A movable x-ray imager includes a first backscatter x-ray detector assembly. The system also includes a second backscatter x-ray detector assembly that is removably attachable with the movable x-ray imager. The movable x-ray imager and the second backscatter x-ray detector include complementary attachment features configured to secure, removably, the second backscatter x-ray detector with the movable x-ray imager in an arrangement having the second and first backscatter x-ray detectors fixedly oriented with respect to each other.

Apparatus include a reflector positioned adjacent to a sample location that is situated to receive a charged particle beam (CPB) along a CPB axis from a CPB focusing assembly so that the reflector is situated to receive light emitted from a sample at the sample location based on a CPB-sample interaction or a photon-sample interaction and to direct the light to a photodetector, and a steering electrode situated adjacent to the reflector so as to direct secondary charged particles emitted from the sample based on the CPB-sample interaction away from the reflector and CPB axis. Methods and systems are also disclosed.

X-ray spectrometer comprising an X-ray source emitting X-ray radiation onto a sample, a collimator arrangement for collimating X-ray radiation that has passed through a diaphragm arrangement, the collimator arrangement comprising a modified Soller slit with mutually parallel lamellae forming a plurality of slit-shaped passages, at least a portion of the slit-shaped passages having partition walls aligned substantially perpendicularly to the slit-shaped passages, the partition walls being non-transmissive to X-ray radiation and restricting the transverse divergence of the X-ray radiation passing through the collimator arrangement in a direction transversely with respect to the diffraction plane of the X-ray radiation coming from the sample. Significantly faster spatially resolved measurements can thus be carried out.

An x-ray tomography system which can generate a qualitative 3D image of a region of interest using a an x-ray source, the x-ray source configured to emit x-ray radiation at the region of interest. The x-ray radiation or the x-ray source or the relative position of the x ray source configured to be moved in a two dimensional plane. An x-ray detector including a plurality of detector elements arranged in a two dimensional plane opposite the x-ray source, the x-ray detector configured to detect x-ray radiation after attenuation by the subject and provide an indication of the detected x-rays. And a processor configured to receive the indication of the detected x-rays and resolve the detected x-ray radiation into a three dimensional image. The three dimensional image is qualitative in nature.

The present invention relates to an X-ray fluorescence, XRF, spectrometer, for measuring X-ray fluorescence emitted by a target, wherein the XRF spectrometer comprises an X-ray tube with an anode that is emitting a divergent X-ray beam, a capillary lens that is configured to focus the divergent X-ray beam on the target, an aperture system that is positioned between the anode of the X-ray tube and the capillary lens and comprises at least one pinhole, and a detector that is configured for detecting X-ray fluorescence radiation emitted by the target, wherein the at least one pinhole is configured for being inserted into the divergent X-ray beam and for reducing a beam cross section of the divergent X-ray beam between the anode and the capillary lens.

The present invention further relates to an aperture system for a spectrometer, to the use of an aperture system for adjusting the focal depth of a spectrometer and to an method for adjusting the focal depth of as spectrometer.

Provided is a spin-polarized scanning electron microscope capable of improving an SNR of a detected signal. The spin-polarized scanning electron microscope includes: a spin-polarized electron source configured to irradiate a sample with a spin-polarized electron beam that is an electron beam whose spin is deflected in a specific direction; a scanning unit configured to scan the sample by deflecting the spin-polarized electron beam; a spin detector configured to detect a spin direction of an emitted electron that is an electron emitted from the sample scanned with the spin-polarized electron beam; and a control unit configured to control the spin direction to be detected by the spin detector based on the spin direction of the spin-polarized electron beam.

A system inspects, modifies or analyzes a region of interest of a sample via charged particles. A detector device of the system produces a pixel image having horizontal and vertical pixel resolutions. A charged particle deflection device produces a scanning charged particle beam in a scanning region. The deflection device has horizontal and vertical deflection units controlled by a digital to analog converter having a digital resolution larger than the horizontal pixel resolution and/or the vertical pixel resolution. An operator control interface of the system selects an assignment between respective image pixels of a desired pixel image and digital inputs of the DAC to produce horizontal and/or vertical deflection signals to guide the charged particle beam to the location of the respective image pixel. A reliable image of a sample can be obtained even when there is zooming or panning within an accessible region of the sample.

A method, apparatus, and system for scanning an elongate structure. A scanner in a scanning system is moved axially along the elongate structure using a translating structure in the scanning system. The elongate structure is scanned axially using an x-ray beam emitted by the scanner as the scanner moves axially along the elongate structure to perform an axial scan. The x-ray beam has a first orientation. A location on the elongate structure having an inconsistency is detected while scanning the elongate structure axially. The elongate structure is scanned at the location with the x-ray beam in a second orientation.

A system inspects, modifies or analyzes a region of interest of a sample via charged particles. A detector device of the system produces a pixel image having horizontal and vertical pixel resolutions. A charged particle deflection device produces a scanning charged particle beam in a scanning region. The deflection device has horizontal and vertical deflection units controlled by a digital to analog converter having a digital resolution larger than the horizontal pixel resolution and/or the vertical pixel resolution. An operator control interface of the system selects an assignment between respective image pixels of a desired pixel image and digital inputs of the DAC to produce horizontal and/or vertical deflection signals to guide the charged particle beam to the location of the respective image pixel. A reliable image of a sample can be obtained even when there is zooming or panning within an accessible region of the sample.

A system for inspecting an object includes a turntable on which the object may be placed. The turntable rotates the object about a first rotation axis. The system also includes an X-ray source to generate an X-ray beam in a plane to intersect with the object. The system also includes an X-ray detector that can detect at least a portion of the X-ray beam transmitted through the object during rotation and generate image data based on the detected X-ray beam. Also included is a controller that can: generate an image of the object based on the image data; determine, based on a suspect item identified in the image of the object, a second rotation axis at an angle from the first axis; cause a tilt of the turntable so that it is perpendicular to the second axis; and initiate a subsequent rotation of the object about the second axis.