A substrate-treating apparatus according to an example embodiment of the inventive concepts includes a support unit on which a substrate is loaded, an optical measurement unit providing light to the substrate to obtain image data and checking whether the substrate is abnormal or not, based on the image data, and a control unit controlling the support unit and the optical measurement unit. The control unit processes the image data transmitted from the optical measurement unit. The control unit includes an interlock control part performing an interlock operation interrupting a process performed on the substrate if an abnormal signal is detected from the image data.

A system for analyzing a sample, e.g., by NIR, includes a clamshell apparatus and a tunable laser. The apparatus has a fixed first section and a second section which can move between an open position and a closed position. A sample detection region is formed between an input rod and an output rod by lowering the second section to the closed position. A flowcell inserted between these sections can be used to analyze flowing samples. One illustrative arrangement employs a reference detector positioned in the first section and a sample detector positioned in the second section.

A method and system for inspecting a manufactured part at an inspection station are provided. A supported part is rotated about a measurement axis so that the part moves at predetermined angular increments during at least one rotational scan. A backside beam of collimated radiation is directed at and is occluded by the supported part at each of a first plurality of consecutive increments of movement to create a stream of unobstructed portions of the backside beam in rapid succession passing by and not blocked by the supported part. A frontside beam of radiation is directed at and is reflected by the supported part at each of a second plurality of consecutive increments of movement to create a stream of reflected portions of the frontside beam in rapid succession. The streams of reflected and unobstructed portions are detected at the inspection station to obtain electrical signals which are processed.

A method and system for inspecting a manufactured part at an inspection station are provided. A supported part is rotated about a measurement axis so that the part moves at predetermined angular increments during at least one rotational scan. A backside beam of collimated radiation is directed at and is occluded by the supported part at each of a first plurality of consecutive increments of movement to create a stream of unobstructed portions of the backside beam in rapid succession passing by and not blocked by the supported part. A frontside beam of radiation is directed at and is reflected by the supported part at each of a second plurality of consecutive increments of movement to create a stream of reflected portions of the frontside beam in rapid succession. The streams of reflected and unobstructed portions are detected at the inspection station to obtain electrical signals which are processed.

An inspection system configured to scan internal surfaces of manufactured components includes an optical probe, a light source, a conical mirror, and an imaging sensor. The optical probe has a field of view. The light source is spaced apart from the optical probe and is positioned within the field of view of the optical probe. The conical mirror is secured to the light source and is configured to transform light emitted from the light source into a light disc. The light disc is configured to be projected onto the internal surfaces of the manufactured components while scanning the internal surfaces. The imaging sensor is configured to receive reflections of the light disc from the internal surfaces via the optical probe while scanning the internal surfaces.

An inspection system configured to scan internal surfaces of manufactured components includes an optical probe, a light source, a conical mirror, and an imaging sensor. The optical probe has a field of view. The light source is spaced apart from the optical probe and is positioned within the field of view of the optical probe. The conical mirror is secured to the light source and is configured to transform light emitted from the light source into a light disc. The light disc is configured to be projected onto the internal surfaces of the manufactured components while scanning the internal surfaces. The imaging sensor is configured to receive reflections of the light disc from the internal surfaces via the optical probe while scanning the internal surfaces.

An optical sensor assembly of a centrifuge of a biological fluid separation system includes a light source configured to emit light having an intensity toward a separation chamber received within the centrifuge, with at least a portion of the light exiting the separation chamber as transmitted light. A light detector receives at least a portion of the transmitted light as received light and transmits a signal based on the received light. A controller receives the signal from the light detector, then determines the location of an interface between two of the separated components within the separation chamber based at least in part of the signal. The controller is programmed to determine whether to control the light source to dynamically adjust the intensity of the light during a biological fluid separation procedure and/or to control the light detector to dynamically adjust an amplification of the signal during the procedure.