A speed sensor system for measuring rotational speed includes a magnetic sensor and a cylindrical drum rotatable around the magnetic sensor. The cylindrical drum includes several axially extending members disposed circumferentially around a first edge of the cylindrical drum. The magnetic sensor is configured to generate an electrical output that indicates each passage of each of the axially extending members around the magnetic sensor as the cylindrical drum rotates around the magnetic sensor. The axially extending members are adapted to deflect radially outwards away from the magnetic sensor in response to an increased rotational speed of the cylindrical drum. The deflection of the axially extending members provides voltage regulation functionality that maintains voltage outputs of the magnetic sensor within a desired operational range.

A speed sensor system for measuring rotational speed includes a magnetic sensor and a cylindrical drum rotatable around the magnetic sensor. The cylindrical drum includes several axially extending members disposed circumferentially around a first edge of the cylindrical drum. The magnetic sensor is configured to generate an electrical output that indicates each passage of each of the axially extending members around the magnetic sensor as the cylindrical drum rotates around the magnetic sensor. The axially extending members are adapted to deflect radially outwards away from the magnetic sensor in response to an increased rotational speed of the cylindrical drum. The deflection of the axially extending members provides voltage regulation functionality that maintains voltage outputs of the magnetic sensor within a desired operational range.

A gyro sensor apparatus includes a sensor device that outputs a detection signal, a control circuit including an angular velocity detection circuit that detects angular velocity based on the detection signal, an angle calculation circuit that calculates an angle based on the angular velocity, and an actuator drive signal generation circuit that generates an actuator drive signal based on the angle, a base body that supports the sensor device and the control circuit, and an output terminal that is provided as part of the base body and outputs the actuator drive signal or a signal based thereon.

A gyro sensor apparatus includes a sensor device that outputs a detection signal, a control circuit including an angular velocity detection circuit that detects angular velocity based on the detection signal, an angle calculation circuit that calculates an angle based on the angular velocity, and an actuator drive signal generation circuit that generates an actuator drive signal based on the angle, a base body that supports the sensor device and the control circuit, and an output terminal that is provided as part of the base body and outputs the actuator drive signal or a signal based thereon.

A physical quantity sensor includes a substrate, a beam part that includes a detection beam, a detection weight that is supported on the substrate through the beam part, and a detection piezoelectric film that is disposed on the detection beam and is configured to generate an electric output according to displacement of the detection beam caused by movement of the detection weight in a direction due to an application of a physical quantity. The detection beam includes a first detection beam and a second detection beam that are disposed to hold the detection weight at different positions from each other in the direction. The first detection beam and the second detection beam have different spring constants, and the detection piezoelectric film is disposed on the first detection beam.

A physical quantity sensor includes a substrate, a beam part that includes a detection beam, a detection weight that is supported on the substrate through the beam part, and a detection piezoelectric film that is disposed on the detection beam and is configured to generate an electric output according to displacement of the detection beam caused by movement of the detection weight in a direction due to an application of a physical quantity. The detection beam includes a first detection beam and a second detection beam that are disposed to hold the detection weight at different positions from each other in the direction. The first detection beam and the second detection beam have different spring constants, and the detection piezoelectric film is disposed on the first detection beam.

A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.

A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.

A method for determining centripetal accelerations of pivotally coupled rigid bodies arranged in a series, where the series includes a rigid body arranged between a previous rigid body and a next rigid body, includes determining the centripetal acceleration of the next rigid body and the centripetal acceleration at an inertial measurement unit (IMU) coupled to the next rigid body based on measurements and calculated parameters from the rigid body and the next rigid body. The centripetal acceleration of the next rigid body and the centripetal acceleration at the IMU coupled to the next rigid body are determined without using measurements or calculated parameters from the previous rigid body.

A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit.