A high precision rotation sensor comprises an inertial mass suspended from a base wherein the mass is responsive to rotational inputs that apply loads to load-sensitive resonators whose changes in resonant frequency are related to the applied loads.

A sensing module including a circuit substrate, a sensing element, a packaging material and a blocking structure is provided. The sensing element, the packaging material and the blocking structure are disposed on the circuit substrate. The sensing element comprises a sensing portion. The outer side surface of the blocking structure is in direction contact with the packaging material to define a boundary of the packaging material. The sensing portion is disposed in a region encircled by the boundary of the packaging material, and the maximum thickness of the packaging material from a surface facing away from the circuit substrate to the circuit substrate is less than or equal to a distance from the second surface of the blocking structure to the circuit substrate.

Provided is an accelerometer. The accelerometer includes a frame portion with an opening formed inside, a central portion disposed in the opening, a connecting portion disposed on an upper surface and a lower surface of the central portion and connecting the frame portion and the central portion, and a sensing portion that converts a sensed acceleration into an electrical signal, and the accelerometer senses an acceleration in a Z-axis direction penetrating an upper surface and a lower surface of the central portion, and reduces a sensing of an acceleration in an X-axis direction and a Y-axis direction crossing the Z-axis direction.

An accelerometer for measuring acceleration in the direction of a z-axis which is perpendicular to an xy-plane. The accelerometer comprises a first proof mass and a second proof mass and a suspension structure from which the masses are suspended. The first and second proof masses and the suspension structure are dimensioned so that a ratio L/K is greater for the first proof mass than for the second proof mass but has the same sign for both proof masses. L is the sum of the torques which act on said proof mass when the accelerometer undergoes acceleration in the direction of the z-axis, and K is the spring constant for the rotational motion of said proof mass about the rotation axis.

A physical quantity sensor includes a base, at least two arms, a movable plate, a hinge, and a physical quantity measurement element. Four quadrants of the sensor are defined by first and second orthogonal lines. The first line passes through the center of the sensor and crosses the hinge. The second line extends along the hinge. Fixed regions of the sensor are located in the first and second quadrants. No fixed regions are located in at least one of the third and fourth quadrants. The third and fourth quadrants are closer to the base than the first and second quadrants in a plan view.

According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.

A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C≤1.5≤Cmin.

[Object] To provide a low heat-resistant sensor that has high chemical resistance, excellent drip-proof properties, and excellent dust-proof properties. [Solution] A low heat-resistant sensor includes a sensor body that includes a sensor unit that is disposed in a housing and a cable that is electrically connected to the sensor unit of the sensor body. The housing of the sensor body is composed of fluorine resin, the cable is covered by a tube composed of fluorine resin, a portion at which the housing and the tube are connected to each other is thermally bonded, and the housing and the tube are integrally formed.

A microelectromechanical sensor device has a detection structure, having: a substrate, with a top surface; an inertial mass, suspended above the top surface of the substrate and elastically coupled to a rotor anchor so as to perform an inertial movement relative to the substrate as a function of a quantity to be detected; and stator electrodes, integrally coupled to the substrate at respective stator anchors and capacitively coupled to the inertial mass so as to generate a differential capacitive variation in response to, and indicative of, the quantity to be detected. In particular, the inertial mass performs, as the inertial movement, a translation movement along a vertical axis orthogonal to the top surface of the substrate; and the stator electrodes are arranged in a suspended manner above the top surface of the substrate.

The invention relates to an electronic device for measuring a specific quantity, the device having a two-wire interface having two connection terminals intended to be connected to a conductive pair supplying the measuring device and conveying in return an electrical quantity representative of the measured quantity. The device comprises a transducer providing a raw measurement of the determined quantity, a processing stage for conditioning the raw measurement, the processing stage including one input connected to the transducer and one output, a regulator electrically connected to the processing stage. The regulator includes an input port electrically connected to the two connection terminals of the two-wire interface and an output port supplying regulated voltage to the transducer and/or to the processing stage. The device also includes a feedback circuit electrically connected to the regulator input port and to the processing stage.