An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

A method for preparing original data of an odor image includes a measurement result acquiring step of acquiring each measurement result measured with respect to the odor substance included in the sample in each of a plurality of sensor elements of an odor sensor, and a data processing step of generating the original data for representing the odor of the sample in the image by processing each of the acquired measurement results. Each of the sensor elements has different detection properties with respect to the odor substance. In a case where each of the original data items is represented in a small image, the odor of the sample is represented in an odor image in a predetermined display mode in which small images are assembled, and each of the small images is varied in accordance with the magnitude of the value of each original data item.

Various embodiments of an apparatus for measuring binding kinetics of an interaction of an analyte material present in a fluid sample are disclosed. The apparatus includes a sensing resonator having at least one binding site for the analyte material; actuation circuitry adapted to drive the sensing resonator into an oscillating motion; measurement circuitry coupled to the sensing resonator and adapted to measure an output signal of the sensing resonator representing resonance characteristics of the oscillating motion of the sensing resonator; and a controller coupled to the actuation and measurement circuitry, wherein the controller is adapted to detect an individual binding event between the at least one binding site and a molecule of the analyte material.

Devices that include a low sensitivity bulk acoustic wave (BAW) resonator sensor including a surface to which a low recognition component is immobilized, the low recognition component being configured to selectively bind the analyte, an analyte molecule to which a tag is linked, or a tag, or any one of these molecules to which an amplification element-linked second recognition component is bound; a high sensitivity BAW resonator sensor including a surface to which a high recognition component is immobilized, the high recognition component being configured to selectively bind the analyte, an analyte molecule to which a tag is linked, or a tag, or any one of these molecules to which an amplification element-linked second recognition component is bound; one or more containers housing an amplification molecule, the amplification element-linked second recognition component, and optionally one or both of the tag and the analyte molecule.

Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.

There are provided an analyte sensor and an analyte sensing method which provide measurements in a wide phase range, a reduction in size, and lowering of current consumption. That is, in an analyte sensor and an analyte sensing method, a detection element which outputs a detection signal in accordance with a change in mass in a detection portion and a reference element which outputs a reference signal in accordance with a change in mass in a reference portion are provided, a phase change value is determined from the detection signal and the reference signal by heterodyne system, and an amount of detection of a target is calculated.

A fluidic sensing device includes a first sidewall, a second sidewall, a bulk acoustic resonator structure, a biomolecule, and a cover. A fluidic channel is defined between the first and second sidewalls. The bulk acoustic resonator structure has a surface defining at least a portion of the bottom of the channel. The biomolecule is attached to the surface of the bulk acoustic resonator that forms the bottom of the channel. The cover is disposed over the channel and the first and second sidewalls. A portion of the cover disposed over the channel defines at least a portion of the top of the channel and blocks UV radiation from being transmitted through the cover. A first portion of the cover disposed over the first sidewall is transparent to UV radiation, and a second portion of the cover disposed over the second sidewall is transparent to UV radiation.

One side of the surfaces of the crystal resonator 4 including an adsorbing film 46 that absorbs a sensing object on an excitation electrode 42A is pressed with the channel forming member 5 using the upper-side cover body 21 to fonn a channel 57, which runs from one end side to the other end side on one side of surfaces of the crystal resonator 4. A depressed portion 84 is disposed in at least one of: a position opposed to the channel 57 and at a surface on an opposite side of the channel 57 in the channel forming member 5, and a position opposed to the channel 57 and at a surface on the opposite side of the channel 57 in the pressing member with respect to the channel forming member 5.

A NEMS readout system includes a sensor array comprising a plurality of sensors. Each sensor of the plurality of sensors including a resonator with frequency characteristics different from the resonator of each other sensor of the plurality of sensors. A readout signal indicative of a plurality of output signals is collected from the sensor array. Each output signal of the plurality of output signals corresponding to one of the plurality of sensors. An analysis of the plurality of output signals is performed to identify a plurality of resonant frequencies and to detect a frequency shift associated with at least one of the plurality of resonant frequencies.

Various exemplary embodiments relate to a device to measure carbon dioxide (CO.sub.2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.