A physical quantity sensor includes: a base; wiring disposed in the base; a support that includes a first bonded surface bonded to the base and a second bonded surface bonded to the wiring; a suspension beam connected to the support; and an electrode finger supported by the suspension beam. The support is located between the first bonded surface and the suspension beam and includes a first overhang separated from the base.

The invention relates to an acceleration sensor, especially a duplex acceleration sensor, an arrangement and a method for detecting a loss of road grip of a vehicle wheel (3). The acceleration sensor comprises a tube (5) having a longitudinal axis forming a circular arc segment, and two closed ends. A mass (15; 315) is arranged inside the tube (5) such that is able to move inside the tube (5) in the longitudinal direction thereof. A magnet arrangement (17; 203; 205; 317) is designed to counteract, by way of a magnetic force exerted on the mass (15; 315), a movement of said mass (15; 315) from an idle position (25), and a read-out unit (608) is designed to detect a movement of said mass (15) from the idle position (25).

A device includes two electrically isolated metalized posts attached in close proximity to each other on a bendable substrate. When the bendable substrate bends concavely with respect to the surface onto which the posts are mounted, the distance between the tops of the two posts decreases. At a fixed bending curvature, the two posts will meet and complete an electrical circuit. The posts comprise a flexible material so that the meeting of the posts has minimal effect on the spring constant or damping coefficient of the harmonic oscillation.

According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

A device includes two electrically isolated metalized posts attached in close proximity to each other on a bendable substrate. When the bendable substrate bends concavely with respect to the surface onto which the posts are mounted, the distance between the tops of the two posts decreases. At a fixed bending curvature, the two posts will meet and complete an electrical circuit. The posts comprise a flexible material so that the meeting of the posts has minimal effect on the spring constant or damping coefficient of the harmonic oscillation.

A gyroscope includes at least one anchor and a plurality of gyroscope spring elements coupled to the at least one anchor. The gyroscope also includes a plurality of concentric rings coupled to the plurality of gyroscope spring elements and configured to encircle the plurality of gyroscope spring elements. The gyroscope further includes an excitation/detection/tuning unit electrostatically coupled to the plurality of concentric rings.

A Micro-Electrical-Mechanical-Systems (MEMS) accelerometer system includes a proof-mass device having a proof-mass that moves from an initial position in response to an input acceleration, a transducer connected to the proof-mass device to output a transducer signal correlating to movement and/or position of the proof-mass, and a driver configured to drive the proof-mass. A controller actively controls the driver to actively drive the proof-mass toward an initial position, and actively adjusts the drive signal based on a temperature signal (T) indicative of given temperature, a transducer voltage signal (Vref) indicative of a transducer voltage reference, and the transducer signal to actively generate a corrected drive signal and delivers the corrected drive signal to the driver to actively control the driver. The controller can also utilize a robust loop-shaping stabilization operation to produce both an unfiltered estimate of the input acceleration and an uncorrected drive signal to stabilize the proof mass.