A sensor system in a package, comprising: a package, the package including: a sensor chip comprising sensor array comprising a plurality of sensing elements, wherein each of the plurality of sensing elements are functionalized with a deposited mixture consisting of hybrid nanostructures and a molecular formulation specifically targeting at least one of a plurality of gases, and wherein each of the plurality of sensing elements comprises a resistance and a capacitance, and wherein at least one resistance and capacitance are altered when the interacting with gaseous chemical compounds; and a mixed signal System on a Chip (SoC), comprising an analog signal conditioning and Analog-to-Digital conversion circuit configured to convert the analog signal into a digital signal, and a low-power processor circuit configured to processes the digital signal using a pattern recognition system implementing gas detection and measurement algorithms.

A humidity sensor device includes a substrate and a pair of interdigitated electrodes formed over the substrate.

Molybdenum oxide is doped with vanadium, nobidium, tantalum or titanium to form a stable M.sub.5O.sub.14 theta phase crystal structure as a vapor sensitive material for detecting vapors of volatile organic compounds. That material is used between electrodes connected to a measuring device to measure a change in an electrical quality in the presence of a vapor of a volatile organic compound. Concentration of the vapor is measured to low part per million ranges.

According to one embodiment, a hydrogen sensor is disclosed. The hydrogen sensor includes a capacitor, a gas detector, a heater, and a determiner. The capacitor includes a deformable member that deforms by absorbing or adsorbing hydrogen and varies a capacitance value corresponding to a deformation of the deformable member. The gas detector detects gas based on a capacitance value of the capacitor. The heater heats the deformable member. The determiner determines whether gas detected by the gas detector contains a substance other than hydrogen or not, wherein the gas detector detects the gas during a heating period during which the heater heats the deformable member.

This electrically conductive composition includes a thermoplastic elastomer and flaky graphite, the melt viscosity of the thermoplastic elastomer at 200° C. in a low-shear zone with a shear rate of 60 s.sup.−1 to 200 s.sup.−1 being 50 Pa.Math.s to 1400 Pa.Math.s, and the roundness of the flaky graphite being 0.5 or less. This method for producing a sheet-form flexible electrode has a kneading step for kneading expanded graphite and a thermoplastic elastomer having a melt viscosity of 50 Pa.Math.s to 1400 Pa.Math.s at 200° C. in a low-shear zone with a shear rate of 60 s.sup.−1 to 200 s−.sup.1 to produce the electrically conductive composition, and a molding step for molding the electrically conductive composition into the form of a sheet by injection molding or extrusion molding.

A power transfer-based flexible sensing platform that can be used in a fluid environment includes at least one metallic thin film structure, with a polymeric encapsulation that protects the metallic thin film structure from the fluid environment, a smart hydrogel sandwiched between layers of the metallic thin film structure, the smart hydrogel being configured to swell or shrink in response to stimulus, and an AC power source or signal generator electrically connected to the at least one metallic film structure. The metallic thin film can include first and second U-shaped metallic thin film structures, each encapsulated, where the smart hydrogel is sandwiched between them. An AC power or signal source is electrically connected to one of the U-shaped structures, causing power to be inductively transferred to the other. Measurement of the induced power or other signal can be used to determine a concentration of an analyte in the fluid environment.

A chemical sensor and a system and method for sensing a chemical species. The chemical sensor includes a plurality of nanofibers whose electrical impedance varies upon exposure to the chemical species, a substrate supporting and electrically isolating the fibers, a set of electrodes connected to the plurality of fibers at spatially separated points to permit the electrical impedance of the plurality of fibers to be measured, and a membrane encasing the fibers and having a thickness ranging from 50 μm to 5.0 mm. The system includes the chemical sensor, an impedance measuring device coupled to the electrodes and configured to determine an electrical impedance of the plurality of fibers, and an analyzer configured to identify the chemical species based on a change in the electrical impedance.

Novel integrated circuit environmental and temperature sensors in combination with measurement circuitry fully integrated as part of an ASIC die, which may be co-packaged with a pressure sensor integrated circuit to create a compact yet sensitive environment monitoring product. Embodiments may include one or more integrated local heating elements and control circuitry that are power supply independent, make efficient use of battery power, include an accurate in-built temperature detection capability, and provide digital close-loop control of the heating elements.

The present invention relates to a method of manufacturing a relative humidity sensor comprising the step of; a) providing a first electrode on or over a substrate, b) providing a non-porous inorganic dielectric layer over the first electrode, c) providing a second electrode over the inorganic dielectric layer, and d) forming a pattern of voids in the second electrode and the inorganic dielectric layer through the second electrode. The invention also relates to a relative humidity sensor, in particular one obtained by the inventive method.

The present invention provides a humidity sensor, comprising a substrate having a coating wire and at least one humidity detecting portion S, each humidity detecting portion S comprises at least two electrodes, and each of electrodes is connected to their respective coating wires, and an electrochemical medium which is electrically insulated when dry and conductive when wet is provided between electrodes. This kind of humidity sensors can be used to monitor humidity in a highly sensitive manner, especially monitor the amount and extent of urine.