According to one embodiment, an X-ray computed tomography apparatus includes an X-ray tube, collimators including through holes respectively collimating an X-ray and diffraction bodies provided in the holes respectively, diffracting the X-ray at an angle to an X-ray energy, X-ray detection elements provided at predetermined distances from the bodies, counting circuitry counting the number of photons originating from the X-ray, storage circuitry storing statistical information, corresponding to energy bins in the X-ray, concerning a count distribution of count values with positions of the elements, classification circuitry classifying the numbers of counted photons for the bins by using the information, reconstruction circuitry reconstructing a medical image to the bins based on the number of photons classified for the bins.

An X-ray analyzer is provided with an excitation source configured to irradiate a sample with an excitation beam, an analyzing crystal configured to diffract characteristic X-rays emitted from the sample irradiated with the excitation beam for each wavelength, a line detector having a plurality of detection elements each arranged to detect an intensity of each of the plurality of wavelengths diffracted by the analyzing crystal, a slit arranged between the sample and the analyzing crystal, an actuator configured to move the slit in a direction intersecting a propagation direction of the characteristic X-rays passing through the slit, and a controller. The controller analyzes the sample using a measurement result when the slit is in an initial position and a measurement result when the slit has been moved from the initial position by a predetermined amount.

Apparatus for X-ray scatterometry includes an X-ray source, which directs an X-ray beam to be incident at a grazing angle on an area of a surface of a sample, and an X-ray detector measures X-rays scattered from the area. A knife edge is arranged parallel to the surface of the sample in a location adjacent to the area so as to define a gap between the surface and the knife edge and to block a portion of the X-ray beam that does not pass through the gap. A motor moves the knife edge perpendicular to the surface so as to control a size of the gap. An optical rangefinder receives optical radiation reflected from the surface and outputs a signal indicative of a distance of the knife edge from the surface. Control circuitry drives the motor responsively to the signal in order to regulate the size of the gap.

An apparatus includes a plurality of stacked flat Bragg diffractors having at least a first flat Bragg diffractor and a second flat Bragg diffractor. The first and second flat Bragg diffractors are positioned sequentially along an x-ray propagation axis of an x-ray beam. The x-ray beam includes x-rays and has an angular beam divergence less than 30 mrad in at least one direction.

An X-ray spectroscopic analysis apparatus includes: a radiation source configured to irradiate a predetermined irradiation area in the surface of a sample with an excitation beam for generating a characteristic X-ray; an analyzing crystal provided facing the irradiation area; a slit provided between the irradiation area and the analyzing crystal, the slit being parallel to the irradiation area and a predetermined crystal plane of the analyzing crystal; and an X-ray linear sensor including linear detection elements arranged in a direction perpendicular to the slit, the detection elements each having a length in a direction parallel to the slit. By detecting characteristic X-rays from different linear portions of the irradiation area for each wavelength, it is possible to perform analysis with sensitivity higher than the sensitivity of a conventional X-ray spectroscopic analysis apparatus that irradiates a point-like irradiation area with an excitation beam.

An apparatus includes an x-ray source configured to generate x-rays, at least some of which impinge a sample and at least one diffractor configured to concurrently diffract at least some of the x-rays from the sample in a first direction and in a second direction substantially orthogonal to the first direction. The apparatus further includes at least one two-dimensional (2D) position-sensitive x-ray detector configured to receive at least some of the diffracted x-rays and to concurrently generate first spectral information of the x-rays diffracted in the first direction and second spectral information of the x-rays diffracted in the second direction. The apparatus further includes circuitry configured to receive the first and second spectral information and to generate a single x-ray absorption spectroscopy (XAS) spectrum using the first and second spectral information.

An object of the present disclosure is to obtain sufficient analysis accuracy and throughput when a sample is analyzed using two or more element analysis devices having different energy resolutions. An analysis system according to the present disclosure performs elemental analysis by using a second element analysis device having higher energy resolution than a first element analysis device, based on a result obtained by comparing a first energy spectrum of a target sample acquired by using the first element analysis device with a second energy spectrum of a reference sample acquired by using the first element analysis device (see FIG. 2).

An apparatus includes an x-ray source configured to generate x-rays, at least some of which impinge a sample and at least one diffractor configured to concurrently diffract at least some of the x-rays from the sample in a first direction and in a second direction substantially orthogonal to the first direction. The apparatus further includes at least one two-dimensional (2D) position-sensitive x-ray detector configured to receive at least some of the diffracted x-rays and to concurrently generate first spectral information of the x-rays diffracted in the first direction and second spectral information of the x-rays diffracted in the second direction. The apparatus further includes circuitry configured to receive the first and second spectral information and to generate a single x-ray absorption spectroscopy (XAS) spectrum using the first and second spectral information.

An X-ray analyzer is provided with an excitation source configured to irradiate a sample with an excitation beam, an analyzing crystal configured to diffract characteristic X-rays emitted from the sample irradiated with the excitation beam for each wavelength, a line detector having a plurality of detection elements each arranged to detect an intensity of each of the plurality of wavelengths diffracted by the analyzing crystal, a slit arranged between the sample and the analyzing crystal, an actuator configured to move the slit in a direction intersecting a propagation direction of the characteristic X-rays passing through the slit, and a controller. The controller analyzes the sample using a measurement result when the slit is in an initial position and a measurement result when the slit has been moved from the initial position by a predetermined amount.

The present invention relates to an X-ray analysis apparatus and an X-ray analysis method for analysing a sample. The X-ray analysis method involves using a first slit between the sample and a position sensitive X-ray detector to analyse the sample, including calculating a detection angle based on a distance L.sub.1 between the first slit and the X-ray detector, and the position of the first detection element in the array of detection elements. The X-ray analysis apparatus comprises a processor that is configured to analyse data from an X-ray detector comprising an array of detection elements. The processor is configured to receive data comprising an X-ray intensity detected at the first detection element of the array of detection elements and calculate the detection angle based on the distance L.sub.1 between the first slit and the X-ray detector, and the position of the first detection element in the array of detection elements.