A sensor device includes an angular velocity sensor element, an acceleration sensor element, an intermediate member, and an elastic body. Both the angular velocity sensor element and the acceleration sensor element are mounted on the intermediate member. The elastic body is connected to the intermediate member and a fixing part located apart from the intermediate member. The intermediate member is configured to vibrate by receiving a vibration applied to the fixing part.

A physical quantity sensor includes a base, at least two arms, a movable plate, a hinge, and a physical quantity measurement element. Four quadrants of the sensor are defined by first and second orthogonal lines. The first line passes through the center of the sensor and crosses the hinge. The second line extends along the hinge. Fixed regions of the sensor are located in the first and second quadrants. No fixed regions are located in at least one of the third and fourth quadrants. The third and fourth quadrants are closer to the base than the first and second quadrants in a plan view.

A sensor module includes an X-axis angular velocity sensor device that outputs digital X-axis angular velocity data, a Y-axis angular velocity sensor device that outputs digital Y-axis angular velocity data, a Z-axis angular velocity sensor device that outputs digital Z-axis angular velocity data, an acceleration sensor device that outputs digital X-axis, Y-axis, and Z-axis acceleration data, a microcontroller, a first digital interface bus that electrically connects the X-axis angular velocity sensor device, the Y-axis angular velocity sensor device, and the Z-axis angular velocity sensor device to a first digital interface, and a second digital interface bus that electrically connects the acceleration sensor device to a second digital interface.

An accelerometer arrangement and method are described for determining accelerations of an inground tool. First and second triaxial accelerometers are supported such that a normal sensing axis of the first triaxial accelerometer is at least generally orthogonal to the normal sensing axis of the second triaxial accelerometer for determining the accelerations along the three orthogonal axes based on a combination of sensing axis outputs from one or both of the triaxial accelerometers. A weaker sensing axis of one triaxial accelerometer can be supported at least approximately normal to a weaker sensing axis of another triaxial accelerometer such that the weaker axes are not used. The triaxial accelerometers can be supported such that one axis of one accelerometer can be redundant with respect to another axis of another accelerometer. One triaxial accelerometer can be mounted on a tilted plane with respect to another triaxial accelerometer.

An accelerometer arrangement and method are described for determining accelerations of an inground tool. First and second triaxial accelerometers are supported such that a normal sensing axis of the first triaxial accelerometer is at least generally orthogonal to the normal sensing axis of the second triaxial accelerometer for determining the accelerations along the three orthogonal axes based on a combination of sensing axis outputs from one or both of the triaxial accelerometers. A weaker sensing axis of one triaxial accelerometer can be supported at least approximately normal to a weaker sensing axis of another triaxial accelerometer such that the weaker axes are not used. The triaxial accelerometers can be supported such that one axis of one accelerometer can be redundant with respect to another axis of another accelerometer. One triaxial accelerometer can be mounted on a tilted plane with respect to another triaxial accelerometer.

A method for detecting a state of a door or window is provided, comprising: receiving sensor data from a sensor arranged on the door or window, the sensor data comprising magnetometer data and at least one of angular velocity data and acceleration data; judging whether magnetic field distortion is present on the basis of the sensor data; and when it is judged that the magnetic field distortion is not present, determining the state of the door or window on the basis of the magnetometer data. The accuracy of state detection is thereby increased.

Techniques for resolving hemisphere ambiguity are disclosed. One or more magnetic fields are emitted at a handheld controller. The one or more magnetic fields are detected by one or more sensors positioned relative to a headset. Movement data corresponding to the handheld controller or the headset is detected. During a first time interval, a first position and a first orientation of the handheld controller within a first hemisphere are determined based on the detected one or more magnetic fields, and a first discrepancy is calculated based on the first position, the first orientation, and the movement data. During a second time interval, a second position and a second orientation of the handheld controller within a second hemisphere are determined based on the detected one or more magnetic fields, and a second discrepancy is calculated based on the second position, the second orientation, and the movement data.

An equipment fitting system that measures swings by a user of different pieces of equipment with inertial sensors, and analyzes sensor data to recommend which piece of equipment is optimal for the user from among those tested. Illustrative applications include fitting of baseball bats and golf clubs. Swing metrics calculated from sensor data may include an acceleration metric, a speed metric, and a momentum metric; these metrics may be combined into a metrics score for each piece of equipment. Other factors may be included in an overall score, such as the user's subjective score for each piece of equipment, and ratings from experts or other consumers. Users may assign the relative importance for the different factors to calculate an overall equipment score.

A semiconductor device includes a substrate, a movable portion provided on the substrate, a junction frame provided on the substrate to surround the movable portion, a cap bonded to the junction frame, the cap having a recessed portion and covering a space over the movable portion with the recessed portion facing the movable portion, the cap having an inside wall provided with irregularities, and a prevention film formed on the inside wall of the cap, the prevention film having irregularities on a surface thereof.

Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.