An X-ray spectrometer is provided with: an excitation source configured to irradiate excitation rays onto an irradiation area of a sample, a diffraction member provided to face the irradiation area; a slit member provided between the irradiation area and the diffraction member, the slit member having a slit extending parallel to the irradiation area and a prescribed surface of the diffraction member; an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit; a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction; and a second moving mechanism configured to position the X-ray linear sensor on a path of characteristic X-rays passed through the slit and diffracted by the prescribed surface by moving the X-ray linear sensor within a plane perpendicular to the longitudinal direction.

An X-ray detector device for a device for the X-ray inspection of products includes a first line detector with a first discrete spatial resolution, a second line detector with the same or lesser second discrete spatial resolution, and an evaluation and control unit. The first line detector is operable to capture X-radiation in a non-spectrally resolved fashion along a first capture line transverse to a product movement direction to generate first image data. The second line detector is operable to capture the X-radiation in a spectrally resolved fashion along a second capture line parallel to the first capture line to generate second image data. The evaluation and control unit is operable to evaluate the first and second image data to detect at least one predefined feature of the product with the first discrete spatial resolution by combining the items of information contained in the first and second image data.

Techniques are disclosed for identifying and reducing pixel-specific image distortion of an x-ray detector. In one example, an x-ray detector obtains, for various calibration positions, two-dimensional (2D) images of a calibration object. The calibration object comprises reference points that comprise spatial characteristics. Processing circuitry computes an image distortion field across a plurality of pixels of the x-ray detector based on imaged characteristics of the reference points in each of the 2D images, the spatial characteristics of the reference points, and the calibration positions. The processing circuitry computes, based on the computed image distortion field, a correction transform for correcting image distortion across the x-ray detector. The processing circuitry applies the correction field to a preliminary image obtained by the x-ray detector to obtain a corrected image exhibiting reduced pixel-specific image distortion.

An X-ray imaging inspection system for inspecting items comprises an X-ray source 10 extending around an imaging volume 16, and defining a plurality of source points 14 from which X-rays can be directed through the imaging volume. An X-ray detector array 12 also extends around the imaging volume 16 and is arranged to detect X-rays from the source points which have passed through the imaging volume, and to produce output signals dependent on the detected X-rays. A conveyor 20 is arranged to convey the items through the imaging volume 16.

A scan head design uses 1:1 (one-to-one) imaging micro-lens arrays to transfer the object plane X-ray image from a CR-plate onto a linear photosensor. The scan-head includes a housing having therein, an array of red light emitting diodes (LEDs), a microlens array, and a sensor. The housing faces the CR-plate and the scan-head is translated across the CR-plate to read out the X-ray image therein. The scan head is compact and provides for improved spatial resolution and reduced power requirements.

A wavelength dispersive X-ray fluorescence spectrometer includes a single one-dimensional detector (10) having detection elements (7) arranged linearly, and includes a detector position change mechanism (11) for setting a position of the one-dimensional detector (10) to either a parallel position at which an arrangement direction of the detection elements (7) is parallel to a spectral angle direction of a spectroscopic device (6) or an intersection position at which the arrangement direction intersects the spectral angle direction. At the parallel position, a receiving surface of the one-dimensional detector (10) is located at a focal point of focused secondary X-rays (42). At the intersection position, a receiving slit (9) is disposed at the focal point of the focused secondary X-rays (42), and the receiving surface is located at a traveling direction side of the focused secondary X-rays (42) farther from the spectroscopic device (6) than the receiving slit (9).

A method of computed tomography includes illuminating an object with a cone of illumination, wherein the object is between a source of the cone of illumination and a two-dimensional photo-detector array. The method includes shielding the photodetector array from the collimator shield that includes a slit defined therethrough and moving the slit of the collimator shield across the photodetector array in a direction perpendicular to the slit to expose the photodetector array to the cone of illumination through the slit as the slit scans across the photodetector array to acquire a two-dimensional image of the object. The method includes rotating the object to a new rotational position and repeating movement of the slit to expose the photodetector and rotating the object along the axis until the object has been imaged from multiple rotational positions to form a three-dimensional model of the object.

A spectrometer includes a crystal analyzer having a radius of curvature that defines a Rowland circle, a sample stage configured to support a sample such that the sample is offset from the Rowland circle, an x-ray source configured to emit unfocused x-rays toward the sample stage, and a position-sensitive detector that is tangent to the Rowland circle. A method performed via a spectrometer includes emitting, via an x-ray source, unfocused x-rays toward a sample that is mounted on a sample stage such that the sample is offset from the Rowland Circle, thereby causing the sample to emit x-rays that impinge on the crystal analyzer or transmit a portion of the unfocused x-rays to impinge on the crystal analyzer; scattering, via the crystal analyzer, the x-rays that impinge on the crystal analyzer; and detecting the scattered x-rays via a position-sensitive detector that is tangent to the Rowland circle.

A scan head design uses 1:1 (one-to-one) imaging micro-lens arrays to transfer the object plane X-ray image from a CR-plate onto a linear photosensor. The scan-head includes a housing having therein, an array of red light emitting diodes (LEDs), a red-absorbing filter, a microlens array, an infrared-filter, and a sensor. The housing faces the CR-plate and the scan-head is translated across the CR-plate to read out the X-ray image therein. The scan head is compact and provides for improved spatial resolution and reduced power requirements.

An X-ray inspection apparatus includes: an X-ray emission unit for emitting an X-ray to an object; an X-ray detection unit for detecting each X-ray photon transmitted through the object by discriminating energy possessed by the photon into one or more energy region(s) in accordance with a predetermined threshold level; a storage unit for storing the object and the associated threshold level; a threshold level setting unit for referring to the storage unit to keep a threshold level for the object specified by inputted information so that the X-ray detection unit can refer to the threshold level as the predetermined threshold level; and an inspection unit for inspecting the object based on a number of photons or an amount corresponding to the number of the photons detected by the X-ray detection unit for each of the one or more energy region(s).