There is an inspection system including multiple inspection units configured to inspect substrates, wherein each of the inspection units includes: a tester configured to inspect a substrate; a moving part configured to hold and move the substrate relative to the tester; and a frame structure configured to accommodate the tester and the moving part, wherein the frame structure of one inspection unit includes: a first frame to be connected to a frame structure of another inspection unit; and a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame.

The present disclosure provides a vacuum ultraviolet (VUV) detector for use with a liquid chromatography (LC) system (otherwise referred to herein as an LC-VUV detector) for the study of liquids. The LC-VUV detector incorporates an ultra-short pathlength flow cell into the LC-VUV detector to render liquid samples at least semi-transparent to VUV light. The ultra-short pathlength flow cell is specifically designed to: (a) interface with a focused beam of VUV light, (b) provide zero dead volume, resulting in perfectly laminar flow through the flow cell, and (c) be modular and removable, allowing flow cells of different pathlength to be used within the LC-VUV detector. Methods for analyzing liquid samples using the LC-VUV detector and flow cell disclosed herein are also provided in the present disclosure.

An imaging pod for capturing image data of a surface of a material stockpile, includes a housing including selectively a moveable door, an image sensor disposed within the housing and selectively revealeable responsive to the selective movement of the door. When the image sensor is revealed, the image sensor is configured to capture the image data of the surface of the stockpile.

A mask inspection apparatus, a vacuum seal component and a method for adjusting a mask inspection apparatus. A mask inspection apparatus comprises a vacuum housing, an EUV camera mounted on the vacuum housing, and a projection lens, arranged in a vacuum chamber of the vacuum housing, for imaging at least one section of an EUV mask onto an image sensor of the EUV camera, wherein a vacuum seal component having a flexible wall portion is arranged between the vacuum housing and the EUV camera or a camera holder of this EUV camera, and wherein this flexible wall portion is arranged radially outside of a central axis of the EUV camera or of the camera holder.

The present invention discloses a movable visual inspection device for shield machines, comprising a rail and an inspection platform. The rail is installed on a shield tail, and the inspection platform includes a bottom plate, a shell, a cleaning mechanism, a power storage control system, and a traveling mechanism. Inside the shell is a visual inspection mechanism with a camera box, a camera, and a stabilizer component. The traveling mechanism drives the bottom plate along the rail. The cleaning mechanism, consisting of a glass sheet, a reel driving part, and a cleaning film, keeps the camera lens clear. The reel driving part rotates the cleaning film, which slides against the glass sheet on the camera box. This invention enables multi-faceted and multi-angle visual inspection of shield machine segments, ensures a clear camera lens, facilitates automatic cleaning and inspection position adjustment, and enhances working efficiency and inspection effectiveness.