A method of operating a charged particle beam device is disclosed, including passing each of a plurality of beamlets through a deflector and a scanner, in that order. Each of the beamlets is focused with an objective lens on a sample to form a plurality of focal spots, forming an array. A first beamlet is focused on a first spot and a second beamlet is focused on a second spot. In a centered configuration of the device, each of the plurality of beamlets is directed by the deflector toward a coma free point. In a beamlet-displaced configuration of the device, the scanner is scanned such that the first beamlet passes through an acceptable aberrations point, the first beamlet scanning a displaced first field of view; and the first spot is displaced from the regular first focal spot to a displaced first focal spot.

The radiation phase contrast imaging apparatus includes an X-ray source, a first grating, a second grating arranged between the X-ray source and the first grating, and a moving mechanism for moving an object stage for holding an object. The moving mechanism is configured to more the object stage to an X-ray source side of the first grating and a second grating side of the first grating opposite to the source side of the first grating.

Embodiments of the disclosure include an extended length core sample scanning apparatus that enables the imaging of extended length core samples using medical-type CT scanners. The extended length core sample scanning apparatus has a frame that defines a U-shaped receptacle that receives core housing containing the core sample when the core sample is placed in a CT scanner. The extended length core sample scanning apparatus may have two or more rollers located in the U-shaped receptacle to enable translation of the extended length core sample through a CT scanner during scanning. The rollers may also provide for a minimum clearance between the core housing and the walls of the U-shaped receptacle. Methods of imaging an extended length core sample are also provided.

To correctly acquire image data of an inspected article by preventing a difference in shade between images caused by a difference in position or sensitivity between sensor elements. An X-ray generation source irradiates an inspection region where an inspected article passes with an X-ray. X-ray detection means receives the X-ray passing through the inspection region using a plurality of sensor elements. Image data generation means generates image data of the inspected article from an output of the X-ray detection means. Incidence condition changing means changes two or more kinds of X-ray incidence conditions common for all of the plurality of sensor elements of the X-ray detection means in a state of absence of the inspected article in the inspection region. Correction data generation means acquires correction data that is needed for making a shade of an image uniform for each incidence condition.

A method of detecting an anomaly in a crystallographic structure, the method comprising: illuminating the structure with x-ray radiation in a known direction relative to the crystallographic orientation; positioning the structure such that its crystallographic orientation is known; detecting a pattern of the diffracted x-ray radiation transmitted through the structure; generating the simulated pattern based on the known direction relative to the crystallographic orientation; comparing the detected pattern to a simulated pattern for x-ray radiation illuminating in the known direction; and, detecting the anomaly in the crystallographic structure based on the comparison.

Embodiments may include methods, systems, and apparatuses for care area based swath speed for throughput and sensitivity improvement. A method may comprise receiving scan region of a die. The scan region of the die may have a first care area at a controller configured to control an inspection tool, wherein the inspection tool includes a stage having the die disposed thereon. The method may then include scanning a first portion of the scan region at a fast feed rate and the first care area at a slow feed rate. Scanning may include emitting particles in a particle beam toward the die resulting an incidence on the die. Emitting may be performed using a particle emitter. Scanning may then include detecting a portion of particles reflected from the incidence. Detecting may be performed using a detector. Scanning may then include changing a position of the stage relative to the incidence.

Apparatus include a reflector positioned adjacent to a sample location that is situated to receive a charged particle beam (CPB) along a CPB axis from a CPB focusing assembly so that the reflector is situated to receive light emitted from a sample at the sample location based on a CPB-sample interaction or a photon-sample interaction and to direct the light to a photodetector, and a steering electrode situated adjacent to the reflector so as to direct secondary charged particles emitted from the sample based on the CPB-sample interaction away from the reflector and CPB axis. Methods and systems are also disclosed.

Embodiments of the disclosure include an extended length core sample scanning apparatus that enables the imaging of extended length core samples using medical-type CT scanners. The extended length core sample scanning apparatus has a frame that defines a U-shaped receptacle that receives core housing containing the core sample when the core sample is placed in a CT scanner. The extended length core sample scanning apparatus may have two or more rollers located in the U-shaped receptacle to enable translation of the extended length core sample through a CT scanner during scanning. The rollers may also provide for a minimum clearance between the core housing and the walls of the U-shaped receptacle. Methods of imaging an extended length core sample are also provided.

A method for performing inspection of a manufactured article. The method comprises acquiring a sequence of radiographic images of the article; determining a position of the article for each one of the acquired radiographic images; and performing a three-dimensional model correction loop which comprises, iteratively: generating a simulated radiographic image for each determined position of the article; and comparing the simulated radiographic images and the acquired radiographic images and generating a match result. If the match result is indicative of a mismatch, the method includes identifying and characterizing differences between the simulated radiographic images and the acquired radiographic images; correcting one of a geometry and a material density of a region of interest of the detailed three-dimensional model of the article based on each one of the identified and characterized differences; and performing a new iteration. A system for performing inspection is also provided.

An electron diffraction imaging system for imaging the three-dimensional structure of a single target molecule of a sample uses an electron source that emits a beam of electrons toward the sample, and a two-dimensional detector that detects electrons diffracted by the sample and generates an output indicative of their spatial distribution. A sample support is transparent to electrons in a region in which the sample is located, and is rotatable and translatable in at least two perpendicular directions. The electron beam has an operating energy between 5 keV and 30 keV, and beam optics block highly divergent electrons to limit the beam diameter to no more than three times the size of the sample molecule and provide a lateral coherence length of at least 15 nm. An adjustment system adjusts the sample support position in response to the detector output to center the target molecule in the beam.