An electronic device includes: a sensor mounting portion; an inertial force sensor unit detecting an inertial force, the inertial force sensor unit being mounted on the sensor mounting portion; a mounting base substrate arranged in a housing; and a support beam having multiple connection portions connecting with the sensor mounting portion and having multiple connection portions connecting with the mounting base substrate, the support beam includes an angular portion at which an extension direction of the support beam is angled. The mounting base substrate defines a substrate penetration portion that penetrates the mounting base substrate in a thickness direction of the mounting base substrate. The sensor mounting portion is arranged at an inner side of the substrate penetration portion of the mounting base substrate when viewed from the thickness direction of the mounting base substrate.

A physical quantity sensor includes a substrate, a pair of first elements detecting acceleration in a first direction, and a pair of second elements detecting an acceleration in a second direction. The first element portion includes a first movable portion displaceable in the first direction, first and second movable electrode fingers disposed in the first movable portion, first and second fixing electrode fingers disposed to face the first and second movable electrode fingers, and first and second support portions supporting the first and second fixing electrode fingers. The second element includes a second movable portion displaceable in the second direction, third and fourth movable electrode fingers disposed in the second movable portion, third and fourth fixing electrode fingers disposed to face the third and fourth movable electrode fingers, and third and fourth support portions supporting the third and fourth fixing electrode fingers.

A device includes a micro-electromechanical system (MEMS) device layer comprising a proof mass. The proof mass includes a first proof mass portion and a second proof mass portion. The first proof mass portion is configured to move in response to a stimuli. The second proof mass portion has a spring attached thereto. The device further includes a substrate disposed parallel to the MEMS device layer. The substrate comprises a bumpstop configured to limit motion of the first proof mass portion. The device includes a first electrode disposed on the substrate facing the second proof mass portion. The first electrode is configured to apply a pulling force onto the second proof mass portion and to move the second proof mass portion towards the first electrode.

A physical quantity sensor includes, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a substrate; and a moving member facing the substrate in the third direction via a gap and becoming displaced in the third direction in relation to the substrate. The moving member has a first region that has a plurality of penetration holes penetrating the moving member in the third direction and having a square opening shape as viewed from the third direction, and a second region having no penetration hole. At least one of a length in the first direction and a length in the second direction of the second region is equal to or greater than S0+2×S1, where S0 is a length of one side of the penetration hole, and S1 is a space between the penetration holes next to each other.

An inertial measurement unit includes: a substrate; a sealing member; a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor; and a second inertial sensor module including a second inertial sensor and a second package accommodating the second inertial sensor. A material of the first package includes a resin. A material of the second package is an inorganic material. The first inertial sensor module is accommodated in a space between the substrate and the sealing member and thus airtightly sealed therein. The second inertial sensor module is provided outside the space.

A micromechanical sensor system, in particular, an acceleration sensor, including a substrate having a main extension plane, the sensor system including a first mass and a second mass. The first and second masses are each designed to be at least partially movable in a vertical direction, perpendicular to the main extension plane of the substrate. The first mass includes a stop structure, wherein the stop structure has an overlap with the second mass in the vertical direction.

An impact indicator includes a micro-sensor having a mass element configured to move from a first position to a second position in response to receipt by the mass element of an impact event. The micro-sensor includes detection circuitry configured to change from a first state to a second state in response to movement of the mass element from the first position to the second position. The detection circuitry is prevented from returning to the first state in response to changing to the second state. A radio-frequency identification (RFID) module is coupled to the detection circuitry and is configured to output a value indicating that the mass element is in the second position. An activator element is configured to maintain the mass element in the first position until removal of the activator element from the micro-sensor.

This disclosure describes a microelectromechanical device comprising at least one mobile rotor. The rotor comprises a rotor measurement region and a rotor stopper region and a rotor isolation region which connects the rotor measurement region mechanically to the rotor stopper region and isolates the rotor measurement region electrically from the rotor stopper region.

A method and system for estimating surface roughness of a ground for an off-road vehicle to control an implement comprises detecting motion data of an off-road vehicle traversing a field or work site during a sampling interval. A first sensor is adapted to detect pitch data of the off-road vehicle for the sampling interval to obtain a pitch acceleration. A second sensor is adapted to detect roll data of the off-road vehicle for the sampling interval to obtain a roll acceleration. An electronic data processor or surface roughness index module determines or estimates a surface roughness index based on the detected motion data, pitch data and roll data for the sampling interval. The surface roughness index can be displayed on the graphical display to a user or operator of the vehicle.

An acceleration detection device includes a piezoelectric element including a top surface and a bottom surface, a sheet-shaped adhesive provided on the bottom surface of the piezoelectric element, and a first package member to which the piezoelectric element is bonded by the sheet-shaped adhesive.