A scanning electron microscope with a composite detection system and a specimen detection method. The scanning electron microscope includes a composite objective lens system including an immersion magnetic lens and an electro lens, configured to focus an initial electron beam to a specimen to form a convergent beam spot; a composite detection system located in the composite objective lens system; and a detection signal amplification and analysis system. A magnetic field of the immersion magnetic lens is immersed in the specimen; the electro lens is configured to decelerate the initial electron beam and focus the initial electron beam onto the specimen, and separate BSEs from a transmission path of an X-ray; the composite detection system is located below an inner pole piece of the immersion magnetic lens, is located above the control electrode, and includes an annular BSE detector and an annular X-ray detector that have a same axis center.

The charged particle beam irradiation apparatus includes: a focused ion beam column; an electron beam column; an electron detector; an image forming unit configured to form an observation image based on a signal output from the electron detector; and a control unit configured to repeatedly perform exposure control in which the focused ion beam column is controlled to expose a cross section of a multilayered sample toward a stacking direction with the focused ion beam, the control unit being configured to perform, every time exposure of an observation target layer at a cross section of the multilayered sample is detected in a process of repeatedly performing the exposure control, observation control in which the electron beam column is controlled to radiate the electron beam, and the image forming unit is controlled to form an observation image of the cross section of the multilayered sample.

A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

A geological analysis system and method are provided. The system includes sensors, including an X-ray fluorescence (XRF) sensor, which detect properties of geological sample materials, a sample tray which holds the sample materials therein, and a processor. The XRF sensor includes a body and a separable head unit and an output port configured to emit helium onto the sample materials within the tray. The tray includes chambers formed in an upper surface, ports, and passages, each providing communication between an interior of a chamber and an interior of a port. The ports are configured to be attachable to vials. The processor is configured to automatically position at least one of the sensors and the tray with respect to the other of the at least one of the sensors and the tray and to control the sensors.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.

An analyzer includes a wavelength-dispersive X-ray spectrometer and a control unit that controls the wavelength-dispersive X-ray spectrometer, the control unit performing: processing of acquiring an analysis result of preparatory analysis performed on a specimen to be analyzed; processing of setting spectroscopic conditions for WDS analysis using the wavelength-dispersive X-ray spectrometer based on the analysis result of the preparatory analysis; and processing of performing the WDS analysis on the specimen to be analyzed under the set spectroscopic conditions.

To enable evaluation of a shape of a fine particle and a fine particle type, a substrate is set as a substrate on which an isolated fine particle to be measured and an isolated standard fine particle in the vicinity of the isolated fine particle to be measured are disposed, and a scanning electron microscope body including a detector configured to detect secondary charged particles obtained by scanning a surface of the substrate with an electron beam probe, and a computer that processes a detection signal and generates an image of the isolated fine particle to be measured and the isolated standard fine particle are provided. The computer corrects a shape of the isolated fine particle to be measured by using a measurement result of the isolated standard fine particle disposed in the vicinity of the isolated fine particle to be measured. Further, by attaching a fine particle spreading tank equipped with a fine particle suspension dropping device inside the microscope body, automatic measurement including dropping of fine particle suspension onto a surface of a surface-modified substrate is possible.

Disclosed is a nondestructive inspection system includes: a radiation source system generating different types of radiations and irradiating the generated different types of radiations toward an inspection object; a detector system detecting each of the radiations transmitted through the inspection object; a transfer system varying a position of the inspection object such that the radiations generated by the radiation source system are irradiated to the inspection object; and an image system generating an image regarding the inspection object on the basis of a detection result from the detector system, wherein the radiation source system comprises: an electron gun generating an electron beam; an electron accelerator accelerating the electron beam generated by the electron gun; and a target system selectively generating at least one of various types of radiations according to variables when the electron beam accelerated by the electron accelerator is irradiated thereto.

Disclosed is a nondestructive inspection system includes: a radiation source system generating different types of radiations and irradiating the generated different types of radiations toward an inspection object; a detector system detecting each of the radiations transmitted through the inspection object; a transfer system varying a position of the inspection object such that the radiations generated by the radiation source system are irradiated to the inspection object; and an image system generating an image regarding the inspection object on the basis of a detection result from the detector system, wherein the radiation source system comprises: an electron gun generating an electron beam; an electron accelerator accelerating the electron beam generated by the electron gun; and a target system selectively generating at least one of various types of radiations according to variables when the electron beam accelerated by the electron accelerator is irradiated thereto.