A beating spectroscopy device includes: first and second quantum cascade lasers; a quantum cascade detector; and a sample holder configured to hold a sample on an optical path between the second quantum cascade laser and the quantum cascade detector. Lights from the first and second quantum cascade lasers are detected by the quantum cascade detector while a wavelength of the light from the second quantum cascade laser is changed to scan a frequency of a beating signal having a frequency in accordance with a wavelength difference between the lights from the first and second quantum cascade lasers.

A detection assembly and a method for producing a detection assemblies are disclosed. In an embodiment a detection arrangement includes an emitter configured to generate radiation having a peak wavelength in an infrared spectral range, a detector configured to receive the radiation, a mounting surface comprising at least a first contact surface and a second contact surface for external electrical connection of the detection arrangement, a form body adjoining the emitter and the detector at least in places and deflection optics, on which the radiation impinges during operation of the detection arrangement so that an optical path is formed between the emitter and the detector by the deflection optics, wherein the deflection optics include a scattering body into which the radiation enters during the operation through a surface of the scattering body facing the emitter.

Systems and methods are provided for multi-spectral or hyper-spectral fluorescence imaging. In one example, a spectral encoding device may be positioned in a detection light path between a detection objective and an imaging sensor of a microscope. In one example, the spectral encoding device includes a first dichroic mirror having a sine transmittance profile and a second dichroic mirror having a cosine transmittance profile. In addition to collecting transmitted light, reflected light from each dichroic mirror is collected and used for total intensity normalization and image analysis.

A recycling optical cavity is defined at least by first and second optical films and is configured to receive a test material therein. The test material is configured to emit at least a second light having a second wavelength when irradiated with a first light having a first wavelength. For at least one of s- and p-polarized incident lights incident in an incident plane, and at the first and second wavelengths: at a first incident angle, the first optical film has respective optical transmittances T11(θ1) and T12(θ1), and the second optical film has respective optical transmittances T21(θ1) and T22(θ1), wherein T11(θ1)>T12(θ1), T21(θ1), T22(θ1); and at a second incident angle, the first optical film has respective optical transmittances T11(θ2) and T12(θ2), and the second optical film has respective optical transmittances T21(θ2) and T22(θ2), wherein T21(θ2)>T11(θ2), T12(θ2), T22(θ2).

A multi-mode illumination system, including: a first illumination module; a second illumination module; and a third illumination module, as disclosed herein.

An embodiment of a gas analyzer is described that comprises a light source configured to produce a substantially collimated first beam with a diverging angle of less than about 15 degrees; a gas cell comprising an inlet configured to introduce a gas into the gas cell, an outlet configured to remove the gas from the gas cell, and a plurality of mirrors configured to reflect the substantially collimated first beam within the gas cell; and a detector configured to generate a signal in response to the substantially collimated first beam.

Methods, apparatuses, and systems for improving gas detecting devices are provided. An example gas detecting device may include a receiver element. In some examples, the receiver element may include a sample filter component and a reference filter component. In some examples, the sample filter component may be positioned coaxially with the reference filter component.

A system of measuring an image of a pattern in a scanning type EUV mask may include a high-power laser output unit including a flat mirror and a spherical mirror, which are used to focus a high-power femto-second laser on a gas cell; a coherent EUV light generating portion generating a coherent EUV light; a pin-hole, a graphene filter, and a zirconium (Zr) filter; a stage; an x-ray spherical mirror configured to focus a coherent EUV light; a zone-plate lens placed between the stage and the x-ray spherical mirror; an x-ray flat mirror placed between the zone-plate lens and the x-ray spherical mirror; an order sorting aperture (OSA) placed on the stage and configured to transmit only a first-order diffraction light of the focused coherent EUV light; and a detector portion placed on the stage.

Methods and apparatus of inspection tools for inspecting impurities in vials are provided herein. In some embodiments, an inspection tool for inspecting impurities in vials includes: a table for inspecting a plurality of vials; one or more carts configured to move about the table to place the one or more carts in an inspection position, wherein each of the one or more carts includes a vial holder configured to hold a plurality of vials, and wherein each vial holder is configured to spin the plurality of vials on their own respective axes; and a camera configured to take images of the plurality of vials when the plurality of vials are disposed in the inspection position.

A high-speed device, for inspecting a large area of an object, which includes: a terahertz wave generation portion configured to generate a terahertz wave; a ring beam forming portion configured to form a ring beam by using the terahertz wave incident from the terahertz wave generation portion; a rotary mirror configured to reflect the ring beam formed by the ring beam forming portion while rotating to allow the ring beam to be incident on an inspection target object; and a detector configured to detect a ring beam generated from the inspection target object.