An optical scanning system for non-destructively acquiring a three-dimensional structure of an object includes an optical image processing device and an optical scanning device. The optical image processing device is configured to generate an optical beam along a first optical axis direction. The optical scanning device is configured to convert the optical beam along the first optical axis direction into an optical beam along a second optical axis direction, and scan an object to be inspected by using the optical beam along the second optical axis direction. The optical image processing device scans the object to be inspected by the optical scanning device along X-axis and Y-axis directions to acquire YZ and XZ cross section structural images at different consecutive positions, so as to reconstruct a three-dimensional structural image.

A system and method for contamination measurement. The system includes a laser sensor for sensing contaminant on an object to generate an image, and a sensor interface and image processing module that receives an image of laser light that is sensed on the object. The sensor interface and image processing module processes the image using image characterization and image processing to provide contaminant determination. Contaminant determination may include estimating a degree of change in contaminant level from an initial condition or measuring exact amounts of contaminant collected.

A product inspection system includes a spectrum measurer that measures a spectrum of a product being conveyed, and a quality determiner that determines quality of the product on the basis of output obtained by inputting spectral data of the product measured by the spectrum measurer into a trained model generated by machine learning. The trained model is generated by machine learning using training data including spectral data measured in mutually different postures.