Patent classifications
G01N2201/0683
METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES
A method and system are presented for use in measuring on patterned samples, aimed at determining asymmetry in the pattern. A set of at least first and second measurements on a patterned region of a sample is performed, where each of the measurements comprises: directing illuminating light onto the patterned region along an illumination channel and collecting light reflected from the illuminated region propagating along a collection channel to be detected, such that detected light from the same patterned region has different polarization states which are different from polarization of the illuminating light, and generating a measured data piece indicative of the light detected in the measurement. Thus, at least first and second measured data pieces are generated for the at least first and second measurements on the same patterned region. The at least first and second measured data pieces are analyzed and output data is generated being indicative of a condition of asymmetry in the patterned region.
Molecular detection system
A molecular sensor that utilises dichroism can be used to identify the presence of specific molecules in a substance. The molecular sensor includes a sensor element comprising (i) a scaffold moiety and (ii) one or more receptor molecules for the target molecule attached to the scaffold moiety to form a scaffold/receptor complex, wherein the scaffold/receptor complex is modified to incorporate a chromophore and the modified scaffold/receptor complex has a high aspect ratio.
ELLIPSOMETER AND INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE
Provided is an ellipsometer including a polarizing optical device configured to separate light, reflected from a sample that is irradiated with illumination light comprising a linearly polarized light, into a first linearly polarized light in a first polarization direction and a second linearly polarized light in a second polarization direction that is orthogonal to the first polarization direction, and a light-receiving optical system configured to calculate an Ψ and Δ, an amplitude ratio and a phase difference of the two polarized light respectively, from an interference fringe formed by interference between the first linearly polarized light and the second linearly polarized light after passing through an analyzing device with transmission axis different from the first polarization direction and the second polarization direction.
Terahertz full-polarization-state detection spectrograph
A terahertz full-polarization-state detection spectrograph is provided, which comprises a terahertz wave generator, a polarizer, a polarizing beam-splitting sheet, a horizontal terahertz detector, and a vertical terahertz detector. The terahertz wave generator produces a terahertz wave, and the purity of the terahertz wave is optimized by the polarizer; a detected sample modulates the terahertz wave, the purity of which is optimized, to obtain a terahertz modulated wave; the polarizing beam-splitting sheet decomposes the terahertz modulated wave into a horizontal terahertz wave and a vertical terahertz wave which are vertical to each other in a polarization state; the two corresponding terahertz detectors are used for detecting the two terahertz waves respectively, and then the characteristics of the detected sample are analyzed according to the detection result.
CHOLESTERIC LIQUID CRYSTAL LAYER, LAMINATE, OPTICALLY ANISOTROPIC BODY, REFLECTIVE FILM, METHOD FOR PRODUCING CHOLESTERIC LIQUID CRYSTAL LAYER, ANTI-COUNTERFEIT MEDIUM, AND DETERMINATION METHOD
Provided are a cholesteric liquid crystal layer having an excellent reflection anisotropy, a low haze, and a high circular polarization degree of reflected light, and a method for producing the same. In addition, provided are a laminate, an optically anisotropic body, and a reflective film, each of which including the cholesteric liquid crystal layer. A cholesteric liquid crystal layer formed using a liquid crystal compound, in which, in at least one main plane out of a pair of main planes of the cholesteric liquid crystal layer, a direction of a molecular axis of the liquid crystal compound changes while continually rotating along at least one in-plane direction, the molecular axis of the liquid crystal compound is tilted with respect to the main plane of the cholesteric liquid crystal layer, and an arrangement direction of bright portions and dark portions derived from the cholesteric liquid crystalline phase, as observed under a scanning electron microscope in a cross section perpendicular to the main plane, is tilted with respect to the main plane of the cholesteric liquid crystal layer.
Ellipsometer
An ellipsometer includes: a gantry; a polarization generator and a polarization analyzer mounted in the gantry; and a focusing lens disposed on a sample on a stage, wherein the sample is an object to be measured, wherein a vertical section of the focusing lens is a semi-circle.
Beam focusing and reflective optics
A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
REAL-TIME MULTIDIMENSIONAL TERAHERTZ IMAGING SYSTEM AND METHOD
Real-time multidimensional terahertz imaging system and method, the method comprising method for imaging an object, comprising, in a laser pump line: patterning a laser pump beam with known patterns of a radiation beam and illuminating the object with the radiation beam; yielding a patterned pump beam; directing the patterned beam from the pump line and a laser probe beam from a laser probe line to a detection crystal; single-shot detection of the radiation beam waveform; and correlating the single-shot detection and the known patterns.
Real-time monitoring of fabrication of integrated computational elements
Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design using a deposition source, where the layers of the ICEs being formed are supported on a support that is periodically moved relative to the deposition source during the forming; monitoring characteristics of the layers of the ICEs during the forming, the monitoring of the characteristics being performed using a timing of the periodic motion of the support relative to the deposition source; and adjusting the forming based on results of the monitoring.
Sub-resolution defect detection
An optical metrology device, such as an interferometer, detects sub-resolution defects on a sample, i.e., defects that are smaller than a pixel in the detector array of the interferometer. The optical metrology device obtains optical metrology data at each pixel in at least one detector array and determines parameter values of a signal model for a pixel of interest using the optical metrology data received by a plurality of pixels neighboring a pixel of interest. A residual for the pixel of interest is determined using the optical metrology data received by the pixel of interest and determined parameter values for the signal model for the pixel of interest. A defect, which may be smaller than the pixel of interest can then be detected based on the residual for the pixel of interest.