A chilled mirror hygrometer may comprise a thermoelectric module, a polished mirror surface, two light emitting diodes, and a single photo-transistor or optical detector. A software controller may be employed to rapidly alternate between illuminating the two light emitting diodes. The software controller may allow the single photo-transistor or optical detector to rapidly alternate between observing the light from the first light emitting diode or the second light emitting diode. The chilled mirror hygrometer may further comprise a wand portion and an electrical housing.

A chilled mirror hygrometer may comprise a thermoelectric module, a polished mirror surface, two light emitting diodes, and a single photo-transistor or optical detector. A software controller may be employed to rapidly alternate between illuminating the two light emitting diodes. The software controller may allow the single photo-transistor or optical detector to rapidly alternate between observing the light from the first light emitting diode or the second light emitting diode. The chilled mirror hygrometer may further comprise a wand portion and an electrical housing.

The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.

The purpose of the present invention is to realize a dew point measurement in which the generation of dew condensation is directly detected and the detection can be performed without using any optical system. In particular, the purpose of the present invention is to realize a dew point measuring device that is compact and has a high sensitivity. According to one embodiment of the present invention, a sudden change in current values before and after the dew point is detected by detecting the dew condensation to detect a galvanic current that flows due to a water droplet attached onto a surface of an insulating substrate on which thin wires of dissimilar metals are juxtaposed, and by controlling the temperature on the surface of the substrate. In this way, the dew point measurement in which the dew point can be directly measured and a measurement with simple configuration and high accuracy can be performed can be realized.

According to various embodiments, there is provided a sensor arrangement including a filter configured to provide an output signal having an output wavelength, the output wavelength having a dependence on a temperature of the filter; a temperature module configured to change the temperature of the filter; a controller circuit configured to control the temperature module for changing the temperature of the filter until the output wavelength increases with decreasing temperature; and a determination circuit configured to determine a dew point of an environment surrounding the sensor arrangement, based on a minimum value of the output wavelength and the dependence.

According to various embodiments, there is provided a sensor arrangement including a filter configured to provide an output signal having an output wavelength, the output wavelength having a dependence on a temperature of the filter; a temperature module configured to change the temperature of the filter; a controller circuit configured to control the temperature module for changing the temperature of the filter until the output wavelength increases with decreasing temperature; and a determination circuit configured to determine a dew point of an environment surrounding the sensor arrangement, based on a minimum value of the output wavelength and the dependence.

A device for measuring dew point or humidity comprises a single resonator and at least one temperature-regulating element arranged to control the temperature of the resonator by heating and/or cooling. Frequency measuring circuitry is arranged to generate signals indicative of measured frequencies of the resonator. At least one controller or processor receives the signals and determines the temperature of the resonator at which condensation (e.g., dew, frost, or condensed vapor) appears on the resonator or evaporates from the resonator according to the signals.

A device for measuring dew point or humidity comprises a single resonator and at least one temperature-regulating element arranged to control the temperature of the resonator by heating and/or cooling. Frequency measuring circuitry is arranged to generate signals indicative of measured frequencies of the resonator. At least one controller or processor receives the signals and determines the temperature of the resonator at which condensation (e.g., dew, frost, or condensed vapor) appears on the resonator or evaporates from the resonator according to the signals.

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include one or more environmental sensors disposed within the FOUP, configured to measure environmental parameters of the environment of the FOUP and a FOUP configured to hold one or more wafers. The systems and methods may also include a wireless transmitter in communication with the environmental sensor, which may be disposed within the FOUP and configured to transmit the measured environmental parameters from the environmental sensor.

The dew point sensor device comprises a semiconductor substrate (1), a Peltier element (2), which may be integrated in the substrate (1), a temperature sensor (3), a capacitor (4) at an exposed surface (9) above the substrate (1) and in the vicinity of the temperature sensor (3), and an electronic circuit (5), which may also be integrated in the substrate (1). The capacitor (4) comprises a plurality of capacitor elements (40) each having a capacitance, and the electronic circuit (5) is provided for an individual determination of the capacitances. The dew point is determined by a measurement of the variation of the capacitances at decreasing temperatures and a measurement of the relevant temperature.