Method of determining an overlay error between device layers of a multilayer semiconductor device using an atomic force microscopy system, wherein the semiconductor device comprises a stack of device layers comprising a first patterned layer and a second patterned layer, and wherein the atomic force microscopy system comprises a probe tip, wherein the method comprises: moving the probe tip and the semiconductor device relative to each other for scanning of the surface; and monitoring motion of the probe tip with tip position detector during said scanning for obtaining an output signal; during said scanning, applying a first acoustic input signal to at least one of the probe or the semiconductor device; analyzing the output signal for mapping at least subsurface nanostructures below the surface of the semiconductor device; and determining the overlay error between the first patterned layer and the second patterned layer based on the analysis.

A method to perform sub-surface detection of nanostructures in a sample, uses an atomic force microscopy system that comprising a scan head having a probe with a cantilever and a probe tip arranged on the cantilever. The method comprises: moving the probe tip and the sample relative to each other in one or more directions parallel to the surface for scanning of the surface with the probe tip; and monitoring motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal. During said scanning acoustic vibrations are induced in the probe tip by applying a least a first and a second acoustic input signal respectively comprising a first and a second signal component at mutually different frequencies above IGHz, differing by less than IGHz to the probe, and analyzing the output signal for mapping at least subsurface nanostructures below the surface of the sample.

The present invention provides a method for inspecting a material to be inspected using ultrasound waves, the method including the following step 201 to step 301, in which step 201 is performed in a condition where: the surface temperature of a material under inspectionatmospheric temperature >2 C., and inspection using ultrasound waves in step 301 satisfies: a refractive attenuation rate 1.5%. Step 201: blowing a fluid from a blowing port onto the material to be inspected. Step 301: inspecting the material to be inspected using the ultrasound waves after step 201 or at the same time as the step 201.

A method includes: an arrangement step of arranging a phased array probe including a plurality of oscillators each of which is capable of emitting ultrasonic waves on an end surface of the rotor disc, in a parallel state in which the plurality of oscillators are arranged along a circumferential direction of the rotor disc; a first transmission step of emitting ultrasonic waves from the plurality of oscillators in the parallel state, while a timing of emitting the ultrasonic waves from each of the oscillators is controlled in a first emission pattern, and receiving reflection waves of the ultrasonic waves; and a second transmission step of emitting ultrasonic waves from the plurality of oscillators in the parallel state, while the timing of emitting the ultrasonic waves from each of the oscillators is controlled in a second emission pattern different from the first emission pattern, and receiving reflection waves of the ultrasonic waves.

A method includes: an arrangement step of arranging a phased array probe including a plurality of oscillators each of which is capable of emitting ultrasonic waves on an end surface of the rotor disc, in a parallel state in which the plurality of oscillators are arranged along a circumferential direction of the rotor disc; a first transmission step of emitting ultrasonic waves from the plurality of oscillators in the parallel state, while a timing of emitting the ultrasonic waves from each of the oscillators is controlled in a first emission pattern, and receiving reflection waves of the ultrasonic waves; and a second transmission step of emitting ultrasonic waves from the plurality of oscillators in the parallel state, while the timing of emitting the ultrasonic waves from each of the oscillators is controlled in a second emission pattern different from the first emission pattern, and receiving reflection waves of the ultrasonic waves.

Provided is a method of manufacturing an outer joint member of a constant velocity universal joint, which is constructed by forming a cup section having track grooves, and a shaft section, and by welding a cup member and a shaft member, the method including: forming the cup member and the shaft member of medium carbon steel; preparing a cup member having a cylindrical portion and a bottom portion integrally formed by forging, and a joining end surface in a machining step; preparing a shaft member having a joining end surface formed in a machining step; bringing the joining end surface of the cup member and the joining end surface of the shaft member into abutment against each other; welding the cup member and the shaft member by radiating a beam; and performing, after the welding, an ultrasonic flaw detection-inspection step.

Provided is a method of manufacturing an outer joint member of a constant velocity universal joint, which is constructed by forming a cup section having track grooves, and a shaft section, and by welding a cup member and a shaft member, the method including: forming the cup member and the shaft member of medium carbon steel; preparing a cup member having a cylindrical portion and a bottom portion integrally formed by forging, and a joining end surface in a machining step; preparing a shaft member having a joining end surface formed in a machining step; bringing the joining end surface of the cup member and the joining end surface of the shaft member into abutment against each other; welding the cup member and the shaft member by radiating a beam; and performing, after the welding, an ultrasonic flaw detection-inspection step.

An ultrasonic scanning device includes at least one pair of cylindrical rollers. The axes of each pair of cylindrical rollers are parallel to each other. A liquid for transmitting the ultrasound is stored in each cylindrical roller. In use, a pair of cylindrical rollers rotate around their respective axes in reverse directions, the test subject passes between the pair of cylindrical rollers and is tested by ultrasound. The ultrasonic scanning device can be applied in the field of lithium-ion battery testing. The internal flaws and health status of the lithium-ion battery can be determined by acquiring an ultrasonic image in the test subject. The device of the present invention has a simple structure and an ingenious conception, and is ready-to-use and less expensive, which is successfully applied in the field of lithium-ion battery testing.

An ultrasonic scanning device includes at least one pair of cylindrical rollers. The axes of each pair of cylindrical rollers are parallel to each other. A liquid for transmitting the ultrasound is stored in each cylindrical roller. In use, a pair of cylindrical rollers rotate around their respective axes in reverse directions, the test subject passes between the pair of cylindrical rollers and is tested by ultrasound. The ultrasonic scanning device can be applied in the field of lithium-ion battery testing. The internal flaws and health status of the lithium-ion battery can be determined by acquiring an ultrasonic image in the test subject. The device of the present invention has a simple structure and an ingenious conception, and is ready-to-use and less expensive, which is successfully applied in the field of lithium-ion battery testing.

An inspection device inspects a joint-type outer joint member of a constant velocity universal joint that includes a cup section having a bottomed cylindrical shape and track grooves in an inner periphery thereof for torque transmitting elements, and a shaft section extending from a bottom of the cup section. The inspection device inspects the outer joint member, which is obtained through melt-welding on a cup member forming the cup section and a shaft member forming the shaft section. The inspection device includes a surface inspection unit to inspect for a defect which appears on a surface of the outer joint member due to welding, an internal inspection unit to inspect for an internal defect of a welded portion, and a recording unit to record an inspection result of the inspection. The inspection device is configured to efficiently perform in-line total inspection for the melt-welded joint-type outer joint member.