An article or vessel is described including a vessel surface and a coating set comprising at least one tie coating, at least one barrier coating, and at least one pH protective coating. For example, the coating set can comprise a tie coating, a barrier coating, a pH protective coating and a second barrier coating; and in the presence of a fluid composition, the fluid contacting surface is the barrier coating or layer. The respective coatings can be applied by PECVD of a polysiloxane precursor. Such vessels can have a coated interior portion containing a fluid with a pH of 4 to 8. The barrier coating prevents oxygen from penetrating into the thermoplastic vessel, and the tie coating and pH protective coating together protect the barrier layer from the contents of the vessel. The second barrier coating is comparable to glass surface if needed.

Embodiments include devices and methods for detecting particles, monitoring etch or deposition rates, or controlling an operation of a wafer fabrication process. In an embodiment, a particle monitoring device for particle detection includes several capacitive micro sensors mounted on a wafer substrate to detect particles under all pressure regimes, e.g., under vacuum conditions. In an embodiment, one or more capacitive micro sensors is mounted on a wafer processing tool to measure material deposition and removal rates in real-time during the wafer fabrication process. Other embodiments are also described and claimed.

A sensor of volatile substances including: a sensitive layer, of a sensitive material that is permeable to a volatile substance and has an electrical permittivity depending upon a concentration of the volatile substance absorbed; a first electrode structure and a second electrode structure capacitively coupled together and arranged so that a capacitance between the first electrode structure and the second electrode structure is affected by the electrical permittivity of the sensitive material; and a supply device, configured to supply a heating current through one between the first electrode structure and the second electrode structure in a first operating condition, so as to heat the sensitive layer.

Provided is a capacitive sensor in which fluctuation in the measured value of capacitance caused by the use environment is small. Disclosed is a capacitive sensor which includes a sensor sheet and a measuring instrument, the sensor sheet including a central electrode layer; a first dielectric layer laminated on the upper surface of the central electrode layer; a second dielectric layer laminated on the lower surface of the central electrode layer; a first outer electrode layer formed on the surface of the first dielectric layer on the opposite side of the central electrode layer side; and a second outer electrode layer formed on the surface of the second dielectric layer on the opposite side of the central electrode layer side, in which the first dielectric layer and the second dielectric layer are formed from elastomers, the part where the central electrode layer and the first outer electrode layer face each other is designated as a first detection portion, while the part where the central electrode layer and the second outer electrode layer face each other is designated as a second detection portion, the sensor sheet is reversibly deformable, and the capacitances of the first detection portion and the second detection portion change with deformation. The state of deformation of the sensor sheet is measured on the basis of the total capacitance by adding the capacitance of the first detection portion and the capacitance of the second detection potion.

Embodiments herein include a method for detecting a brain condition in a subject. The method can include obtaining a breath sample from the subject and contacting it with a chemical sensor element, where the chemical sensor element includes a plurality of discrete graphene varactors. The method can include sensing and storing capacitance of the discrete graphene varactors to obtain a sample data set and classifying the sample data set into one or more preestablished brain condition classifications. Other embodiments are also included herein.

A sensor is configured to measure the carbon dioxide concentration in a gas mixture. The sensor has a dielectric layer arranged between a layer-like first electrode and a layer-like second electrode. The second electrode is a composite electrode that has at least one carbonate and/or one phosphate as first material and at least one metal as second material. This sensor can be manufactured by a method comprising applying a layer-like first electrode to a substrate, applying a dielectric layer to the first electrode, and applying a layer-like second electrode to the dielectric layer. The second electrode is applied as a composite electrode that has at least one carbonate and/or one phosphate as first material and has at least one second material that has an electrical conductivity of more than 10-2 S/m.

Provided herein a capacitive organophosphate vapor-detecting sensors, methods of manufacturing thereof, and sensing devices comprising same. The sensors comprise an electrode and metal-composite porous graphene oxide dielectric material, integrally formed on said electrode.

Embodiments include disposable sensor elements, systems including the same and related methods. In an embodiment, a disposable sensor element is included having a substrate and a first measurement zone comprising a plurality of discrete binding detectors. The first measurement zone can define a portion of a first gas flow path. In some embodiments the disposable sensor element can further include a second measurement zone, separate from the first measurement zone. The second measurement zone can include a plurality of discrete binding detectors. The second measurement zone can be disposed outside of the first gas flow path. Other embodiments are also included herein.

The invention is directed to a chemically robust, highly-selective, low power sensor that can be used for the direct electrical detection of mixed gases. In particular, metal-organic frameworks (MOFs) offer exceptional chemical and structural tunability as mixed-gas capture materials. As an example of the invention, the influence of interfering gases on trace NO.sub.2 detection in a simulated flue gas stream was investigated. The unique interaction of NO.sub.2 with the MOF's metal center leads to orders of magnitude decrease in MOF resistance. More broadly, the coadsorption of specific gases (e.g., H.sub.2O, SO.sub.2) can be beneficial to the electrical detection of the target gas (e.g., NO.sub.2), and careful electrical measurements can discern their presence independent of the target gas.

Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.