A system for inspecting an object includes a turntable on which the object may be placed. The turntable rotates the object about a first rotation axis. The system also includes an X-ray source to generate an X-ray beam in a plane to intersect with the object. The system also includes an X-ray detector that can detect at least a portion of the X-ray beam transmitted through the object during rotation and generate image data based on the detected X-ray beam. Also included is a controller that can: generate an image of the object based on the image data; determine, based on a suspect item identified in the image of the object, a second rotation axis at an angle from the first axis; cause a tilt of the turntable so that it is perpendicular to the second axis; and initiate a subsequent rotation of the object about the second axis.

A method, apparatus, and system for scanning an elongate structure. A scanner in a scanning system is moved axially along the elongate structure using a translating structure in the scanning system. The elongate structure is scanned axially using an x-ray beam emitted by the scanner as the scanner moves axially along the elongate structure to perform an axial scan. The x-ray beam has a first orientation. A location on the elongate structure having an inconsistency is detected while scanning the elongate structure axially. The elongate structure is scanned at the location with the x-ray beam in a second orientation.

A method of computed tomography includes illuminating an object with a cone of illumination, wherein the object is between a source of the cone of illumination and a two-dimensional photo-detector array. The method includes shielding the photodetector array from the collimator shield that includes a slit defined therethrough and moving the slit of the collimator shield across the photodetector array in a direction perpendicular to the slit to expose the photodetector array to the cone of illumination through the slit as the slit scans across the photodetector array to acquire a two-dimensional image of the object. The method includes rotating the object to a new rotational position and repeating movement of the slit to expose the photodetector and rotating the object along the axis until the object has been imaged from multiple rotational positions to form a three-dimensional model of the object.

A multi-charged particle beam inspection apparatus includes a movable stage to place thereon an inspection substrate where plural dies each with the same pattern are arranged in a predetermined direction, a pitch acquisition circuit to acquire an arrangement pitch of plural dies, a magnification control circuit to control, when imaging the inspection substrate with multi-charged particle beams while continuously moving the stage, magnification of the multi-charged particle beams to be a controlled magnification such that the arrangement pitch of the plural dies becomes a natural number (2 or greater) multiple of an imaging region cycle in the predetermined direction of plural imaging regions to be individually imaged by each beam at each arrangement position of the multi-charged particle beams, and an acquisition mechanism to acquire inspection images of the plural dies on the inspection substrate, using the multi-charged particle beams whose magnification has been controlled to be the controlled magnification.

According to one aspect of the present invention, a pattern inspection apparatus includes an inspected image acquisition mechanism configured to acquire an inspected image of a figure pattern formed on an inspection target object, using an electron beam; a reference image generation processing circuit configured to generate a reference image corresponding to the inspected image; a contour data generation processing circuit configured to generate contour data defining a contour line of the figure pattern; a comparison processing circuit configured to compare the inspected image and the reference image and determine whether there is a defect based on a result of a comparison; and a defect selection processing circuit configured to select a defect within a range preset based on the contour line as a valid defect, from at least one defect determined to be a defect by the comparison, using the contour data.

An X-ray apparatus includes a mount, an X-ray source, a detector, an actuator, and a controller. The mount is configured to hold a sample. The X-ray source is configured to direct a beam of X-rays toward a first side of the sample. The detector is positioned on a second side of the sample, opposite the first side, so as to receive at least a portion of the X-rays that have been transmitted through the sample and to output signals indicative of an intensity of the received X-rays. The actuator is configured to scan the detector over a range of positions on the second side of the sample so as to measure the transmitted X-rays as a function of a scattering angle. The controller is coupled to receive the signals output by the detector and to control the actuator, responsively to the signals, so as to increase an acquisition time of the detector at first positions where the intensity of the received X-rays is weak relative to the acquisition time at second positions where the intensity of the received X-rays is strong.

An X-ray apparatus includes a mount, an X-ray source, a detector and a beam limiter. The mount is configured to hold a planar sample. The X-ray source is configured to direct a beam of X-rays toward a first side of the sample. The detector is positioned on a second side of the sample, opposite the first side, so as to receive at least a part of the X-rays that have been transmitted through the sample. The beam limiter is positioned on the first side of the sample so as to intercept the beam of the X-rays. The beam limiter includes first and second blades and first and second actuators. The first and second blades have respective first and second edges positioned in mutual proximity so as to define a slit, through which the beam of the X-rays will pass, at a distance smaller than 25 mm from the first side of the sample. The first and second actuators are configured to shift the first and second blades along respective, first and second translation axes so as to adjust a width of the slit.

An X-ray apparatus includes a mount, an X-ray source, a detector, an optical gauge and a motor. The mount is configured to hold a planar sample having a first side, which is smooth, and a second side, which is opposite the first side and on which a pattern has been formed. The X-ray source is configured to direct a first beam of X-rays toward the first side of the sample. The detector is positioned on the second side of the sample so as to receive at least a part of the X-rays that have been transmitted through the sample and scattered from the pattern. The optical gauge is configured to direct a second beam of optical radiation toward the first side of the sample, to sense the optical radiation that is reflected from the first side of the sample, and to output a signal, in response to the sensed optical radiation, that is indicative of a position of the sample. The motor is configured to adjust an alignment between the detector and the sample in response to the signal.

The present specification provides a detector for an X-ray imaging system. The detector includes at least one high resolution layer having high resolution wavelength-shifting optical fibers, each fiber occupying a distinct region of the detector, at least one low resolution layer with low resolution regions, and a single segmented multi-channel photo-multiplier tube for coupling signals obtained from the high resolution fibers and the low resolution regions.

Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.