G01N2201/06106

FOURIER TRANSFORM INFRARED SPECTROMETER
20200217786 · 2020-07-09 · ·

In an FTIR 1, a beam splitter 12, fixed mirror 13 and movable mirror 14 are shared by a main interferometer 10 including a multiwavelength infrared light source 11 and a control interferometer 20 including a semiconductor laser 21. A first detector 16 detects infrared interference light generated by the main interferometer 10 and transmitted through or reflected by a sample. A second detector 26 detects monochromatic interference light generated by the control interferometer 20. A spectrum creator 32 determines an optical path difference between an optical path via the fixed mirror 13 and an optical path via the movable mirror 14, based on the intensity and uncalibrated oscillation wavelength of the monochromatic interference light detected by the second detector 26, and creates a spectrum by performing fast Fourier transform on an interferogram which shows a distribution of the intensity of the infrared interference light detected by the first detector 16 with respect to the optical path difference. An oscillation wavelength calibrator 34 locates an absorption peak of carbon dioxide from the peaks in the spectrum created by the spectrum creator 32, and compares a wavenumber or wavelength of the absorption peak with a true absorption wavenumber or wavelength of carbon dioxide to determine a calibrated oscillation wavelength of the semiconductor laser 21.

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

A substrate processing method includes providing a substrate into a process chamber; introducing a reference light into the process chamber; generating a plasma light in the process chamber while performing an etching process on the substrate; receiving the reference light and the plasma light; and detecting an etching end point by analyzing the plasma light and the reference light. Detecting the etching end point includes a compensation adjustment based on a change rate of an absorption signal of the reference light with respect to a change rate of an emission signal of the plasma light

AN OPTICAL MEASUREMENT DEVICE
20240019368 · 2024-01-18 ·

The present invention relates to a method and device for determining a property of an ambient environment. The device comprises a plasmonic sensing element; a first light source for illuminating a first and a second light sensor, the first sensor via the plasmonic sensing element; a second light source for illuminating the light sensors; circuitry for executing: a control function controlling light sources, a function receiving a measurement from the first sensor, and a first signal from the second sensor, a function receiving a reference from the first sensor, and a second signal from the second sensor, a function determining the property by comparing the measurement and reference signals, and the control function further controlling light sources such that a relation of intensities of light emitted by the light sources is constant over time.

DIVIDED-APERTURE INFRA-RED SPECTRAL IMAGING SYSTEM
20200088586 · 2020-03-19 ·

Various embodiments disclosed herein describe a divided-aperture infrared spectral imaging (DAISI) system that is adapted to acquire multiple IR images of a scene with a single-shot (also referred to as a snapshot). The plurality of acquired images having different wavelength compositions that are obtained generally simultaneously. The system includes at least two optical channels that are spatially and spectrally different from one another. Each of the at least two optical channels are configured to transfer IR radiation incident on the optical system towards an optical FPA unit comprising at least two detector arrays disposed in the focal plane of two corresponding focusing lenses. The system further comprises at least one temperature reference source or surface that is used to dynamically calibrate the two detector arrays and compensate for a temperature difference between the two detector arrays.

Imaging beam positioning apparatus and method of use thereof
10561860 · 2020-02-18 ·

The invention comprises an alignment guide apparatus and a method of use thereof for aligning an imaging beam, longitudinally passing through an exit nozzle of an imaging system, to an imaging zone of a sample, includes the steps of: (1) providing an alignment guide, the alignment guide comprising: (a) a guide wall at least partially circumferentially enclosing an aperture, (b) a first laser element connected to the guide wall, and (c) a second laser element connected to the guide wall; (2) inserting the exit nozzle of the imaging system into the aperture; (3) projecting a first line from the first laser element onto the sample; (4) projecting a second line from the second laser element onto the sample; and (5) moving the sample relative to the exit nozzle of the imaging system to position an intersection of the first line and the second line at the imaging zone to align the imaging beam to the imaging zone.

METHOD FOR ESTIMATING THE INTENSITY OF A WAVE EMITTED BY AN EMITTING SOURCE
20200003680 · 2020-01-02 ·

A method for analyzing a gaseous sample, by comparing an incident light wave and a transmitted light wave, the method comprising: i) illuminating the sample with a light source emitting the incident light wave propagating up to the sample; ii) detecting a light wave transmitted by the sample; iii) detecting a reference light wave emitted by the light source and representing a light wave reaching a reference photodetector without interacting with the sample; iv) repeating i) to iii) at different measurement instants; v) estimating, at each measurement instant, an intensity of the reference light wave; vi) taking into account the estimated intensity of the reference light wave and the detected intensity of the transmitted light wave to perform a comparison, at each measurement instant; and vii) analyzing the gaseous sample as a function of the comparison.

Electronic device and method of estimating bio-information using the same

An electronic device may include an optical sensor configured to emit a reference light to a reference object and detect the reference light reflected from the reference object during calibration, and emit a measurement light to a target object and detect the measurement light reflected from the target object during a measurement; and a processor configured to perform the calibration of the optical sensor while the electronic device is disposed to oppose or in contact with the reference object by controlling the optical sensor to emit and detect the reference light, and estimate bio-information based on a light quantity of the measurement light that is reflected from the target object by the optical sensor, and a light quantity of the reference light reflected from the reference object.

Assay Devices and Methods
20190323961 · 2019-10-24 ·

A device for determining an assay result may include a test strip, a light source system, a light detection system, and a processor.

METHOD TO LABEL AS DEFECTIVE A MEASURE OF AN OPTICAL TRAP FORCE EXERTED ON A TRAPPED PARTICLE BY A TRAPPING LIGHT BEAM

A method to label as defective a measure of an optical-trap force, that is exerted on a trapped particle located inside a living, dispersive, viscoelastic medium, including operations of: (i) determining a calibration constant between the optical trap forces and the sensed voltages; (ii) determining a first calibration function of the frequency of the particle oscillation with the active-passive procedure; (iii) computing a second calibration function of the frequency as the quotient between the calibration constant and the first calibration function; (iv) computing an energy function of the frequency as the product of the thermal energy of the trapped particle and the second calibration function; (v) checking whether the energy function converges to the thermal energy of the trapped particle as the frequency increases; (vi) if there is no such convergence, then label as defective the measure of the optical-trap force.

Assay devices and methods

A device for determining an assay result may include a test strip, a light source system, a light detection system, and a processor.