positions. The output unit is configured to output one or more of: dark field image data, phase contrast image data, and attenuation image data.

An X-ray imaging system using multiple pulsed X-ray sources to perform highly efficient and ultrafast 3D radiography is presented. There are multiple pulsed X-ray sources mounted on a structure in motion to form an array of sources. The multiple X-ray sources move simultaneously relative to an object on a pre-defined arc track at a constant speed as a group. Electron beam inside each individual X-ray tube is deflected by magnetic or electrical field to move focal spot a small distance. When focal spot of an X-ray tube beam has a speed that is equal to group speed but with opposite moving direction, the X-ray source and X-ray flat panel detector are activated through an external exposure control unit so that source tube stay momentarily standstill equivalently. 3D scan can cover much wider sweep angle in much shorter time and image analysis can also be done in real-time.

An X-ray imaging system using multiple pulsed X-ray sources to perform highly efficient and ultrafast 3D radiography is presented. There are multiple pulsed X-ray sources mounted on a structure in motion to form an array of sources. The multiple X-ray sources move simultaneously relative to an object on a pre-defined arc track at a constant speed as a group. Electron beam inside each individual X-ray tube is deflected by magnetic or electrical field to move focal spot a small distance. When focal spot of an X-ray tube beam has a speed that is equal to group speed but with opposite moving direction, the X-ray source and X-ray flat panel detector are activated through an external exposure control unit so that source tube stay momentarily standstill equivalently. 3D scan can cover much wider sweep angle in much shorter time and image analysis can also be done in real-time.

Systems and methods of adaptively controlling filament current in an x-ray tube of an imaging system include the x-ray tube having a filament being calibrated. Calibration data from the calibration of the x-ray tube is stored at the imaging system, the calibration data including a filament current value that determines a tube current value for a tube voltage value at a plurality of stations. A resistance value of the filament over a period of time is monitored. A change in the resistance value of the filament over the period of time is determined, and the filament current value of at least one of the plurality of stations is adjusted based on the changed resistance value.

Systems and methods of adaptively controlling filament current in an x-ray tube of an imaging system include the x-ray tube having a filament being calibrated. Calibration data from the calibration of the x-ray tube is stored at the imaging system, the calibration data including a filament current value that determines a tube current value for a tube voltage value at a plurality of stations. A resistance value of the filament over a period of time is monitored. A change in the resistance value of the filament over the period of time is determined, and the filament current value of at least one of the plurality of stations is adjusted based on the changed resistance value.

An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

A system and method for improved image acquisition of multiple pulsed X-ray source-in-motion tomosynthesis imaging apparatus by generating the electrocardiogram (ECG) waveform data using an ECG device. Once a representative cardiac cycle is determined, system will acquire images only at rest period of heart beat. Real time ECG waveform is used as ECG synchronization for image improvement. The imaging apparatus avoids ECG peak pulse for better chest, lung and breast imaging under influence of cardiac periodical motion. As a result, smoother data acquisition, much higher data quality can be achieved. The multiple pulsed X-ray source-in-motion tomosynthesis machine is with distributed multiple X-ray sources that is spanned at wide scan angle. At rest period of one heartbeat, multiple X-ray exposures are acquired from X-ray sources at different angles. The machine itself has capability to acquire as many as 60 actual projection images within about two seconds.

A system and method for improved image acquisition of multiple pulsed X-ray source-in-motion tomosynthesis imaging apparatus by generating the electrocardiogram (ECG) waveform data using an ECG device. Once a representative cardiac cycle is determined, system will acquire images only at rest period of heart beat. Real time ECG waveform is used as ECG synchronization for image improvement. The imaging apparatus avoids ECG peak pulse for better chest, lung and breast imaging under influence of cardiac periodical motion. As a result, smoother data acquisition, much higher data quality can be achieved. The multiple pulsed X-ray source-in-motion tomosynthesis machine is with distributed multiple X-ray sources that is spanned at wide scan angle. At rest period of one heartbeat, multiple X-ray exposures are acquired from X-ray sources at different angles. The machine itself has capability to acquire as many as 60 actual projection images within about two seconds.

The present invention relates to a procedure for generating the data for the reconstruction of a volume in a flat object 4 using an X-ray system, which has a tube 1, a detector 3 and an object 4 located between them. According to the invention, a laminography procedure is carried out, which is a combination of an object rotation and a translation, wherein the horizontal and the vertical direction are observed independently of each other, with the result that the resulting trajectory resembles the shape of a cross.